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Jiangsu Xiangtong Quartz Technology Co., Ltd.

  • China,Lianyungang ,Jiangsu
  • Verified Supplier
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China High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor
China High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor

  1. China High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor
  2. China High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor
  3. China High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor
  4. China High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor

High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor

  1. MOQ: 1
  2. Price:
  3. Get Latest Price
Material 99.99% Fused Quartz
Max Length 3 meters+
Wall Thickness 2mm - 15mm
Metal Ion Content Na/K/Fe < 1ppm
Outside Diameter φ40mm - φ500mm
Working Temperature 1100-1200°C, up to 1350°C
Structure Straight, Open-end, Flanged
Application Semiconductor Diffusion Furnace
Certification CE
Place of Origin China
Brand Name XT

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  1. Product Details
  2. Company Details

Product Specification

Material 99.99% Fused Quartz Max Length 3 meters+
Wall Thickness 2mm - 15mm Metal Ion Content Na/K/Fe < 1ppm
Outside Diameter φ40mm - φ500mm Working Temperature 1100-1200°C, up to 1350°C
Structure Straight, Open-end, Flanged Application Semiconductor Diffusion Furnace
Certification CE Place of Origin China
Brand Name XT
High Light High Purity quartz tubeSemiconductor Quartz Furnace TubeCustom Quartz Furnace Tube

1. Ultra-High Purity – Core of Clean Processes

  • SiO₂ purity ≥ 99.99%, premium grades up to 99.995%
  • Extremely low metal ion content (Na/K/Fe etc. < 1ppm)
  • No devitrification, volatilization or particle shedding at high temperatures
  • The "first line of defense" for semiconductor wafer yield — a contaminated furnace tube can ruin an entire wafer batch

2. Extreme Heat Resistance – Stable at Large Diameters

  • Long-term service temperature 1100°C – 1200°C, short-term up to 1350°C+
  • Softening point approx. 1700°C — large-diameter tubes resist sagging and deformation at high temperatures
  • Compatible with mainstream high-temperature processes: diffusion, oxidation, annealing, LPCVD

3. Uniform Temperature – Stable Thermal Field

  • Excellent thermal conductivity and radiant heat transfer of quartz material
  • Uniform wall thickness ensures a consistent temperature field inside the furnace
  • Works with temperature control systems for precise control at ±0.5°C level
  • Ensures identical process conditions for every wafer

4. Ultra-Low Thermal Expansion – Superior Thermal Shock Resistance

  • Thermal expansion coefficient of only 5.5×10⁻⁷/°C (near-zero expansion)
  • Outstanding thermal shock resistance — no cracking under frequent heating/cooling cycles
  • Dimensionally stable after repeated thermal cycling — no long-term warping or deformation

5. Strong Corrosion Resistance – Tolerates Process Atmospheres

  • Resists strong acids (except HF) and most process gases
  • No reaction with chlorine, oxygen or dopant gases (phosphine / diborane etc.) at high temperatures
  • Resists erosion and deposit buildup — easy to clean, long service life

6. Fully Transparent – Observation & Radiant Heating

  • Fully transparent walls with high UV-to-IR transmittance
  • Supports infrared radiant heating for high thermal efficiency
  • Real-time visibility of furnace conditions for easy process monitoring

7. Precise Dimensions – Fits Various Furnace Types

  • Strict control of tube diameter, wall thickness and length tolerances
  • Excellent straightness, roundness and wall thickness uniformity
  • Compatible with mainstream horizontal and vertical furnace models
  • Custom manufacturing supported per equipment drawings

8. Complete Specifications – Deep Customization

  • Outer diameter: φ40mm – φ500mm (larger available on request)
  • Wall thickness: 2mm – 15mm options
  • Length: customizable up to 3 meters or more
  • Structures: straight tube, open both ends, sealed one end, flanged tube
  • Processing: flame-polished ends, polishing, chamfering, flange fitting
  • Accessories: quartz boats, tube plugs and support components available

Company Details

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 and 

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 from Quality China Factory
  • Business Type:

    Manufacturer,Agent,Distributor/Wholesaler,Seller

  • Year Established:

    2023

  • Total Annual:

    >50000000

  • Employee Number:

    >100

  • Ecer Certification:

    Verified Supplier

Jiangsu Xiangtong Quartz Technology Co., Ltd., located in Donghai County, Lianyungang, was founded in 2023. We are a professional manufacturer of high-purity fused silica quartz products. We own a 18,000 ㎡ production base with clean workshop and complete processing equipment for cutting, grinding... Jiangsu Xiangtong Quartz Technology Co., Ltd., located in Donghai County, Lianyungang, was founded in 2023. We are a professional manufacturer of high-purity fused silica quartz products. We own a 18,000 ㎡ production base with clean workshop and complete processing equipment for cutting, grinding...

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Get in touch with us

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  • Jiangsu Xiangtong Quartz Technology Co., Ltd.
  • Hengshan Road No.51, Nanchen Resident Area, Shulianghe Town, Donghai County, Lianyungang City, Jiangsu Province, P.R.China
  • https://www.quartzglass-tube.com/

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