Wuxi Special Ceramic Electrical Co.,Ltd
| Color | Ivory |
| Supply Ability | 100,000 Pieces per Month |
| Surface Roughness | Ra 0.1-0.4 um |
| Density | 3.92 g/cm3 |
| Application | Wafer Processing Equipment |
| Delivery Time | 15-30 days after confirmation |
| Purity Grade | Semiconductor Grade |
| Feature | Low Ionic Contamination |
| Flatness | 0.02 mm |
| Packaging Details | Export-grade cartons with foam inserts, palletized for sea or air freight |
| Max Use Temperature | 1700 deg C |
| Alumina Content | 99.5% Al2O3 |
| Payment Terms | T/T, L/C, Western Union |
| Model Number | WS-AL-HP02 |
| Certification | ISO 9001:2015 |
| Place of Origin | Jiangsu, China |
| Brand Name | Wuxi Special Ceramic |
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Product Specification
| Color | Ivory | Supply Ability | 100,000 Pieces per Month |
| Surface Roughness | Ra 0.1-0.4 um | Density | 3.92 g/cm3 |
| Application | Wafer Processing Equipment | Delivery Time | 15-30 days after confirmation |
| Purity Grade | Semiconductor Grade | Feature | Low Ionic Contamination |
| Flatness | 0.02 mm | Packaging Details | Export-grade cartons with foam inserts, palletized for sea or air freight |
| Max Use Temperature | 1700 deg C | Alumina Content | 99.5% Al2O3 |
| Payment Terms | T/T, L/C, Western Union | Model Number | WS-AL-HP02 |
| Certification | ISO 9001:2015 | Place of Origin | Jiangsu, China |
| Brand Name | Wuxi Special Ceramic | ||
| High Light | High Purity Alumina Susceptor ，Semiconductor Grade Ceramic Plate ，Wafer Processing Equipment Part | ||
Semiconductor wafer processing demands materials that neither shed particles nor leach metallic contamination into the process environment. Our High-Purity Al2O3 Ceramic Susceptor Plates are manufactured from 99.5% alpha alumina with tightly controlled trace element levels, then fired in a clean production line to produce a fully dense, pore-free body that stays chemically silent even under plasma and high bias conditions.
Each plate is diamond ground and lapped to a flatness suitable for uniform wafer support, with an optional mirror polish that simplifies cleaning and reduces particle trapping between process runs. The material combines high electrical resistivity at operating temperature, excellent thermal conductivity for even heat distribution, and the mechanical rigidity required to hold tight dimensional tolerances across repeated thermal cycles.
Key Features| Parameter | Specification |
|---|---|
| Alumina Content | 99.5% Al2O3 |
| Total Impurities | < 5000 ppm |
| Density | 3.92 g/cm³ |
| Open Porosity | 0% |
| Flexural Strength | 380 MPa |
| Vickers Hardness | 1600 HV |
| Thermal Conductivity | 28 W/mK |
| Maximum Use Temperature | 1700°C |
| Volume Resistivity at 20°C | > 10@SUP14@ Ωcm |
| Volume Resistivity at 500°C | > 10@SUP12@ Ωcm |
| Dielectric Strength | 15 kV/mm |
| Surface Roughness as Ground | Ra 0.4 µm |
| Surface Roughness Polished | Ra 0.1 µm |
| Flatness | 0.02 mm |
| Diameter Range | Up to 360 mm |
| Color | Ivory |
These susceptor plates are designed for semiconductor equipment parts including wafer support pedestals in CVD and PVD chambers, etch electrode assemblies, rapid thermal processing stages and ion implantation fixtures. The material also suits flat panel and photovoltaic processing tools that share the same cleanliness requirements.
Where original equipment manufacturers need a domestic source for consumable ceramic components, we manufacture strictly to the customer drawing and can supply matched sets with verified flatness, concentricity and surface finish data for each individual serial number.
Packaging & Quality AssuranceSemiconductor grade parts are cleaned in deionized water baths, dried in a controlled environment and sealed in antistatic bags inside rigid foam-lined boxes to prevent surface damage in transit.
Each shipment includes dimensional inspection certificates, material purity analysis and a surface quality report. Parts are traceable by laser engraved serial number on request.
Company Details
Business Type:
Manufacturer,Importer,Exporter
Year Established:
2008
Total Annual:
>200000
Employee Number:
>100
Ecer Certification：
Verified Supplier
Our History Wuxi Special Ceramic Electrical as a leading special ceramic manufacturer,the factory is located in Chinese famous pottery town “YiXING” city about 200 km from Shanghai. From the beginning of businees ,has been dealing with export business for more than 10 years.... Our History Wuxi Special Ceramic Electrical as a leading special ceramic manufacturer,the factory is located in Chinese famous pottery town “YiXING” city about 200 km from Shanghai. From the beginning of businees ,has been dealing with export business for more than 10 years....
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