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KYKY TECHNOLOGY CO., LTD.

  • China,Beijing ,Beijing
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China 33000rpm Water Cooling Turbomolecular Pump with 1401L/s Pumping Speed for
China 33000rpm Water Cooling Turbomolecular Pump with 1401L/s Pumping Speed for

  1. China 33000rpm Water Cooling Turbomolecular Pump with 1401L/s Pumping Speed for

33000rpm Water Cooling Turbomolecular Pump with 1401L/s Pumping Speed for

  1. MOQ: 1
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Payment Terms T/T,L/C
Delivery Time 4weeks
Packaging Details Wooden box for overseas shipment
Pumping Speed 1401L/s
Rotation Speed 33000rpm
Ultimate Vacuum ≤2×10-6 Pa
Compression Ratio >1×107
Inlet Flange DN200 ISO K(LF), DN200 ISO F, DN200 ISO CF
Weight 51kg
Brand Name KYKY
Model Number CXF-200/1401E
Certification CE
Place of Origin China

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  1. Product Details
  2. Company Details

Product Specification

Payment Terms T/T,L/C Delivery Time 4weeks
Packaging Details Wooden box for overseas shipment Pumping Speed 1401L/s
Rotation Speed 33000rpm Ultimate Vacuum ≤2×10-6 Pa
Compression Ratio >1×107 Inlet Flange DN200 ISO K(LF), DN200 ISO F, DN200 ISO CF
Weight 51kg Brand Name KYKY
Model Number CXF-200/1401E Certification CE
Place of Origin China
High Light 33000rpm turbomolecular pumpindustrial plating turbomolecular pumpmagnetically levitated molecular pump
33000rpm Water Cooling Turbomolecular Pump For Industrial Plating
Product Overview

Maglev Pump, CXF-200/1401, Water cooling, On board

The electromagnetic bearing, also called "active magnetic levitated bearings," consists of a magnetic bearing, sensor, and control system. This design provides dynamic response and timely adjustment, ensuring high-speed shafting and reliable operation.

Magnetically levitated molecular pumps feature shafting supported by magnetic force. This series of pumps was developed by KYKY to meet application requirements in modern semiconductor manufacturing, chip manufacturing, industrial plating, and scientific instruments.

Advanced Technologies
  • Control Technology for Magnetic Bearing: Features a 5-axis magnetically levitated design with dynamic active closed-circuit magnetic suspension control technology for stable levitation and reliable high-speed shafting operation.
  • Motor Drive Control Technology: Utilizes high-efficiency high-speed DC motor and servo control system for maximum energy efficiency, automatic shafting speed compensation, stable startup, and reliable operation.
  • Carbon Fiber Composite Rotor Technology: Turbo rotors made from high-strength aluminum alloy and lightweight carbon fiber composite, offering reduced weight and improved strength for high rotating speed, performance, and reliability.
  • Corrosion Resisting Technology: Chamber parts treated with special processes to resist corrosive gases in semiconductor manufacturing, with inert gas protection for low vacuum parts enabling stable long-term corrosive gas extraction.
  • Heating Temperature Control System: Equipped with electric heater and temperature controller to monitor and control cooling water, air-borne heating, electric heating, and protective gas heat, maintaining optimal temperature for special processes like etching.
Key Advantages
  1. Zero friction during operation with low power consumption
  2. Easy acquisition of clean high vacuum and ultrahigh vacuum without pump lubrication
  3. Capable of long-term corrosive gas extraction
  4. High safety and long service life with precision ceramic ball bearing protection
  5. Power generating function during sudden power-off situations
Technical Specifications
Model CXF-200/1401
Pump Speed (l/s, Air) 1400
Compression Ratio >1×10⁷
Ultimate Vacuum (Pa) ≤2×10⁻⁶
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed (rpm) 33000
Run-up Time (min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting Orientation Any
Cooling Method Water
Weight (kg) (With Controller) 51
CXF-200/1401 Water Cooling Turbomolecular Pump technical diagram and components

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer

  • Year Established:

    1958

  • Employee Number:

    >500

  • Ecer Certification:

    Verified Supplier

KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.   KYKY invented the first set of Turbo Molecular Pu... KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.   KYKY invented the first set of Turbo Molecular Pu...

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Get in touch with us

  • Reach Us
  • KYKY TECHNOLOGY CO., LTD.
  • No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
  • https://www.kykytech.com/

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