JZJWLW Series Oil Free Vertical Vacuum Pump High Pumping Speeds And A Clean

Product Specification

JZJWLW Series Oil-Free Vertical Vacuum System high pumping speeds and a clean, oil-free vacuum

Introduction

The core of this system integrates an oil-free Roots pump (mechanical booster) and an oil-free dry pump (such as a screw pump, claw pump, or dry vane pump) stacked vertically within a compact enclosure. This vertical design saves valuable floor space. The system also includes all necessary ancillary components, such as vacuum gauges, electrical control systems, pneumatic valves, efficient cooling systems, silencers, and piping, forming a complete "plug-and-play" package. Its core design philosophy is to provide a one-stop solution for applications requiring high pumping speeds and a clean, oil-free vacuum.

Advantages

Ultimate Cleanliness, Completely Oil-Free: Both the booster and backing pumps operate dry, ensuring the entire pumping process from atmosphere to high vacuum is absolutely oil-free, eliminating any risk of oil contamination.

High Pumping Speed and Efficiency: The Roots pump provides immense pumping speed in the medium vacuum range, significantly reducing pump-down time and greatly improving production efficiency.

Vertical Structure, Space-Saving: The innovative vertical layout saves approximately 50% floor space compared to traditional horizontal systems, optimizing workshop or laboratory space utilization.

Modular Integration, Plug-and-Play: Fully integrated, commissioned, and tested before leaving the factory. Users only need to connect power and air supply (if required) to put it into operation, simplifying installation and reducing on-site work.

Intelligent Control, Safe and Reliable: Equipped with a PLC control system for automatic start/stop, sequence operation, fault diagnosis, alarms, and protection (e.g., overload, over-temperature protection). Ensures safe, reliable operation and simple control.

Low Noise and Vibration: Features optimized silencer design and a stable structure, resulting in low operational noise and vibration levels, improving the working environment.

Low Maintenance Costs: The oil-free design means no need for regular replacement and disposal of vacuum pump oil, oil filters, etc., reducing long-term operating and maintenance costs.

Applications

The JZJWLW Series Oil-Free Vertical Vacuum System is specifically designed for cutting-edge industrial fields with extremely high requirements for vacuum cleanliness and pumping speed.

• Semiconductor & IC Manufacturing: Wafer dry etching, Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), Ion Implantation, Low-Pressure Chemical Vapor Deposition (LPCVD).

• Photovoltaic (PV) Solar: Thin-film solar cell production lines, PECVD, sputtering coating processes.

• Aerospace & Aviation: Space environment simulation chambers, satellite component testing, aero-engine testing.

• Scientific Research & High-End Coating: Synchrotron radiation light sources, particle accelerators, optical coating (e.g., AR, MR coating), functional coating.

• High-End Material Processing: Vacuum melting and sintering of high-quality alloys, ceramic metallization.

• Pharmaceutical & Bio-engineering: Pharmaceutical lyophilization and large-scale solvent recovery where oil contamination must be avoided.