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{"title":"High Purity 95~99.9995% PSA Oxygen Generator with 150Bar or 200Bar Filling","imgUrl":"https:\/\/img.chinax.com\/nimg\/a1\/cf\/eb93d67489bba280d6b98fcfcadc-200x200-1\/high_purity_95_7e99_9995_25_psa_oxygen_generator_with_150bar_or_200bar_filling_pressure_and_e2_89_a412nm3_2fhr_oxygen_output.jpg","attrs":{"Brand Name":"GNEE","Certification":"SGS","Place of Origin":"CHINA","Minimum Order Quantity":"\u22651sets"}}
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PSA Oxygen Generator (Pressure Swing Adsorption PSA Oxygen Plants) is an ultra-high-purity oxygen supply equipment designed for the electronics industry. Based on deep pressure swing adsorption technology, it can stably produce oxygen with 99% purity through multi-stage purification and precision separation processes, featuring core advantages of small purity fluctuation, low impurity content (total hydrocarbons ≤0.1ppm), and strong continuous operation capability. As a benchmark model for psa oxygen plant purity, the 1200Nm³/h flow rate can meet the ultra-high-purity oxygen supply needs of processes such as thin film deposition and oxidation in electronic chip manufacturing, serving as a key foundational equipment to ensure chip yield.
Product Specifications
Oxygen Output
(Nm3/h)
Purity
(%)
Instrument Air Consumption (M3/h)
Water consumption
(M3/h)
Power consumption
(KW)
Total Power (KW)
Bed Layer Type
Area
(M3)
50
90
10
3
32.5
40
vertical
6 x 9
150
90 ~ 93
20
15
65
85
vertical
9 x 9
200
90 ~ 93
25
15
86
110
vertical
9 x 9
300
90 ~ 93
30
30
132
155
vertical
14 x 12
400
90 ~ 93
40
30
172
205
vertical
15 x 14
600
90 ~ 93
50
45
258
320
vertical
12 x 18
800
90 ~ 93
60
50
344
410
vertical
15 x 18
1000
90 ~ 93
65
60
436
550
vertical
16 x 18
1500
90 ~ 93
90
90
675
845
vertical or horizontal
18 x 18
2000
90 ~ 93
100
150
900
1060
vertical or horizontal
18 x 24
Strict Standards for Installation and Maintenance
Electronic chip workshops have extremely high requirements for the installation of PSA Oxygen Generator, which must meet three core standards: cleanliness, explosion protection, and pollution prevention.
Installation area: It shall be an ISO Class 8 cleanroom, away from process areas with high dust such as lithography and etching.
Pipeline connection: The connection between equipment and pipelines shall adopt flange sealing (PTFE gaskets), and helium mass spectrometry leak detection shall be performed (leak rate ≤1×10⁻⁹Pa・m³/s).
Electrical system: It shall comply with the ATEX explosion-proof standard (II 2G Ex d IIB T4) to avoid safety hazards caused by electric sparks.
For maintenance, a "super-clean maintenance" process must be implemented:
Daily maintenance: Monitor purity and pressure through a remote monitoring system; personnel are prohibited from entering the core area of the equipment.
Regular maintenance (monthly): Replace the pre-filter element in a clean glove box to avoid external contamination.
In-depth maintenance (annual): Conducted by professional teams from psa oxygen generator manufacturers, including molecular sieve performance testing, catalyst activity evaluation, and pipeline inner wall cleanliness detection. Maintenance personnel must wear clean suits and enter through an air shower to ensure no particles are brought in.
Special attention: The replacement of ultra-high-purity molecular sieves and catalysts must strictly follow the "inert gas protection" process to prevent performance degradation due to contact with air. After replacement, a 24-hour purity test shall be conducted, and the equipment can only be put into use after confirming compliance with standards. Such strict maintenance standards can ensure the equipment’s service life exceeds 10 years, with purity consistently stable above 99%.
With its 1200Nm³/h flow rate and 99% ultra-high purity, the PSA Oxygen Generator has become a core oxygen supply equipment for electronic chip manufacturing. Its pressure swing adsorption psa oxygen plants technology provides stable and clean oxygen guarantee for chip processes, serving as an important support for the high-quality development of the electronic information industry.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer,Trading Company
Year Established:
2012
Total Annual:
100000-200000
Employee Number:
100~150
Ecer Certification:
Verified Supplier
As a professional pressure vessel enterprise,Henan Gnee New Materials Co., Ltd. has been involved in the pressure vessel industry since 2012. Our company can provide products such as large cryogenic storage tanks and LPG series containers. At the beginning of the company's establishment, it purchase... As a professional pressure vessel enterprise,Henan Gnee New Materials Co., Ltd. has been involved in the pressure vessel industry since 2012. Our company can provide products such as large cryogenic storage tanks and LPG series containers. At the beginning of the company's establishment, it purchase...