Jiangsu Xiangtong Quartz Technology Co., Ltd.

China,Lianyungang ,Jiangsu
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High Purity Quartz Boat High Temperature Resistant Customization

China High Purity Quartz Boat High Temperature Resistant Customization

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High Purity Quartz Boat High Temperature Resistant Customization

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Wafer Compatibility	4", 6", 8", 12"
Slot Capacity	25, 50, 100 wafers
Material	99.99% Fused Quartz
Metal Ion Content	Na/K/Fe < 1ppm
Slot Tolerance	±0.1mm
Working Temperature	up to 1200°C
Structure	Horizontal, Vertical
Application	Diffusion, Oxidation, LPCVD
Brand Name	XT
Certification	CE
Place of Origin	China

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Product Details
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Product Specification


Wafer Compatibility	4", 6", 8", 12"	Slot Capacity	25, 50, 100 wafers
Material	99.99% Fused Quartz	Metal Ion Content	Na/K/Fe < 1ppm
Slot Tolerance	±0.1mm	Working Temperature	up to 1200°C
Structure	Horizontal, Vertical	Application	Diffusion, Oxidation, LPCVD
Brand Name	XT	Certification	CE
Place of Origin	China
High Light	High Purity Quartz Boat ，High Temperature Resistant Quartz Boat ，Customization Quartz Wafer Boat

1. Ultra-High Purity – Zero Metal Contamination

SiO₂ purity ≥ 99.99%, premium grades up to 99.995%
Extremely low metal ion content (Na/K/Fe etc. < 1ppm)
No precipitation, volatilization or particle shedding at high temperatures
The first line of defense for wafer yield — metal contamination directly causes device failure

2. Extreme Heat Resistance – Wide Process Compatibility

Continuous service temperature 1200°C, higher for short periods
Softening point approx. 1700°C — no softening or deformation at high temperatures
Compatible with mainstream high-temperature processes: diffusion, oxidation, annealing, LPCVD

3. Precision-Machined Slots – Accurate, Reliable Wafer Loading

Slot pitch tolerance ±0.1mm with strict slot width tolerance
Slot parallelism < 0.1mm
Wafer placement angle 88°±0.5° (near-vertical for uniform gas and heat exposure)
Precise slots ensure identical thermal and gas conditions for every wafer

4. Ultra-Low Thermal Expansion – Superior Thermal Shock Resistance

Thermal expansion coefficient of only 5.5×10⁻⁷/°C (near-zero expansion)
Outstanding thermal shock resistance — no cracking under frequent heating/cooling cycles
Dimensionally stable after repeated thermal cycling — no warping or deformation

5. Strong Corrosion Resistance – Chemical Inertness

Resists strong acids (except HF) and most process atmospheres
No reaction with chlorine, oxygen, dopant gases etc. at high temperatures
Resists erosion and deposit buildup — long service life

6. High Electrical Insulation – Safe & Reliable

High resistivity (approx. 7×10⁷ Ω·cm)
Maintains excellent insulation performance at high temperatures
Eliminates leakage interference for process safety

7. Versatile Structures – Compatible with Various Furnace Types

Horizontal boats (for horizontal furnaces) and vertical boats (for vertical furnaces)
Single-wafer / multi-wafer boats (25/50/100 slot options)
Compatible with 4", 6", 8", 12" (100/150/200/300mm) wafers
Slot count, pitch and profile deeply customizable per drawings

8. Low Particle Generation – Clean Process Assurance

Finely treated surface — smooth and burr-free
Effectively reduces particle generation and residue
Suitable for cleanroom process environments

Company Details

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Business Type:

Manufacturer,Agent,Distributor/Wholesaler,Seller 
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Year Established:

2023 
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Total Annual:

>50000000
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Employee Number:

>100 
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Ecer Certification：

Verified Supplier 

Jiangsu Xiangtong Quartz Technology Co., Ltd., located in Donghai County, Lianyungang, was founded in 2023. We are a professional manufacturer of high-purity fused silica quartz products. We own a 18,000 ㎡ production base with clean workshop and complete processing equipment for cutting, grinding... Jiangsu Xiangtong Quartz Technology Co., Ltd., located in Donghai County, Lianyungang, was founded in 2023. We are a professional manufacturer of high-purity fused silica quartz products. We own a 18,000 ㎡ production base with clean workshop and complete processing equipment for cutting, grinding...

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Jiangsu Xiangtong Quartz Technology Co., Ltd.
Hengshan Road No.51, Nanchen Resident Area, Shulianghe Town, Donghai County, Lianyungang City, Jiangsu Province, P.R.China
https://www.quartzglass-tube.com/

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