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{"title":"Industrial Water Cooling On Board 1401L\/S Turbomolecular Pump","imgUrl":"https:\/\/img.chinax.com\/nimg\/aa\/90\/294f184cad44c48d438a2ef8899d-200x200-1\/industrial_water_cooling_on_board_1401l_2fs_turbomolecular_pump.jpg","attrs":{"Brand Name":"KYKY","Model Number":"CXF-200\/1401E","Certification":"CE","Place of Origin":"China"}}
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{"title":"Maglev Lubrication Turbomolecular Pump ISO-K\/CF Low Power Consumption","imgUrl":"https:\/\/img.chinax.com\/nimg\/4f\/3b\/c636f3b69b56dd3f0aee30510aac-200x200-1\/maglev_lubrication_turbomolecular_pump_iso_k_2fcf_low_power_consumption.jpg","attrs":{"Brand Name":"KYKY","Model Number":"CXF-200\/1400E","Certification":"CE","Place of Origin":"China"}}
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{"title":"Oil Lubrication Turbomolecular Pump F-400\/3500N Simple Maintenance","imgUrl":"https:\/\/img.chinax.com\/nimg\/3e\/63\/83931cf4ca699573387358c69402-200x200-1\/oil_lubrication_turbomolecular_pump_f_400_2f3500n_simple_maintenance.jpg","attrs":{"Brand Name":"KYKY","Model Number":"F-400\/3500N","Place of Origin":"China","Minimum Order Quantity":"1"}}
Water Cooling Maglev Lubrication Turbomolecular Pump CE
Technologies:
Control Technology for Magnetic Bearing: The adopted electromagnetic is a 5-axis magnetically levitated. This design can have dynamic response and timely adjustment by means of dynamic active closed-circuit magnetic suspension control technology based on advanced international control theory, so as to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system are applied to series magnetically levitated pumps, so to have maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
Carbon fiber composite rotor technology: The turbo rotors of serial magnetic suspension molecular pumps are made by compounding high-strength aluminum alloy and light-weight carbon fiber. In comparison with all aluminum alloy rotors, the turbo rotors are characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
Corrosion resisting technology: Surfaces of parts in chambers of serial magnetic suspension molecular pumps are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, such inert gases as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
Heating temperature control system: Series magnetically levitated molecular pumps are equipped with an electric heater and a temperature controller, so that cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.
Specifications:
Model
CXF-200/1401
Pump Speed(l/s,Air)
1400
Compression Ratio
>1×107
Ultimate Vacuum(Pa)
≤2×10-6
Inlet Flange
DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange
KF 40
Rotation Speed(rpm)
33000
Run-up Time(min)
6
VIB (mm)
<0.05
Backing Pump (L/s)
15
Mounting or ientation
Any
Cooling method
Water
Weight(kg)(With Controller)
51
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
1958
Employee Number:
>500
Ecer Certification：
Site Member
KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.
KYKY invented the first set of Turbo Molecular Pu... KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.
KYKY invented the first set of Turbo Molecular Pu...
