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China factory - SHANGHAI FAMOUS TRADE CO.,LTD

SHANGHAI FAMOUS TRADE CO.,LTD

  • China,Shanghai ,Shanghai
  • Verified Supplier

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China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork
China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork

  1. China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork
  2. China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork
  3. China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork
  4. China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork
  5. China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork
  6. China High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork

High Purity SiC End Effector for Wafer Handling Corrosion Heat Resistant Fork

  1. MOQ: 5
  2. Price: 100
  3. Get Latest Price
Payment Terms T/T
Supply Ability 1000per month
Delivery Time 3-4 week
Packaging Details Foam Cushion + Carton box
Surface Resistance 10⁴~10⁹Ω
Size Customizable (for 4–12 inch wafers)
Purity 99.9%
Density D=8.91(g/cm3)
Diameter 25-500 um
Application Package test, chip sorting
Mechanical Strength Flexural strength > 400 MPa
Resistivity 0.1~60ohm.cm
Thermal Resistance 1600 ℃
Chemical Resistance Resistant to acids, bases, and plasma
Brand Name ZMSH
Certification rohs
Place of Origin China

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  1. Product Details
  2. Company Details

Product Specification

Payment Terms T/T Supply Ability 1000per month
Delivery Time 3-4 week Packaging Details Foam Cushion + Carton box
Surface Resistance 10⁴~10⁹Ω Size Customizable (for 4–12 inch wafers)
Purity 99.9% Density D=8.91(g/cm3)
Diameter 25-500 um Application Package test, chip sorting
Mechanical Strength Flexural strength > 400 MPa Resistivity 0.1~60ohm.cm
Thermal Resistance 1600 ℃ Chemical Resistance Resistant to acids, bases, and plasma
Brand Name ZMSH Certification rohs
Place of Origin China
High Light Semiconductor Processing SiC End EffectorWafer Handling SiC End EffectorCorrosion Resistant SiC End Effector

 

Product Description:

 

Our SiC end effectors are designed for ultra-clean wafer handling in semiconductor manufacturing environments. Manufactured using high-purity silicon carbide, these forks provide exceptional thermal resistance, chemical stability, and mechanical strength—making them ideal for use in harsh process chambers such as etching, deposition, and high-temperature transport systems.

The dense, fine-grain SiC body ensures low particle generation, excellent dimensional stability, and compatibility with 200mm to 300mm wafers. Custom designs are available for specific robotic arms and wafer carriers.

 


 

Key Features:

  • Material: High-purity Silicon Carbide (SiC)

 

  • Excellent thermal resistance (up to 1600°C)

 

  • Superior chemical and plasma corrosion resistance

 

  • High mechanical strength and rigidity

 

  • Low particle generation for cleanroom use

 

  • Available for 4", 6", 8", and 12" wafer handling

 

  • Custom shapes and slots for robotic compatibility

 


 

 

Product Specifications:

 

Parameter Specification
Material High-purity SiC (≥99%)
Size Customizable (for 4–12 inch wafers)
Surface Finish Polished or matte per requirement
Thermal Resistance Up to 1600°C
Chemical Resistance Resistant to acids, bases, and plasma
Mechanical Strength Flexural strength > 400 MPa
Cleanroom Grade Suitable for Class 1–100

 

 

 

 

 

 

Keywords / Tags:
 

#SiCEndEffector #WaferHandling #SiCFork #SemiconductorEquipment #WaferTransfer #HighPuritySiC #SiCWaferCarrier #SemiconductorAutomation #VacuumCompatible #SiCComponent #EtchingToolPart #RoboticWaferHandling

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer,Agent,Importer,Exporter,Trading Company

  • Year Established:

    2013

  • Total Annual:

    1000000-1500000

  • Ecer Certification:

    Verified Supplier

    SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.    We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...     SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.    We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...

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Get in touch with us

  • Reach Us
  • SHANGHAI FAMOUS TRADE CO.,LTD
  • Room.1-1805,No.1079 Dianshanhu Road,Qingpu Area Shanghai city, China /201799
  • https://www.galliumnitridewafer.com/

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