Wuxi Special Ceramic Electrical Co.,Ltd
| Delivery Time | 15-30 days after confirmation |
| Surface Finish | Mirror Polished |
| Surface Roughness | Ra 0.02 um |
| Alumina Content | 99.5% Al2O3 |
| Application | Semiconductor Processing Equipment |
| Max Use Temperature | 1700 deg C |
| Density | 3.92 g/cm3 |
| Packaging Details | Export-grade cartons with foam inserts, palletized for sea or air freight |
| Payment Terms | T/T, L/C, Western Union |
| Supply Ability | 100,000 Pieces per Month |
| Color | Ivory |
| Purity Grade | Vacuum Grade |
| Brand Name | Wuxi Special Ceramic |
| Model Number | WS-AL-PS14 |
| Place of Origin | Jiangsu, China |
| Certification | ISO 9001:2015 |
View Detail Information
Explore similar products
White Melting Alumina Wafer Polishing Plate Alumina Ceramic Sheet Electrical
15000v Alumina Ceramic Nozzles Components For Tig Welding Torches Wear Resisting
Protection Ceramic Alumina Oxide Alumina Insulator Al2O3 Tube With One End
99% High Pure Aluminum Oxide Grading Al2O3 Ceramic Impeller High Thermal
Product Specification
| Delivery Time | 15-30 days after confirmation | Surface Finish | Mirror Polished |
| Surface Roughness | Ra 0.02 um | Alumina Content | 99.5% Al2O3 |
| Application | Semiconductor Processing Equipment | Max Use Temperature | 1700 deg C |
| Density | 3.92 g/cm3 | Packaging Details | Export-grade cartons with foam inserts, palletized for sea or air freight |
| Payment Terms | T/T, L/C, Western Union | Supply Ability | 100,000 Pieces per Month |
| Color | Ivory | Purity Grade | Vacuum Grade |
| Brand Name | Wuxi Special Ceramic | Model Number | WS-AL-PS14 |
| Place of Origin | Jiangsu, China | Certification | ISO 9001:2015 |
| High Light | Polished Alumina Wafer Chuck ，Mirror Finish Ceramic Part ，Semiconductor Processing Equipment | ||
In semiconductor processing, the surface that touches the wafer must be perfect: smooth enough to avoid particle trapping, clean enough to avoid contamination, and stable enough to hold wafers flat at process temperature. Our Polished-Surface Al2O3 Ceramic Wafer Chucks are pressed and sintered from vacuum grade 99.5% alumina, then ground and polished to a mirror finish with roughness down to 0.02 microns Ra.
The dense, non-porous surface releases wafers cleanly, resists the aggressive chemistries of etch and deposition chambers, and stands up to repeated plasma exposure without degradation. Vacuum grooves, lift pin holes and edge contours are precision machined to the tool design, making each chuck a ready to install component rather than a blank.
Key Features| Parameter | Specification |
|---|---|
| Alumina Content | 99.5% Al2O3 |
| Density | 3.92 g/cm³ |
| Surface Roughness Polished | Ra 0.02 µm |
| Flatness | 0.01 mm |
| Total Purity Grade | Vacuum Grade |
| Total Impurities | < 5000 ppm |
| Flexural Strength | 380 MPa |
| Vickers Hardness | 1700 HV |
| Maximum Use Temperature | 1700°C |
| Dielectric Strength | 15 kV/mm |
| Wafer Size Supported | 2-12 Inch |
| Surface Options | Flat or Grooved |
| Color | Ivory |
| Process | Isostatic Pressing, CNC Machining, Polishing |
| Inspection | Surface and Dimension Report |
| Application | Semiconductor Processing Equipment |
These chucks serve semiconductor processing equipment including plasma etch systems, PVD and CVD deposition tools, metrology stages, wafer inspection fixtures and photolithography support stages, as well as similar handling requirements in LED and photovoltaic manufacturing.
We manufacture both OEM design chucks and replacement units for installed tools, with each part documented by serial number for process traceability.
Packaging & Quality AssurancePolished chucks are cleaned, wrapped in cleanroom grade film and packed in foam-lined rigid cases to protect the optical quality surface during shipment.
Every chuck is delivered with a surface finish and dimensional inspection report, and cleanroom packaging options are available on request.
Company Details
Business Type:
Manufacturer,Importer,Exporter
Year Established:
2008
Total Annual:
>200000
Employee Number:
>100
Ecer Certification：
Verified Supplier
Our History Wuxi Special Ceramic Electrical as a leading special ceramic manufacturer,the factory is located in Chinese famous pottery town “YiXING” city about 200 km from Shanghai. From the beginning of businees ,has been dealing with export business for more than 10 years.... Our History Wuxi Special Ceramic Electrical as a leading special ceramic manufacturer,the factory is located in Chinese famous pottery town “YiXING” city about 200 km from Shanghai. From the beginning of businees ,has been dealing with export business for more than 10 years....
Get in touch with us
Leave a Message, we will call you back quickly!