DONGGUAN LONROY EQUIPMENT CO LTD
| Type | Testing Machine |
| Accuracy Class | High Accuracy |
| Accuracy | / |
| Application | Auto Testing |
| customized support | OEM, ODM, OBM |
| power | -- |
| Protection Class | Ip56 |
| Voltage | 220 V |
| warranty | 1 Year |
| Wavelength Range | 250 nm to 1700 nm |
| Spot Size | 1 mm to 5 mm (variable) |
| Sample Size | Up to 200 mm in diameter |
| Measurement Time | Approximately 1 second per position point |
| Brand Name | LONROY |
| Place of Origin | Guangdong, China |
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Product Specification
| Type | Testing Machine | Accuracy Class | High Accuracy |
| Accuracy | / | Application | Auto Testing |
| customized support | OEM, ODM, OBM | power | -- |
| Protection Class | Ip56 | Voltage | 220 V |
| warranty | 1 Year | Wavelength Range | 250 nm to 1700 nm |
| Spot Size | 1 mm to 5 mm (variable) | Sample Size | Up to 200 mm in diameter |
| Measurement Time | Approximately 1 second per position point | Brand Name | LONROY |
| Place of Origin | Guangdong, China | ||
| High Light | micro-area spectroscopic ellipsometer ，lab test ellipsometer instrument ，pattern structure measurement ellipsometer | ||
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
I. Overview
LR-SE-M is a dedicated spectroscopic ellipsometer customized for the semiconductor industry for micro-area pattern structure measurement. It adopts 1. ultra-miniature light spot detection measurement technology and 2. customized ultra-fast measurement speed technology. It can be applied to the measurement of n/k/d of anti-reflection films, conductive films and other thin films on various transparent substrates, and is perfectly suitable for the optical parameter analysis of various micro-area patterns.
II. Special Features
1. The spot size can be customized, with the minimum reaching 30um.
2. Ultra-fast measurement, with a single measurement time of less than 0.5 seconds;
3. The series configuration is flexible and supports customized functional design.
4. Compact structure, more suitable for online integrated measurement.
III. Measurement Examples
Microstructure measurement of captured area in the image
Spectroscopic Ellipsometer for Micro-area Pattern Structure Measurement Spectroscopic Ellipsometer Instrument
Technical Specification
|
Wavelength Range |
250 nm to 1700 nm |
|
Spot Size |
1 mm to 5 mm (variable) |
|
Sample Size |
Up to 200 mm in diameter |
|
Measurement Thickness Range* |
~30 μM |
|
Measurement Time |
Approximately 1 second per position point |
|
Incident Angle Range |
20° to 90° (5-degree intervals) |
|
Repeatability Error* |
Less than 1 Å (angstrom) |
Company Details
Business Type:
Manufacturer,Agent,Exporter,Seller
Year Established:
2008
Total Annual:
$5 million -$8 million
Employee Number:
80~200
Ecer Certification：
Verified Supplier
Dongguan Lonroy Equipment Co., Ltd, located in Dongguan, Guangdong, is a leading company specializing in the research and development, manufacturing and sales of high-tech and high-precision testing equipment. With 20 years of industry experience, we are committed to pr... Dongguan Lonroy Equipment Co., Ltd, located in Dongguan, Guangdong, is a leading company specializing in the research and development, manufacturing and sales of high-tech and high-precision testing equipment. With 20 years of industry experience, we are committed to pr...
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