Spectral Ellipsometry Spectroscopic Ellipsometer Thin Film Thickness Refractive

Serial Number

Model

Name

Main technical parameters

1

ES

Spectroscopic Ellipsometry Main Unit

It includes the following main components:

Angular structure assembly;

Light source assembly;

Polarization optics assembly;

Sample alignment assembly;

Control system assembly.

2

ET-CON-5

Control Computer

For motion control and data analysis calculations, the configuration should be no less than: i5 CPU; 8GB RAM; 21-inch color display; Windows 10 system;

3

C7

Instrument Control Box

Used for motion control of instruments, etc.

4

ETES

Dedicated Operating and Analysis Software

Used for instrument setup, operation, measurement, data analysis, and output.

5

NFS-SiO2 / Si

Standard Nanofilm Wafer Sample

Silicon oxide (SiO2/Si) is deposited on crystalline silicon, with a diameter of 4” and a film thickness of 100nm.

No.

Model

Name

Main Technical Parameters

X1a

F-U-200

Micro-spot component  

Diameter of the micro-light spot (short axis): 200 μm (Requires X2 auto-focusing accessory for use)

X2a

Auto-Focus

Z-axis automatic focusing system

Stroke: 0-10 mm;

General Specifications

Spectral Range

245 – 1000 nm; custom spectral ranges available upon request

Incidence Angle

(F) Fixed incidence angle; default angle: 65°

Performance Specifications

Measurement Repeatability*

For 100 nm SiO2 film on Si standard wafer: thickness repeatability 0.005 nm, refractive index repeatability 0.0002

Single Measurement Time

Typical measurement time 1–2 seconds

Optical & Mechanical Components

Light Source

High-stability broadband light source (tungsten-halogen lamp, deuterium-halogen lamp)

Spectral Adjustment Mode

Auto-adjustable spot size; auto-adjustable integration time for optimal matching

Polarizer / Analyzer

High-quality polarizing prism

Measurement Spot

Manual adjustable spot range: 1–4 mm

Spectral Interval

≤1000 nm band: 1 nm

Sample Stage

Vertical adjustment range: 10 mm (manual); 2D tilt adjustment range: ±2° (manual); vacuum adsorption supported; max sample size: 8 inch (200 mm); custom sizes available

Sample Alignment

Autocollimator telescope & microscope for precision sample alignment (height and 2D tilt); electronic video image alignment

Detector

High-sensitivity low-noise spectral detector

Control Cabinet

Split chassis with circuit board, micro control unit, power supply, etc.

Computer

High-quality computer with operating system

Software

Interface Language

Multilingual support including Chinese/English; default Chinese

Permission Management

Administrator and operator permission levels for instrument management

Operation Modes

One-click routine measurement mode (beginner-friendly);

ladvanced analysis mode for complex material analysis

Spectral Measurement

lAuto-setting of optical component azimuth;

lmanual/auto execution of user-defined tasks;

lspectrum displayed in standard energy or wavelength units;

lreal-time monitoring of sample response with on-line ψ and Δ display

Measurement Result Output

lMueller matrix 11 elements and other output forms (N, C, S);

lfilm thickness d, refractive index n, extinction coefficient k;

ldielectric function ε;

lellipsometric angles ψ, Δ;

ldepolarization p;

ltransmittance T (not supported by fixed-angle instruments and laser measurement);

lreflectance R;

lwavelength/angle data cropping without altering raw data;

lmulti-angle data merging function;

ltanψ, cosΔ and other expression formats

Modeling & Fitting

lCapable of fitting multilayer structures (single-layer films, composite films, and periodically alternating multilayer films)

lUser-friendly and expandable materials database

lExtensive list of material optical constants

lIncludes various material dispersion models such as Cauchy, Sellmeier, Lorentz, Drude, F-B, B-spline, and Tauc-Lorentz.

lModeling and analysis of superlattice structures

lApproximate analysis of EMA effective medium

lEach film layer can be considered as a homogeneous film, interface, rough surface, etc.

lAnalysis of composite data from multiple incident angle measurements

lFast regression fitting algorithm for optical models and measurement data

lSimultaneous graphical display of measured and simulated data

Simulation

lSimulation calculations of the sample's ellipticity angles ψ and Δ

lSimulation calculations of the sample's transmittance T and reflectance R

Result Display

lDisplays fitted graphs

l2D and 3D rendered images

lAdvanced reporting, outputting measured and calculated spectra, optical models, and fitted parameters

File Management

Windows-based software with comprehensive file management functions

Data Interface

MES system data connectivity supported