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MEMS (Micro-Electro-Mechanical Systems) thermal dispersion technology (Thermal-D®) for high-precision mass flow measurement without temperature/pressure compensation.
Design Advantages:
Nano-coating on the sensor surface for oil/water resistance and anti-fouling.
Built-in temperature and pressure compensation for stable performance in varying environments.
Flow Calibration:
Factory-calibrated for air; supports multi-gas auto-recognition (for gases with distinct thermal diffusivity).
Applications:
Industrial: Gas mixing systems, semiconductor manufacturing, chemical process control.
Analytical Instruments: Chromatography, gas analyzers, environmental monitoring equipment.
Medical & Laboratory: Oxygen flow meters, ventilators, research gas delivery systems.
Mechanical Dimensions:
Dimension
Value (Approx.)
Body Length
120 mm
Body Diameter/Width
38 mm
Weight
350 g
Mounting Orientation
Any (Recommended: Vertical for optimal accuracy)
Ordering Information:
Model Breakdown:
FS5001L: Series code (Low-flow mass flow sensor).
2000: Flow range (0–2000 sccm).
EV-A: Custom suffix (e.g., EV = Enhanced Version; A = Connector type/option).
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer,Trading Company
Year Established:
2006
Total Annual:
900000-1000000
Employee Number:
50~80
Ecer Certification：
Verified Supplier
Yijiajie Electronics is a full range of silicon pressure sensors from the United States, FREESCALE/, GE, MEAS, SMI, and a full range of sensing and control products from the United States pressure, temperature and humidity, gas flow, current, Hall effect, etc., Japan HAMAMATSU flame, UV sensors, ph... Yijiajie Electronics is a full range of silicon pressure sensors from the United States, FREESCALE/, GE, MEAS, SMI, and a full range of sensing and control products from the United States pressure, temperature and humidity, gas flow, current, Hall effect, etc., Japan HAMAMATSU flame, UV sensors, ph...
