SHANGHAI ROYAL TECHNOLOGY INC.
| Payment Terms | L/C,T/T |
| Supply Ability | 5 sets per month |
| Delivery Time | 8 to 12 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Name | Tantalum PVD Sputtering Deposition Machine |
| Coatings | Tantalum, Gold, Silver etc. |
| Technology | Pulsed DC sputtering |
| Application | Microelectronics industry,Medical instruments ,Coatings on corrosion resistant parts,, |
| Ta film properties | Tantalum is most used in the electronic industry as a protective coating because of its good resistance to erosion. |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | RT1000-Ta |
| Certification | CE |
| Place of Origin | Made in China |
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Product Specification
| Payment Terms | L/C,T/T | Supply Ability | 5 sets per month |
| Delivery Time | 8 to 12 weeks | Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Name | Tantalum PVD Sputtering Deposition Machine | Coatings | Tantalum, Gold, Silver etc. |
| Technology | Pulsed DC sputtering | Application | Microelectronics industry,Medical instruments ,Coatings on corrosion resistant parts,, |
| Ta film properties | Tantalum is most used in the electronic industry as a protective coating because of its good resistance to erosion. | Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America | Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine | OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL | Model Number | RT1000-Ta |
| Certification | CE | Place of Origin | Made in China |
| High Light | vacuum coating plant ，high vacuum coating machine | ||
Magnetron Sputtering is widely used to deposit refractory metals like tantalum, titanium, tungsten, niobium, which would require very high temperatures of deposition, and precious metals: Gold and Silver and which is also used for deposition of lower melting points metals like copper, aluminum, nickle, chrome etc.
Tantalum is most used in the electronic industry as a protective coating because of its good resistance to erosion.
Applications of Sputtered Tantalum thin film:
1. Microelectronics industry as the films can be reactively sputtered and thus resistivity and temperature coefficient of resistance can be controlled;
Technical Advantages
Royal Technology’s standardized Tantalum sputtering deposition system:
| Main Configurations | |
| MODEL | RT1000-Ta |
| TECHNOLOGY | Pulsed DC magnetron sputtering Cathodic arc plating (for option, determined by coating process) |
| CHAMBER MATERIAL | Stainless Steel (S304) |
| CHAMBER SIZE | Φ1000*1000mm (H) |
| CHAMBER TYPE | D shape, cylindrical chamber |
| ROTATION RACK & JIG SYSTEM | Satellite driving or central driving system |
| POWER SUPPLIES | DC Sputtering Power Supply: 2~4 sets Ion Source: 1 set |
| DEPOSITION MATERIAL | Ta, Ti/Cr/TiAl, Au, Ag, Cu etc. |
| DEPOSITION SOURCE | Planar Sputtering Cathodes + circular arc cathodes |
| CONTROL | PLC(Programmable Logic Controller) + IPC ( manual+ auto+ semi-auto operation models) |
| PUMP SYSTEM | Rotary Vane Pump: SV300B – 1 set (Leybold) |
| Roots Pump: WAU1001 – 1 set (Leybold) | |
| Holding Pump: D60C – 1 set (Leybold) | |
| Magnetic Suspension Molecular Pump: MAG2200 – 2 sest (Leybold) | |
| GAS MASS FLOW CONTROLLER | 2 channels: Ar and N2 |
| VACUUM GAUGE | Inficon or Leybold |
| SAFETY SYSTEM | Numerous safety interlocks to protect operators and equipmen |
| HEATING | Heaters: 20KW. Max. temp.: 450℃ |
| COOLING | Industrial Chiller (Cold Water) |
| POWER MAX. | 100KW (Approx.) |
| AVERAGE POWER CONSUMPTION | 45 KW (Approx.) |
| GROSS WEIGHT | T (Approx.) |
| FOOT PRINT | ( L*W*H) 4000*4000 *3600 MM |
| ELECTRICAL POWER | AC 380V/3 phases/50HZ / 5 line |
Insite:
Built Time: 2018
Location: China
Please contact us for more applications and specifications.
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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