Product Specification

Probe Station Chuck Product Introduction

The probe station chuck is a key component of a probe station, designed to support, hold, and position wafers or samples during electrical testing and device characterization. It provides a stable testing platform for wafers, chips, substrates, and semiconductor devices, ensuring reliable contact between the probe needles and the device under test.

The chuck is commonly used in wafer probing, semiconductor parameter testing, failure analysis, R&D verification, and production inspection. According to different testing requirements, the chuck can be designed as a standard chuck, vacuum chuck, hot chuck, or customized chuck with special surface treatment and mounting structure.

Product Function

The main function of the probe station chuck is to keep the wafer or sample flat, stable, and accurately positioned during the probing process. Through vacuum adsorption or mechanical holding, the chuck prevents sample movement and improves the repeatability and accuracy of electrical measurements.

For temperature-related testing, the chuck can also be integrated with heating modules, temperature sensors, or cooling structures to support stable thermal control during measurement.

Key Features

Stable Wafer Holding

The chuck surface is designed to firmly support the wafer or sample during probing. Vacuum holes or vacuum grooves can be customized to achieve reliable adsorption for different wafer sizes.

High Surface Flatness

Precision machining and polishing help ensure good surface flatness, which is important for stable wafer contact and accurate probe testing.

Optional Vacuum Design

The chuck can be designed with vacuum holes, ring-shaped vacuum grooves, or multi-zone vacuum adsorption structures to match different sample sizes and test requirements.

Good Thermal Performance

For hot chuck applications, materials with good thermal conductivity can be selected to improve heating efficiency and temperature uniformity.

Custom Surface Treatment

Surface treatments such as gold plating, nickel plating, anodizing, ceramic coating, or other protective coatings are available to improve wear resistance, oxidation resistance, conductivity, or insulation performance.

Customized Mounting Interface

The bottom structure, mounting holes, vacuum ports, and connection interface can be customized according to the customer’s probe station design.

Available Types

Customizable Specifications

Typical Applications

• Wafer-level probing
• Semiconductor electrical testing
• I-V / C-V measurement
• Chip and die testing
• LED, Si, SiC, GaN, GaAs device testing
• Power device and RF device characterization
• Laboratory R&D and failure analysis
• High-temperature probe station testing

FAQ

Q1: What is a probe station chuck?

A probe station chuck is a precision holding platform used in a probe station to support and fix wafers, chips, or substrates during electrical testing. It helps keep the sample stable and accurately positioned while probe needles contact the device.

Q2: What is the main function of the chuck?

The main function is to hold the wafer or sample firmly during probing. It provides stable support, reliable vacuum adsorption, accurate positioning, and optional temperature control for semiconductor testing.

Q3: What wafer sizes can the chuck support?

The chuck can be customized for different wafer sizes, such as 2 inch, 3 inch, 4 inch, 6 inch, 8 inch, or other special sizes according to customer requirements.