≥99.9% Phosphorus Trifluoride PF₃ CAS 7783-55-3, for Semiconductor Doping,

Product Specification

1. Product Overview

Phosphorus Trifluoride (PF₃) is an important high-purity phosphorus-containing electronic gas, featuring excellent electronic properties and stable gas-phase transport performance. It is primarily used in semiconductor manufacturing, electronic materials, research, and high-end fluorinated chemical applications.

As a phosphorus source and fluorinated electronic gas, PF₃ holds significant application value in advanced electronic material fabrication, semiconductor process research, and specialty chemical synthesis.

According to the product inspection report provided by Changzhou Jiayuan Chemical Co., Ltd., the purity of this batch of Phosphorus Trifluoride is PF₃ Research 99.9%, with test results showing >99.9%, meeting the enterprise standard.

2. Specifications

Product Name: Phosphorus Trifluoride

English Name: Phosphorus Trifluoride

Abbreviation: PF₃

Chemical Formula: PF₃

CAS No.: 7783-55-3

Product Category: High-Purity Electronic Gas / Phosphorus-Containing Fluoride

Purity: ≥99.9%

Packaging: Cylinders

Testing Grade: Research Grade

3. Product Quality Specifications

PF₃ Content: >99.9%;

H₂: 0.52 ppm (Specification ≤100 ppm);

O₂+Ar: 1.2 ppm (Specification ≤50 ppm);

N₂: 8.62 ppm (Specification ≤50 ppm);

CH₄: 1.23 ppm (Specification ≤50 ppm);

CO: 0.35 ppm (Specification ≤50 ppm);

CO₂: 8.65 ppm (Specification ≤100 ppm);

HF: 1.2 ppm (Specification ≤300 ppm);

HCl: 8.8 ppm (Specification ≤300 ppm).

4. Main Application Areas

① Semiconductor Electronic Materials

PF₃ can serve as a phosphorus-containing electronic material gas for semiconductor process research, material preparation, and specialty electronic applications.

② Phosphorus Doping and Thin-Film Processes

Phosphorus is an important dopant element in semiconductor materials. PF₃ can serve as a specialty phosphorus source material for related process development.

③ High-Purity Chemical Synthesis

Used in the synthesis of phosphorus-fluorine compounds and research applications.

④ Electronic Gas Research and Development

Used in advanced electronic materials and specialty gas application research.

5. Product Characteristics and Advantages

① High-Purity Electronic-Grade Quality

PF₃ purity reaches above 99.9%, meeting the requirements of research and high-end industrial applications.

② Stable Impurity Control

Key impurities including hydrogen, oxygen+argon, nitrogen, and carbon monoxide are controlled at ppm levels.

③ High-Value-Added Applications

Primarily targeting semiconductors, electronic materials, and specialty chemical sectors.

6. Distinctions from Related Products

① PF₃ vs. PH₃

PH₃ is a commonly used semiconductor phosphorus doping gas, while PF₃ is a fluorinated phosphorus source material with different application directions.

② PF₃ vs. NF₃

NF₃ is primarily used for semiconductor cleaning and etching, while PF₃ primarily provides value as a phosphorus source and electronic material.

③ PF₃ vs. BF₃

BF₃ is primarily used for boron doping and chemical synthesis, while PF₃ is mainly used for phosphorus-related applications.

7. Russian Market Procurement Considerations

Customers typically focus on the following:

-PF₃ Purity;

-Moisture and HF Content;

-Oxygen and Nitrogen Impurities;

-Cylinder Cleanliness;

-Batch-to-Batch Consistency;

-Technical Documentation including COA, TDS, SDS, and Shipping Documents.

The test results for this batch from Changzhou Jiayuan Chemical Co., Ltd. meet the enterprise standard.

8. Product Supply Advantages

-High-Purity Phosphorus Trifluoride Supply;

-Cylinder Packaging Suitable for Specialty Gas Transportation;

-Provides Complete Quality Documentation;

-Serves Electronic Materials and Research Customers.

9. Frequently Asked Questions (FAQ)

Q: What are the main application areas of Phosphorus Trifluoride?

A: It is mainly used in electronic materials, semiconductor-related research, phosphorus-fluorine compounds, and research applications.

Q: What is the difference between PF₃ and PH₃?

A: PH₃ is primarily used for semiconductor phosphorus doping, while PF₃ is a fluorinated phosphorus source gas with different application directions.

Q: What documentation is typically required for PF₃ procurement?

A: COA, TDS, SDS, cylinder specifications, and shipping documentation are typically required.