DONGGUAN LONROY EQUIPMENT CO LTD
| machine type | Magnetron Sputtering Coater |
| weight (kg) | 600 |
| power(w) | 5000 |
| voltage | 380VAC±10% |
| warranty | 1 Year |
| Brand Name | LONROY |
| Place of Origin | Guangdong, China |
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Product Specification
| machine type | Magnetron Sputtering Coater | weight (kg) | 600 |
| power(w) | 5000 | voltage | 380VAC±10% |
| warranty | 1 Year | Brand Name | LONROY |
| Place of Origin | Guangdong, China | ||
| High Light | Four-Target Magnetron Sputtering Coater with Load-Lock Chamber ，PVD Thin Film Coating Instrument for Alloy Membranes ，Lab Test Machine Sputter Tester | ||
Category | Item | Specification | |
Product Name | Four-Target Magnetron Sputtering Coater (DC Power + RF Power) | ||
Product Model | LR-CK101 | ||
Sample Stage | Dimensions | φ150 mm | |
Temperature Control Accuracy | ±1°C | ||
Heating Range | Room temperature to 900°C | ||
Adjustable Rotation Speed | 1–20 rpm (adjustable) | ||
Magnetron Target Guns | Sputtering Direction | Downward sputtering | |
Tilting Target Angle Range | -45° to +45°; equipped with pneumatic shutter | ||
Target Material Dimensions | 4-inch diameter, thickness ≤3 mm | ||
Insulation Voltage | >2000 V | ||
Quantity | Three 4-inch tilting targets; one 4-inch fixed target | ||
Cooling Method | Water cooling | ||
Vacuum Chamber | Chamber Type | D-type chamber | |
Chamber Dimensions | Φ500 mm × 500 mm | ||
Chamber Material | 304 Stainless steel | ||
Observation Window | Quartz window, φ100 mm diameter | ||
Opening Method | Front-opening door | ||
Gas Control | Flow Control | 3-channel mass flow controllers:Range: 0–500 SCCM;Range: 0–100 SCCM;Range: 0–20 SCCM | |
Bipolar Pulsed Magnetron Sputtering Power Supply | Input Voltage | 380 VAC ±10%, 3-phase 4-wire system, 50–60 Hz | |
Output Power | 0–5 kW | ||
Output Voltage | 0–1000 V | ||
Output Current | Max. 9 A (at constant power) | ||
Output Frequency | 1 kHz – 150 kHz | ||
Output Characteristics | Constant current / Constant power / Constant voltage | ||
Cooling Method | Air cooling | ||
Communication | 0–5 V or 0–10 V analog signal; RS-485 | ||
Duty Cycle | 100% | ||
Quantity | 1 unit | ||
RF Power Supply Source | Power supply rating | 1000W | |
Power output range | 0W–1000W | ||
Maximum output power | 1000W | ||
Maximum reflected power | 130W | ||
RF frequency | 13.56 MHz (stability: ±0.005%) | ||
Quantity | 1 unit | ||
DC Power Supply | Power | 1000W | |
Quantity | 2 units | ||
Molecular Pump | Pumping speed | 1200 L/s | |
Cooling method | Water-cooled | ||
Vacuum level | 9.0 × 10⁻⁴ Pa | ||
Fore-pump pumping speed | 4 L/s | ||
Compound Vacuum Gauge | Measurement range 10⁻⁵ Pa – 10⁵ Pa | ||
Quantity | 1 set | ||
Vacuum Valve | Electrically controlled pneumatic valve | ||
Transition Chamber | Chamber size Suitable for wafers up to 6 inches | ||
Equipped with molecular pump assembly:Fore-pump: VRD-4 (pumping speed: 1.1 L/s)Molecular pump: TG60F (Japan) (pumping speed: 60 L/s) | |||
Film Thickness Monitor | Quantity | 1 set | |
Channels | Single channel | ||
Measurement precision | 1 Å | ||
Standard sensor quartz crystal | 6 MHz | ||
Compatible quartz crystal size | φ14 mm | ||
Water Chiller | Temperature control range | 10–25°C | |
Rated cooling capacity | 0.75 kW | ||
Flow rate | 10 L/min | ||
Cooling water | Purified water | ||
Air Compressor | Rotation speed | 1380 rpm | |
Flow rate | 40 L/min | ||
Rated discharge pressure | 0.7 MPa | ||
Control System | PLC + 14.3-inch touchscreen | ||
Company Details
Business Type:
Manufacturer,Agent,Exporter,Seller
Year Established:
2008
Total Annual:
$5 million -$8 million
Employee Number:
80~200
Ecer Certification：
Verified Supplier
Dongguan Lonroy Equipment Co., Ltd, located in Dongguan, Guangdong, is a leading company specializing in the research and development, manufacturing and sales of high-tech and high-precision testing equipment. With 20 years of industry experience, we are committed to providing excellent tes... Dongguan Lonroy Equipment Co., Ltd, located in Dongguan, Guangdong, is a leading company specializing in the research and development, manufacturing and sales of high-tech and high-precision testing equipment. With 20 years of industry experience, we are committed to providing excellent tes...
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