Payment Terms | T/T |
Supply Ability | By case |
Delivery Time | 2-4 weeks |
Packaging Details | custom cartons |
Brand Name | ZMSH |
Place of Origin | China |
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Product Specification
Payment Terms | T/T | Supply Ability | By case |
Delivery Time | 2-4 weeks | Packaging Details | custom cartons |
Brand Name | ZMSH | Place of Origin | China |
The silicon carbide wafer boat (SiC Susceptor/Boat) is a high-performance carrier widely used in semiconductor, photovoltaic, and compound semiconductor manufacturing. It is designed to hold and support wafers during high-temperature processes such as diffusion, oxidation, and LPCVD.
Compared to traditional quartz boats, SiC wafer boats offer superior thermal stability, chemical resistance, mechanical strength, and longer service life, making them the ideal choice for next-generation wafer processing.
High thermal stability: Can withstand >1600 ℃ without deformation or cracking.
Excellent chemical resistance: Resistant to corrosive atmospheres such as HCl, Cl₂, NH₃, minimizing contamination.
Superior mechanical strength: Low thermal expansion and outstanding thermal shock resistance.
Low particle generation: High density with mirror-polished surface significantly reduces particle contamination.
Extended service life: 2–5 times longer than quartz boats, lowering overall cost of ownership.
Customizable design: Available in different structures (flat, V-shaped, multi-tiered) according to equipment and process requirements.
Raw Material Preparation
High-purity SiC powder (>99.9%) or carbon-based substrates are selected.
Material purity and particle size distribution are critical to final density and strength.
Forming
Cold Isostatic Pressing (CIP), molding, or 3D printing methods are used to shape the green body.
Ensures uniform structure without cracks.
High-Temperature Sintering
Performed in vacuum or inert atmosphere above 2000 ℃.
Produces dense, high-strength SiC bulk material.
CVD/CVI Coating
Chemical Vapor Deposition or Infiltration enhances surface density and purity.
Provides a smooth, stable surface with minimized particle shedding.
Precision Machining
CNC machining and ultrasonic grinding achieve complex structures with high dimensional accuracy (±0.01 mm).
Surface Treatment & Polishing
Chemical Mechanical Polishing (CMP) achieves Ra < 5 nm.
Meets stringent semiconductor cleanliness requirements.
Inspection & Packaging
Density, thermal shock, and particle tests are conducted.
Products are then clean-packed for delivery.
Semiconductor manufacturing: Diffusion, LPCVD, oxidation furnace wafer carriers.
Photovoltaic industry: Solar cell diffusion and annealing processes.
Compound semiconductors: SiC and GaN epitaxy and high-temperature treatments.
Research & development: High-temperature experiments in universities and labs.
Wafer size: 6" / 8" / 12"
Material purity: >99.9% SiC
Operating temperature: ≤1650 ℃
Surface roughness: Ra < 5 nm (mirror-polished)
Service life: 2–5× longer than quartz boats
Answer: SiC boats offer superior thermal stability (>1600 ℃), excellent chemical resistance, outstanding thermal shock resistance, and higher mechanical strength. With mirror-polished surfaces, they generate fewer particles and last 2–5 times longer than quartz boats.
Answer: Depending on process conditions, the service life is typically 2–5 times that of quartz boats, significantly reducing replacement frequency and total cost of ownership.
Answer: Yes. We provide customized designs for different wafer sizes (6", 8", 12") and structures (flat boats, V-shaped boats, multi-tier designs) according to customer equipment and process requirements.
Answer: Through precision machining and CMP (Chemical Mechanical Polishing), the surface roughness can reach Ra < 5 nm, ensuring ultra-low particle release and meeting the strictest semiconductor cleanliness standards.
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification:
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, op... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, op...
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