SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Delivery Time | 2-4weeks |
| Chemical Composition: | SiO₂ 99.9%; 99.98% |
| Density: | 2.2 (g/cm³) |
| Melting Point: | 1732 ℃ |
| Visible Light Transmittance: | >93% |
| UV Transmittance: | 80% |
| Applications: | LED Epitaxy,Precision Annealing |
| Brand Name | ZMSH |
| Model Number | Quartz boats |
| Certification | rohs |
| Place of Origin | CHINA |
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Product Specification
| Payment Terms | T/T | Delivery Time | 2-4weeks |
| Chemical Composition: | SiO₂ 99.9%; 99.98% | Density: | 2.2 (g/cm³) |
| Melting Point: | 1732 ℃ | Visible Light Transmittance: | >93% |
| UV Transmittance: | 80% | Applications: | LED Epitaxy,Precision Annealing |
| Brand Name | ZMSH | Model Number | Quartz boats |
| Certification | rohs | Place of Origin | CHINA |
| High Light | Fused Silica Quartz boats ，Surface Roughness Quartz boats ，SiO₂≥99.99% Quartz boats | ||
Quartz glass boats are specialized vessels manufactured from high-purity silicon dioxide (SiO₂) through high-temperature melting processes. Renowned for their exceptional thermal resistance, chemical stability, and optical transparency, they serve as irreplaceable components in semiconductor fabrication, laboratory R&D, medical devices, and high-temperature industrial applications. Engineered to balance precision structures with material performance limits, these boats operate stably in extreme temperatures (-270℃ to 1450℃) while resisting strong acids, alkalis, and electromagnetic interference. They are widely used for high-temperature process carriers, optical component supports, and precision experiment platforms. With the rise of third-generation semiconductors and new energy industries, demand for quartz glass boats in chip manufacturing, laser packaging, and high-temperature reaction systems continues to grow, solidifying their role as critical infrastructure in advanced labs and production lines.
| Chemical Composition: | SiO₂ 99.9%; 99.98% |
| Density: | 2.2 (g/cm³) |
| Mohs Hardness: | 6.6 |
| Melting Point: | 1732 ℃ |
| Operating Temperature: | 1100 ℃ |
| Max Short-Term Temperature: | 1450 ℃ |
| Acid Resistance: | 30× ceramics / 150× stainless steel |
| Visible Light Transmittance: | >93% |
| UV Transmittance: | 80% |
| Electrical Resistivity: | 10,000× conventional glass |
| Annealing Point: | 1215 ℃ |
| Softening Point: | 1730 ℃ |
| Type | Characteristics | Applications |
| Transparent Quartz Boat | JGS1 grade (UV-grade), OH content <5ppm, >90% transmittance @185nm | Lithography, epitaxy (optical-sensitive processes) |
| Opaque Quartz Boat | Milky appearance, porosity <0.3%, 50% improved thermal shock resistance | Diffusion, annealing (high-temperature processes) |
| Synthetic Quartz Boat | CVD-processed, metal impurities <0.1ppm, superior plasma corrosion resistance | Etching, ion implantation (dry processes) |
| Doped Quartz Boat | Ti/Ce-doped, crystallization resistance up to 1300℃ | Single-crystal silicon growth, MOCVD (ultra-high-temp environments) |
| Industry | Typical Use Cases | Key Requirements |
| Semiconductor | Wafer diffusion, LPCVD process carriers | High-temp deformation <0.1mm/300mm |
| Photovoltaics | PERC cell P-diffusion, TOPCon tunnel oxide layer | POCl₃ corrosion resistance ≥200 cycles |
| LED Epitaxy | MOCVD reaction chamber wafer holders | Surface roughness ≤0.05μm |
| Precision Annealing | Magnetic materials, specialty alloy heat treatment | Metal vapor erosion resistance |
| Research Equipment | Synchrotron beamline sample holders, MBE substrates | Ultra-high vacuum compatibility (<10⁻⁸Pa) |
1. Extreme Thermal Performance
· Long-term operating temperature: 1100℃ (short-term up to 1450℃)
· 1000 thermal cycles (-196℃↔1200℃) without cracking
2. Chemical Stability
· Resists all strong acids except HF (98% H₂SO₄, 37% HCl, etc.)
· 3× better alkali resistance than conventional ceramics
3. Physical Properties
· Thermal conductivity: 1.4 W/(m·K) (prevents heat accumulation)
· Dielectric strength: 40 kV/cm (at 20℃)
4. Cleanliness Control
· Produced in Class 10 cleanrooms
· Surface particles ≤5 counts/cm² (≥0.3μm)
ZMSH specializes in customized quartz glass boats for semiconductors, photovoltaics, and optoelectronics. Equipped with quartz research institute and CNAS-certified lab, we utilize laser 3D inspection systems to achieve ±0.01mm machining accuracy and atomic-level surface treatment. Our engineering team offers end-to-end support from structural design, thermal simulation to process validation, with expertise in ultra-high-temperature (1600℃) and extreme thermal shock (ΔT≥1200℃) applications. Through our Class 10 cleanroom and smart production line, we accommodate R&D prototypes.
Related product recommendations: Quartz capillary
1. Q: What is a quartz boat?
A: A quartz boat is a high-purity fused silica container used in semiconductor and laboratory applications for high-temperature processing of wafers and samples.
2. Q: Why is quartz used in glass?
A: Quartz is used in glass for its superior thermal stability (up to 1100°C), optical clarity (UV to IR transmission), and chemical resistance compared to conventional glass.
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Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...
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