Product Specification

Custom Design Quartz Boats for Semiconductor Processing

Product Overview:

Our Custom Design Quartz Boats are precision-engineered to meet the strict demands of semiconductor and chemical processing industries. These high-purity containers, made from fused quartz (SiO₂), are designed to securely hold and transport silicon wafers, substrates, or other materials through high-temperature processes such as diffusion, oxidation, and chemical vapor deposition (CVD). Quartz's exceptional thermal stability, chemical resistance, and low thermal expansion make it the ideal material for high-performance applications in cleanroom environments.

We offer over 50 types and variations of quartz boats, including customized designs to suit specific process requirements. Whether you require a standard or non-standard design, our quartz boats are crafted for durability and performance. Additionally, we provide repair services, including fire repair, to extend the lifespan of your quartz components.

Quartz Material Specifications:

Key Features:

• Material: High-purity fused quartz (SiO₂)

• Purity: 99.99% for minimal contamination

• Thermal Resistance: Withstands extreme temperatures up to 1200°C without deformation or degradation

• Chemical Resistance: Inert to most chemicals, ensuring no contamination during high-temperature processes

• Low Thermal Expansion: Ensures dimensional stability during rapid temperature fluctuations

• Customization: Available in standard or customized sizes (e.g., 4" wafers, or customized dimensions)

• Hook Feature: Available with hooks at one end for easy wafer insertion and removal from furnaces

Applications:

1. Semiconductor Manufacturing: Holds and transports silicon wafers during critical processes such as diffusion, oxidation, and chemical vapor deposition (CVD).

2. Solar Cell Production: Essential in photovoltaic cell manufacturing for processing silicon wafers, including doping and oxidation.

3. Research and Development: Ideal for academic and industrial labs where high-purity, high-temperature applications are required.

4. Chemical Processing: Suitable for use in chemical processing industries where high thermal and chemical stability is necessary.

Design Variations:

• Grooved Slots: Different slot sizes to accommodate wafers of varying thickness, with custom slot configurations available.

• Geometries: U-type, V-type, or other custom shapes tailored to your process needs.

• Hook Design: Equipped with hooks for easy insertion and removal of wafers in furnaces.

• Sizes: Standard sizes for 100mm, 150mm, 200mm, and 300mm wafers. Custom sizes available for specialized needs.

Benefits of Quartz Boats:

• Exceptional Thermal Stability: Can endure temperatures exceeding 1000°C, ideal for high-temperature processes like diffusion and annealing.

• Ultra-High Purity: Quartz’s low impurity levels ensure minimal contamination, particularly critical for advanced semiconductor production.

• Dimensional Precision: The low thermal expansion of quartz ensures that the boat maintains its shape and alignment during temperature fluctuations.

• Versatility: Compatible with various semiconductor processes, including LPCVD, oxidation, and annealing.

• Automation-Ready: Designed with precision to integrate seamlessly with robotic wafer handling systems, minimizing manual handling risks.

Quartz Boat FAQ:

Q1: Can quartz boats be reused?
Yes, with proper cleaning and maintenance, quartz boats can be reused multiple times without compromising performance.

Q2: How should quartz boats be cleaned?
Quartz boats should be cleaned using acid baths or ultrasonic cleaning methods in compliance with cleanroom standards. Avoid sudden temperature changes during cleaning.

Q3: Are quartz boats compatible with all furnace types?
Yes, quartz boats are compatible with most horizontal and vertical furnace systems used in semiconductor and photovoltaic processing.

Q4: What sizes are available for custom orders?
Quartz boats are available in standard sizes for 100mm, 150mm, 200mm, and 300mm wafers, with additional customization available for specialized applications.

Related Products:

Quartz Boats Fused Silica Boat SiO₂≥99.99% Surface Roughness Ra≤0.1μm Wafer Carrier

Request a Quote:

For more information or to request a quote, please contact us. We will collaborate with you to design the perfect quartz boat solution for your specific requirements.