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{"title":"1000LPH Ultrapure Water System with PLC Control and Stainless Steel","imgUrl":"https:\/\/img.chinax.com\/nimg\/6f\/91\/f8ac6ef230f3ccb1216ba055f4e5-200x200-1\/1000lph_ultrapure_water_system_with_plc_control_and_stainless_steel.jpg","attrs":{"Brand Name":"Hongjie","Model Number":"HJ-UP1T","Certification":"ISO 14001,ISO 9001,CE,EPA","Place of Origin":"Shenzhen,China"}}
{"title":"Ultrapure Water Purification Equipment With Advanced RO & EDI Technology","imgUrl":"https:\/\/img.chinax.com\/nimg\/e7\/78\/f68dbbd9264804cf995fdd3c8899-200x200-1\/ultrapure_water_purification_equipment_with_advanced_ro_26_edi_technology.jpg","attrs":{"Brand Name":"Hongjie","Model Number":"HJ-UP1T","Certification":"ISO 14001,ISO 9001,CE,EPA","Place of Origin":"Shenzhen,China"}}
{"title":"RO + EDI Ultrapure Water System With Precision Welding & Polishing Process","imgUrl":"https:\/\/img.chinax.com\/nimg\/e0\/b6\/98bcc97a954ccf186d8e86573c97-200x200-1\/ro_2b_edi_ultrapure_water_system_with_precision_welding_26_polishing_process.jpg","attrs":{"Brand Name":"Hongjie","Model Number":"HJ-UP1T","Certification":"ISO 14001,ISO 9001,CE,EPA","Place of Origin":"Shenzhen,China"}}
{"title":"1 Ton Stainless Steel RO System For Ultrapure Laboratory Water Treatment","imgUrl":"https:\/\/img.chinax.com\/nimg\/29\/70\/4b295c5877362d4bf02e92a75954-200x200-1\/1_ton_stainless_steel_ro_system_for_ultrapure_laboratory_water_treatment.jpg","attrs":{"Brand Name":"Hongjie","Model Number":"HJ-UP1T","Certification":"ISO 14001,ISO 9001,CE,EPA","Place of Origin":"Shenzhen,China"}}
{"title":"Industrical 5TPH Reverse Osmosis Equipment RO Water Treatment System","imgUrl":"https:\/\/img.chinax.com\/nimg\/0f\/2a\/29907431cb2c7c27696ebc44e7ad-200x200-1\/industrical_5tph_reverse_osmosis_equipment_ro_water_treatment_system.jpg","attrs":{"Brand Name":"Hongjie","Model Number":"HJ-UP1T","Certification":"ISO 14001,ISO 9001,CE,EPA","Place of Origin":"Shenzhen,China"}}
{"title":"0.25-100t RO+EDI Ultrapure Industrial Water Treatment Equipment System","imgUrl":"https:\/\/img.chinax.com\/nimg\/c4\/f0\/eb35f5eb930debc05e83cd63f9b2-200x200-1\/0_25_100t_ro_2bedi_ultrapure_industrial_water_treatment_equipment_system.jpg","attrs":{"Brand Name":"Hongjie","Model Number":"HJ-UP1T","Certification":"ISO 14001,ISO 9001,CE,EPA","Place of Origin":"Shenzhen,China"}}
Water Treatment Equipment Suppliers 8000gph Ultrapure Water For Chip Industry With RO Machine + EDI Unit
I.Overview In chip (integrated circuit) manufacturing, ultrapure water (UPW) is an indispensable key auxiliary material, often referred to as the “lifeblood of the semiconductor industry.” Its core function is to remove trace impurities (such as particles, metal ions, and organic compounds) from the surface of wafers through high-precision cleaning, dilution, or participation in process reactions, directly impacting chip yield, performance, and reliability.
II.Process 1.Mainstream process (applicable to 14nm and above process nodes): Raw Water → Multi-media Filtration → Activated Carbon → Ultrafiltration (UF) → Primary RO → Secondary RO → EDI → UV (185+254 nm) → Degasification → Polishing Mixed Bed → Final Ultrafiltration → Point of Use (POU)
2.Advanced process (suitable for 7nm and below advanced processes) : Raw water → Ultrafiltration → Double-stage RO → Continuous Electro-deionization (CEDI) → Ultraviolet (185 nm) → Membrane Degassing → Nuclear-grade Polishing Mixed Bed → 0.05μm Final Filtration → Recirculation Distribution System
III.Parameters
Parameter Category
Chip Manufacturing Requirements
Resistivity (25°C)
≥18.2 MΩ·cm (Theoretical maximum value of pure water)
Total Organic Carbon (TOC)
≤5 ppb (Some advanced processes require ≤1 ppb)
Particle Count
Particles of 0.1μm ≤1 particle/mL; Particles of 0.05μm ≤10 particles/mL
Metal Ion Concentration
Key metals (e.g., Fe, Cu, Na, K) ≤1 ppt
Bacteria and Endotoxin
Bacteria ≤1 CFU/100mL; Endotoxin ≤0.03 EU/mL
Dissolved Gases
Dissolved oxygen ≤5 ppb; CO₂ ≤1 ppb
IV.Core Application Scenarios Wafer Cleaning: Removes micro-contaminants to ensure device performance (physical rinsing, cleaning with chemical reagents) Process Fluid Preparation: Used as a diluent or solvent (photoresist dilution, etching fluid/developing fluid preparation) Equipment and Environment Cleaning: Prevents cross-contamination (process equipment cleaning, clean room environment maintenance)
V.Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc) Provide water analysis report(TDS , conductivity, or resistivity, etc) Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc) What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )
