HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD
| Delivery Time | 5-8 work days |
| Payment Terms | L/C, D/A, D/P, T/T, Western Union, MoneyGram |
| Supply Ability | 1000 PCS |
| Packaging Details | Strong wooden box for Global shipping |
| Model Number | MS |
| Certification | CE |
| Brand Name | ZG |
| Place of Origin | China |
View Detail Information
Explore similar products
SILICON CARBIDE SQUARE BEAMS AND SEMI-OPEN SQUARE BEAMS
SILICON NITRIDE INDUSTRIAL CERAMIC PARTS MULLITE CERAMIC THERMOCOUPLE PROTECTION
High oxidation Industrial Ceramic Parts 1700 C Silicon Carbide burner sleeve
EXTRUSION MOLDING SILICON CARBIDE HANGING BURNING ROD 140-160MM LENGTH
Product Specification
| Delivery Time | 5-8 work days | Payment Terms | L/C, D/A, D/P, T/T, Western Union, MoneyGram |
| Supply Ability | 1000 PCS | Packaging Details | Strong wooden box for Global shipping |
| Model Number | MS | Certification | CE |
| Brand Name | ZG | Place of Origin | China |
| High Light | semiconductor ceramic components ，industrial ceramic parts with warranty ，high-performance ceramic semiconductor parts | ||
As semiconductor manufacturing advances toward smaller node sizes and higher power densities, process environments demand materials that can endure extreme heat, reactive plasma chemistry, and strict cleanliness standards. Our Advanced Ceramic Components are specifically engineered to meet the stringent demands of the broader semiconductor ecosystem—from front-end wafer fabrication and processing equipment to back-end packaging and inspection systems.
We offer a comprehensive selection of high-performance technical ceramics tailored for specific semiconductor applications:
Aluminum Nitride ($AlN$): Exceptional thermal conductivity ($170 sim 230 text{W/m}cdottext{K}$) coupled with excellent electrical insulation. Ideal for thermal spreaders, electrostatic chucks, and heater pedestals.
Silicon Carbide ($SiC$): Extreme hardness, high modulus of elasticity, and superior thermal shock resistance. Used extensively in chemical mechanical planarization (CMP) components, structural rings, and high-temperature diffusion tubes.
High-Purity Alumina ($Al_2O_3 ge 99.8%$): Excellent dielectric strength, high plasma erosion resistance, and cost-effective performance for chamber liners, focus rings, and electrical insulators.
Yttria ($Y_2O_3$) & Yttria-Stabilized Zirconia ($YSZ$): Outstanding resistance to harsh fluorine and chlorine plasma corrosion, making them the preferred material for plasma etching chamber components.
High chemical stability ensures minimal degradation when exposed to aggressive etch and deposition gases ($F_2$, $Cl_2$, $NF_3$, $O_2$ plasma), significantly reducing chamber particle contamination and extending component replacement intervals.
Maintains mechanical integrity, dimensional stability, and low thermal expansion coefficients at temperatures exceeding 1000°C, enabling reliable performance in rapid thermal processing (RTP) and CVD environments.
Manufactured under strict cleanroom conditions to eliminate metallic impurities and volatile organic compounds (VOCs), ensuring full compatibility with high-vacuum and ultra-clean processing standards.
Using multi-axis diamond grinding, ultrasonic machining, and advanced polishing, components are finished to micro-level tolerances ($le pm 0.001 text{mm}$) and mirror-polished surface roughness ($Ra le 0.01 mutext{m}$).
| Semiconductor Segment | Typical Ceramic Components |
| Etching & Cleansing | Focus rings, plasma gas distribution plates, chamber liners, edge rings |
| Deposition (CVD / PVD / ALD) | Heater pedestals, ceramic boats, showerheads, insulation rings |
| Wafer Handling & Metrology | Electrostatic chucks (ESC), vacuum chucks, robot end effectors, staging plates |
| Photolithography | High-rigidity ceramic structural frames, mirror substrates, positioning tables |
| Packaging & Testing | Thermal management substrates, burn-in sockets, IC test head plates |
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Importer,Exporter
Year Established:
2007
Total Annual:
5000000-8000000
Employee Number:
50~100
Ecer Certification：
Verified Supplier
Henan ZG Industrial Products Co. Ltd. was founded by specialists of leading industrial institutes in Zhengzhou city, China in 2007.Our company manufactures, complex develops, supplies, introduces and upgrades products from technical ceramics, heating elements and graphite. We provide services f... Henan ZG Industrial Products Co. Ltd. was founded by specialists of leading industrial institutes in Zhengzhou city, China in 2007.Our company manufactures, complex develops, supplies, introduces and upgrades products from technical ceramics, heating elements and graphite. We provide services f...
Get in touch with us
Leave a Message, we will call you back quickly!