Functionality | Multi-purpose |
Operating System | Compatible with various systems |
Flexibility | High |
Printing Technology | 3D Printing |
Durability | High |
Power Source | Electricity |
Precision | High |
Arm Length | Adjustable |
Speed | Fast |
Weight | Lightweight |
Control Method | Robotic |
Material | Ceramic |
Color | White |
Design | Sleek and modern |
Brand Name | Dayoo |
Place of Origin | Made In China |
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Product Specification
Functionality | Multi-purpose | Operating System | Compatible with various systems |
Flexibility | High | Printing Technology | 3D Printing |
Durability | High | Power Source | Electricity |
Precision | High | Arm Length | Adjustable |
Speed | Fast | Weight | Lightweight |
Control Method | Robotic | Material | Ceramic |
Color | White | Design | Sleek and modern |
Brand Name | Dayoo | Place of Origin | Made In China |
High Light | Ceramic Robotic Arm ,Industrial Robotic Arms |
The 3D-printed alumina ceramic robotic arm is a high-performance automation solution specifically designed for semiconductor manufacturing, wafer handling, and automated production. Utilizing DLP/SLA 3D printing technology, it is manufactured as a single integrated component from 99.9% high-purity alumina ceramic (Al₂O₃). With exceptional properties including ultra-high hardness, thermal resistance, corrosion resistance, and low thermal expansion coefficient, it is ideal for vacuum environments, harsh chemical conditions, and high-temperature processes, ensuring high cleanliness and stability in wafer handling applications.
Key Applications
✅ Semiconductor wafer handling: Vacuum gripping, positioning and transfer of 12-inch wafers
✅ Etching & deposition equipment: Plasma-resistant for PVD/CVD processes
✅ High-temperature operations: Continuous operation at 300°C+
✅ Automated production lines: Compatible with end-of-arm tooling (EOAT) for enhanced productivity
Feature | Traditional Metal Arms | 3D-Printed Ceramic Arm |
---|---|---|
Corrosion Resistance | Vulnerable to acids/alkalis | Resists pH 1-14 environments |
Thermal Stability | Deforms above 200°C | Stable at 300°C+ |
Weight | Heavy (steel construction) | Lightweight (3.9g/cm³ density) |
Cleanliness | Metal particle contamination | Zero particle emission, SEMI-compliant |
Material Purity: ≥99.9% Al₂O₃
Printing Technology: DLP photopolymerization (±20μm precision)
Payload Capacity: 5kg (standard)/10kg (heavy-duty)
Repeatability: ±0.01mm positioning accuracy
Temperature Range: -50°C to 300°C
Surface Roughness: Ra≤0.1μm (polishable to 0.05μm)
Vacuum Compatibility: Integrated air channels (0.5μm filtration)
3D Modeling: CAD design + wafer handling path simulation
Slurry Preparation: Nano-alumina + photopolymer resin mix (55-58% solid content)
DLP Printing: Layer-by-layer curing (20μm thickness)
High-Temp Sintering: 1650°C densification (117-122% shrinkage compensation)
Precision Machining: Laser trimming + CNC grinding (±0.02mm flatness)
Quality Control: X-ray inspection + leak testing
⚠ Important Notes:
Autoclave sterilize (121°C) before first use
Avoid hydrofluoric acid (HF) exposure
Monthly joint inspection for wear and vacuum integrity
Use ceramic end-effectors to prevent wafer damage
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Exporter
Total Annual:
>1000000
Employee Number:
>100
Ecer Certification:
Verified Supplier
We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. Deyu Precision Ceramics Technology Co., Ltd. has many years of e... We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. Deyu Precision Ceramics Technology Co., Ltd. has many years of e...
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