Xi'an Kacise Optronics Co.,Ltd.
| Payment Terms | L/C,D/A,D/P,T/T,Western Union,MoneyGram |
| Supply Ability | 1000 Piece/Pieces per Week negotiable |
| Delivery Time | 5-8 work days |
| Packaging Details | each unit has individual box and all boxes are packed in standard packages or customers requests available |
| Detection Principle | NDIR |
| Detected Gases | SiF4, CF4, SF6, NF3, CO2 |
| Measuring Range | 1 - 264ppm (0 - 200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1%F.S. |
| Detection Limit | 1ppm |
| Brand Name | KACISE |
| Model Number | KGD-MQ-537 |
| Certification | CE |
| Place of Origin | CHINA |
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Product Specification
| Payment Terms | L/C,D/A,D/P,T/T,Western Union,MoneyGram | Supply Ability | 1000 Piece/Pieces per Week negotiable |
| Delivery Time | 5-8 work days | Packaging Details | each unit has individual box and all boxes are packed in standard packages or customers requests available |
| Detection Principle | NDIR | Detected Gases | SiF4, CF4, SF6, NF3, CO2 |
| Measuring Range | 1 - 264ppm (0 - 200mTorr) | Repeatability | ±0.5% |
| Linearity | ±1%F.S. | Detection Limit | 1ppm |
| Brand Name | KACISE | Model Number | KGD-MQ-537 |
| Certification | CE | Place of Origin | CHINA |
| High Light | High Linearity Infrared Gas Sensor ，0 200mTorr Infrared Gas Sensor ，1 264ppm Infrared Gas Sensor | ||
The KGD-MQ-537 Infrared Gas Sensor utilizes Non-Dispersive Infrared (NDIR) technology to accurately measure gases including SiF4, CF4, SF6, NF3, and CO2 in semiconductor applications. Designed with compatibility for common equipment dimensions, flanges, and communication protocols, this sensor is ideal for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, helping to reduce cleaning time, cut costs, and increase production.
| Parameter | Details |
|---|---|
| Detection Principle | NDIR |
| Detected Gases | SiF4, CF4, SF6, NF3, CO2 |
| Measuring Range | 1-264ppm (0-200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1% F.S. |
| Detection Limit | 1ppm |
Company Details
Business Type:
Manufacturer
Year Established:
2008
Total Annual:
8000000-10000000
Employee Number:
100~150
Ecer Certification：
Verified Supplier
Xi'an Kacise Optronics Co.,Ltd. is a professional manufacturer of measuring instruments , located in China xi’an City. Since 2008, Xi'an Kacise focused on the development and production of pressure, level and flow measuring instruments . We have been specializing... Xi'an Kacise Optronics Co.,Ltd. is a professional manufacturer of measuring instruments , located in China xi’an City. Since 2008, Xi'an Kacise focused on the development and production of pressure, level and flow measuring instruments . We have been specializing...
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