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{"title":"14*11 Pressureless Sintered SiC Roller","imgUrl":"https:\/\/img.chinax.com\/nimg\/4a\/4f\/3a1b020de27f6492ed960ccdb4f9-200x200-1\/14_2a11_pressureless_sintered_sic_roller.jpg","attrs":{"Minimum Order Quantity":"Negotiable","Payment Terms":"L\/C,D\/A,D\/P,T\/T,Western Union,MoneyGram","Model Number":"Customizable","Place of Origin":"China"}}
{"title":"Pressureless Sintered SSiC Mechanical Seal Rings with 1650\u00b0C Max Service Temp","imgUrl":"https:\/\/img.chinax.com\/nimg\/93\/b2\/0aa180e09cc5b38b9916cdc6a71d-200x200-1\/pressureless_sintered_ssic_mechanical_seal_rings_with_1650_c2_b0c_max_service_temp_zero_free_silicon_and_high_purity.jpg","attrs":{"Minimum Order Quantity":"Negotiable","Delivery Time":"Negotiable","Model Number":"Customizable","Brand Name":"KEGU"}}
{"title":"Premium-Grade Sintered Silicon Carbide (SSiC) Structural Beams 30\u202fmm\u202f\u00d7\u202f40\u202fmm\u202f\u00d7","imgUrl":"https:\/\/img.chinax.com\/nimg\/77\/9c\/4660317dc063f8f070c9b4193768-200x200-1\/premium_grade_sintered_silicon_carbide_28ssic_29_structural_beams_30_e2_80_afmm_e2_80_af_c3_97_e2_80_af40_e2_80_afmm_e2_80_af_c3_9.jpg","attrs":{"Minimum Order Quantity":"Negotiable","Price":"Negotiable","Delivery Time":"Negotiable","Packaging Details":"Strong wooden box for Global shipping"}}
{"title":"8-9mm Pressureless Sintered Silicon Carbide Grinding Balls with 2000-2500 Hv","imgUrl":"https:\/\/img.chinax.com\/nimg\/f1\/3a\/6d66a911bd2e44c59cdddf68b969-200x200-1\/8_9mm_pressureless_sintered_silicon_carbide_grinding_balls_with_2000_2500_hv_hardness_2c_1600_c2_b0c_max_service_temperature_2c_an.jpg","attrs":{"Price":"Negotiable","Payment Terms":"L\/C,D\/A,D\/P,T\/T,Western Union,MoneyGram","Place of Origin":"China","Model Number":"Customizable"}}
{"title":"Black Silicon Carbide Refractory Bricks with High-Temp Abrasion and Thermal","imgUrl":"https:\/\/img.chinax.com\/nimg\/9e\/0f\/ffaec3f17d4bc47603a77361b043-200x200-1\/black_silicon_carbide_refractory_bricks_with_high_temp_abrasion_and_thermal_shock_resistance_for_extreme_industrial_use.jpg","attrs":{"Brand Name":"KEGU","Place of Origin":"China","Price":"Negotiable","Payment Terms":"L\/C,D\/A,D\/P,T\/T,Western Union,MoneyGram"}}
{"title":"High-Performance Silicon Carbide Rollers with 1650\u00b0C Service Temperature, 196 W","imgUrl":"https:\/\/img.chinax.com\/nimg\/0a\/3c\/31e233b3a869adadec6c4d58d5fb-200x200-1\/high_performance_silicon_carbide_rollers_with_1650_c2_b0c_service_temperature_2c_196_w_2fm_2ak_thermal_conductivity_2c_and_380mpa_.jpg","attrs":{"Delivery Time":"Negotiable","Usage":"Industry Usage","Chemical Composition":"Al2O3, SiO2","Sic Content":"85%"}}
High-Corrosion Resistance Industrial Ceramic Parts: HDPCVD Domes & Components
Advanced Ceramic Solutions for Demanding Semiconductor Applications
Our high-performance industrial ceramic components are engineered for extreme environments in semiconductor manufacturing, including HDPCVD (High-Density Plasma Chemical Vapor Deposition) processes. Available in multiple material options to meet specific thermal, mechanical, and corrosion resistance requirements.
HDPCVD Dome Products
Available Types & Specifications:
Standard HDP Dome: 200mm / 300mm configurations
SpeedDome: Optimized for high-throughput processes
DPS Dome: Enhanced plasma resistance designs
Custom Roughness: Inner contour surface finish from Ra 0.5 to Ra 5.3
Key Benefits: Prevents film shedding, minimizes particle contamination, compatible with various process requirements
Material Selection Guide
Property
Alumina (Al₂O₃)
Aluminum Nitride (AlN)
Zirconia (ZrO₂)
Silicon Carbide (SiC)
Sapphire (Single Crystal Al₂O₃)
Density (g/cm³)
3.9
3.3
6.0
3.21
3.97
Hardness (GPa)
14-17
10-12
13
27-28
22.5
Elastic Modulus (GPa)
350-400
300-350
200-250
420-470
440-690
Fracture Toughness (MPa*m¹/²)
3-4
2.8-3.3
10-11
3.5-3.6
2.6
Thermal Conductivity (W/m*K)
28-32
180-200
2-3
160-200
40
Thermal Shock Resistance
200-280°C
Excellent
300°C
Excellent
800°C
Dielectric Constant (1MHz)
9.8
8.5-9
30-33
Conductive
9.3
Volume Resistivity (Ω*cm)
>10¹⁴
>10¹⁴
Adjustable
Varies
>10¹⁴
Key Material Advantages
Alumina (Al₂O₃)
Excellent chemical stability and corrosion resistance
High hardness and wear resistance
Ideal for wear components, insulating substrates, corrosion-resistant containers
Aluminum Nitride (AlN)
Superior thermal conductivity for heat dissipation
Excellent electrical insulation properties
Perfect for electronic heat sinks, high-power device packaging
Zirconia (ZrO₂)
Exceptional fracture toughness
Transformation toughening mechanism
Suitable for cutting tools, oxygen sensors, fuel cells
Silicon Carbide (SiC)
Extreme hardness and thermal conductivity
Excellent for ballistic armor, high-temperature bearings, semiconductor components
Sapphire (Single Crystal Al₂O₃)
Optical transparency combined with high hardness
Superior thermal shock resistance
Ideal for specialized optical and extreme environment applications
Performance Features
Superior Corrosion Resistance: Withstands aggressive chemical environments in semiconductor processing
Minimal Particle Generation: Engineered surfaces reduce contamination in cleanroom environments
Customizable Surface Properties: Tailored roughness and finishing to meet specific process requirements
Thermal Stability: Maintains dimensional integrity under rapid thermal cycling
Electrical Insulation: Excellent dielectric properties for plasma applications
Founded in 2017, Kegu is a leading advanced materials developer based in China’s Xixian New District, Qinhan New City—strategically positioned near major transport links including the Xianyang East Expressway. With a registered capital of 35.5 million RMB (approx. 5 million USD), we o...
Founded in 2017, Kegu is a leading advanced materials developer based in China’s Xixian New District, Qinhan New City—strategically positioned near major transport links including the Xianyang East Expressway. With a registered capital of 35.5 million RMB (approx. 5 million USD), we o...
