99.999% Octafluorocyclobutane C₄F₈ is used in semiconductor etching, electronic

Product Specification

1. Product Overview
Octafluorocyclobutane (C₄F₈) is a high-purity fluorine-containing electronic specialty gas, belonging to the category of specialty fluorochemical products.

99.999% high-purity octafluorocyclobutane possesses excellent chemical stability, low impurity levels, and good plasma characteristics. It is primarily used in semiconductor manufacturing, microelectronics processing, plasma etching, display panels, and high-end electronics industries.

The Russian market mainly targets semiconductor companies, electronics manufacturers, specialty gas suppliers, research institutions, and high-purity gas traders.

2. Specifications

Product Name: Octafluorocyclobutane

Aliases: Perfluorocyclobutane, C₄F₈

Chemical Formula: C₄F₈

CAS Number: 115-25-3

Purity: ≥99.999%

Product Category: Electronic Specialty Gases/High-Purity Fluorine-Containing Gases

Appearance: Colorless Gas

Packaging: High-Cleanliness Steel Cylinder

3. Main Application Areas

① Semiconductor Etching Gas
Used for plasma etching of materials such as silicon, silicon dioxide, and silicon nitride.

② Microelectronics Manufacturing
Used for precision manufacturing of integrated circuits, display panels, MEMS, etc.

③ Plasma Processing
Used for fine pattern processing and thin film treatment.

④ High-End Electronic Materials R&D
Used for special fluorination processes and scientific research.

4. Key Considerations for Procurement in the Russian Market

Customer Focus:

- Gas purity;

- Moisture content;

- Impurities such as oxygen and nitrogen;

- Metallic impurities;

- Cylinder cleanliness;

- Filling stability;

- COA, TDS, and SDS documentation.

5. Product Advantages

- 99.999% high purity;

- Excellent chemical stability;

- Good plasma etching performance;

- Meets the needs of advanced electronics manufacturing;

- Supports international supply of electronic specialty gases.

6. Packaging and Storage
Packaged in high-cleanliness steel cylinders. High temperatures and severe impacts should be avoided during storage and transportation, and managed according to compressed gas specifications.

7. Frequently Asked Questions (FAQ)

Q: In which industries is octafluorocyclobutane mainly used?

A: Mainly used in semiconductors, integrated circuits, display panels, MEMS, and electronic materials.

Q: Why is 99.999% purity required?

A: Semiconductor processes are highly sensitive to impurities; high purity reduces contamination and improves etching stability.

Q: What is the difference between octafluorocyclobutane and sulfur hexafluoride?

A: C₄F₈ is mainly used for semiconductor etching, while SF₆ is more commonly used in insulation, etching, and industrial gases.

Q: What documents are required for procurement from Russia?

A: Typically, a Certificate of Authorization (COA), Test Data Sheet (TDS), Sulfur Hexafluoride (SDS), cylinder information, and shipping documents are required.