sic substrate for mems micromirror

{"cid":"91184473","title":"\u200b\u200bDouble-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror","imgUrl":"https:\/\/img.chinax.com\/nimg\/a9\/a7\/47b92625e63c225b3512f9f24c08-200x200-1.jpg","attrs":{"Price":"by case","Brand Name":"ZMSH","Model Number":"SiC Mirror","Minimum Order Quantity":"25","Delivery Time":"2-4 weeks","Certification":"rohs","Place of Origin":"CHINA","Payment Terms":"T\/T","Packaging Details":"package in 100-grade cleaning room","Primary Material":"Ultra-high-purity SiC","Density":"~3.0 \u2013 3.2 g\/cm\u00b3","Elastic Modulus":">400 GPa","Mohs Hardness":"9.5","Surface Roughness (Ra, DSP)":"\u2264 0.5 nm","Coefficient of Thermal Expansion":"~4.5\u00d710\u207b\u2076\/\u2103"}}