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Large Scale 115m³/h ultra pure water equipment for Semiconductor with EDI module
I. Product Introduction
Ultra-Pure Water System for Semiconductor Industry Designed specifically for precision cleaning in semiconductor manufacturing, our system delivers water purity that meets rigorous industry standards, including:
Standard Configuration: Raw Water → Raw Water Tank → Booster Pump → Flocculant/Reducer Dosing → Activated Carbon Filter → Ultrafiltration (UF) → Scale Inhibitor Dosing → Security Filter → 1st Stage High-Pressure Pump → 1st Stage RO → pH Adjustment → Intermediate Tank → 2nd Stage High-Pressure Pump → 2nd Stage RO → Purified Water Tank → EDI Booster Pump → UV Sterilizer → Cartridge Filter → EDI System → Ultra-Pure Water Tank → Transfer Pump → TOC Removal Unit → Polishing Resin → Final Filter → Point of Use
Process Highlights:
Multi-Stage Pretreatment: Removes particles, organics, and chlorine to protect RO membranes.
Dual RO System: Achieves salt rejection rate for consistent high-purity water.
EDI Technology: Continuous electro-deionization eliminates the need for chemical regeneration.
Polishing Resin: Final purification stage for ultralow TOC and ionic contaminants
III. Specifications
Item
Specification
Electricity Supply
380V
Produced Water Quality
Resistivity ≥15-18.25 MΩ·cm
Core Technology
Double-pass Reverse Osmosis + EDI + Polishing Resin
Key Components
RO Membrane Modules, EDI Units
Operation Mode
Full Automatic (PLC-controlled)
Product Features
Stable Water Quality,Low Operation Cost,Reliable Performance
After-Sales Service
2-Year Warranty For Standard Equipment
EDI Photo:
RO Photo:
Details of other process equipment:
IV. Design Advantages
Fully Automated Control:
Automatic backwash and regeneration cycles.
Manual override option for maintenance.
Factory-Integrated Wiring:
Pre-wired components reduce on-site installation time .
Advanced Maintenance Features:
RO chemical cleaning system extends membrane life.
Recirculation loops ensure water quality stability.
Premium Materials:
304 stainless steel and UPVC piping for corrosion resistance.
Intuitive Operation:
Integrated control panel with real-time monitoring.
Remote access option for troubleshooting.
Low Maintenance:
Durable components designed for continuous operation.
V.Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )
