sic square mirror for lithography

{"cid":"91184473","title":"\u200b\u200bSiC Square Mirror Mirror-Grade Polishing for Lithography Machine","imgUrl":"https:\/\/img.chinax.com\/nimg\/6d\/bb\/24011231608fc43ac01b217762d9-200x200-1.jpg","attrs":{"Price":"by case","Brand Name":"ZMSH","Model Number":"SiC Square Mirror","Minimum Order Quantity":"5","Delivery Time":"2-4 weeks","Certification":"rohs","Place of Origin":"CHINA","Payment Terms":"T\/T","Packaging Details":"package in 100-grade cleaning room","Coefficient of Thermal Expansion\u200b\u200b":"2.7 - 4.5 \u00d7 10\u207b\u2076\/\u00b0C","Hardness\u200b\u200b":"HV2500 (or Mohs 9.5)","Surface Roughness (Ra)\u200b\u200b":"< 0.1 nm","Flatness\u200b\u200b":"\u200b\u200b\u03bb\/50 (@13.5nm) or higher","Lightweighting Rate\u200b\u200b":"60% - 90%","\u200b\u200bElastic Modulus\u200b\u200b":"High (specific values vary greatly by process and structure)"}}