MEMS Piezoresistive Pressure Transducer for Fast, Sensitive Measurement

1. Why You Need It

Hydraulic control, gas metering and fast process loops need pressure sensors that respond in milliseconds with high sensitivity across a wide span. This MEMS piezoresistive transducer uses a silicon Wheatstone bridge that converts pressure into a precise resistance change, delivering 1 ms response and a series range from 0.1 kPa to 700 MPa. It gives engineers a compact, low-power, cost-effective sensor that keeps up with rapid pressure changes that slower or less sensitive devices miss.

2. Working Principle

Pressure deflects a silicon diaphragm on which piezoresistive strain gauges are diffused, forming a Wheatstone bridge. As the diaphragm bends, the gauge resistance changes, unbalancing the bridge and producing a voltage proportional to pressure. This voltage is conditioned into standard outputs — 4-20 mA, 0-5 V, 0-10 V or RS485. The MEMS silicon construction provides high sensitivity, small size and a fast 1 ms response, ideal for dynamic and precision applications.

3. Key Advantages

• MEMS silicon Wheatstone bridge sensor
• 1 ms fast response
• High sensitivity
• Series range 0.1 kPa to 700 MPa
• ±0.25% FS accuracy
• 4-20 mA / 0-5 V / 0-10 V / RS485
• -20 to 120 °C operating range
• M12 electrical connection
• Compact, low-power design
• Suitable for gas and liquid media

Common Pain Points & Solutions

Application Cases

Technical Specifications

FAQ

Q: What is a piezoresistive pressure transducer?

A piezoresistive pressure transducer measures pressure using silicon piezoresistive strain gauges diffused onto a diaphragm, connected as a Wheatstone bridge. When pressure deflects the diaphragm, the gauge resistance changes, unbalancing the bridge and producing an output proportional to pressure. This MEMS-based approach is the foundation of most modern compact pressure sensors, offering high sensitivity and fast response.

Q: What is the measurement range?

The series covers a measurement range from 0.1 kPa to 700 MPa, spanning very low differential and vacuum pressures up to extreme high pressures. Individual models are configured for specific spans within this range — for example, the standard model covers 0-0.1 kPa to 3 MPa. This breadth allows one technology to serve nearly every pressure measurement need.

Q: How fast is the response?

The response time is 1 ms, making the transducer suitable for dynamic pressure monitoring, hydraulic control loops and fast-changing process conditions. The fast response ensures the control system receives current pressure data without lag, which is essential for stable closed-loop control of hydraulics and rapid processes.

Q: What outputs are available?

The transducer offers 4-20 mA, 0-5 V, 0-10 V and RS485 outputs. The 4-20 mA loop is standard for industrial PLC and DCS systems, voltage outputs suit data acquisition systems, and RS485 enables digital communication. This flexibility allows the sensor to connect to almost any control or measurement system.

Q: What is the accuracy?

The accuracy is ±0.25% FS for the standard model. The high-sensitivity silicon bridge design also supports higher-accuracy variants for precision applications. For most hydraulic, gas metering and process control duties, ±0.25% FS provides more than sufficient precision for reliable measurement.

Q: What media can it measure?

It measures gas and liquid media compatible with the wetted materials. Silicon MEMS sensors are widely used on air, water, oil, natural gas and process fluids. For aggressive or corrosive media, the wetted diaphragm material must be verified or a diaphragm-isolated version selected to protect the silicon element.

Q: What is the operating temperature range?

The operating temperature range is -20 to 120 °C, covering most industrial and outdoor applications. Within this range the sensor maintains its accuracy, with temperature compensation applied to the bridge output. For extreme temperatures beyond this range, a remote-seal or special-material design would be required.

Q: Why is a MEMS silicon sensor better than a traditional one?

MEMS silicon sensors are smaller, lighter and more sensitive than traditional bonded-foil strain-gauge sensors. The monolithic silicon structure provides high sensitivity, fast response and excellent repeatability, while batch fabrication keeps cost low. These advantages make MEMS piezoresistive transducers the dominant choice for compact, high-performance pressure measurement.

Q: How is it installed?

The transducer is installed via its process connection (threaded) into the pressure port, with the electrical connection via an M12 connector. It is compact enough for tight-space mounting on hydraulic manifolds, gas meter runs and test fixtures. The wiring is connected to the chosen output — 4-20 mA, voltage or RS485 — and the sensor is ranged for the application.

Q: Where is it used?

It is used in hydraulic systems, natural gas metering, process control, test and measurement, and any application requiring a fast, sensitive, compact pressure sensor. Its wide series range and multiple outputs make it a versatile building block for OEM equipment and industrial measurement systems alike.