ZHANGJIAGANG CITY PEONY MACHINERY CO.,LTD
| Operation | Automatic Continuous |
| Pretreatment | Coagulation / Flocculation Optional |
| Abrasive Type | Silica / Ceria / Alumina |
| CMP Stream | Oxide / Copper / Tungsten |
| Control System | PLC + VFD |
| Solids Discharge | Continuous |
| MOC | SS316L / Customized |
| Low-Contamination Design | Optional |
| Payment Terms | TT,.LC,Western Union |
| Supply Ability | 60 sets per month |
| Delivery Time | 75-90 days after down payment |
| Packaging Details | Standard export package, polywood, fumigated wood, filmed |
| Capacity | Depends on Slurry Condition |
| Separation | Solid-Liquid Separation |
| Application | CMP Slurry Recovery |
| Cleaning System | Automatic Flushing |
| Brand Name | Peony |
| Model Number | PDC |
| Certification | ISO |
| Place of Origin | China |
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Product Specification
| Operation | Automatic Continuous | Pretreatment | Coagulation / Flocculation Optional |
| Abrasive Type | Silica / Ceria / Alumina | CMP Stream | Oxide / Copper / Tungsten |
| Control System | PLC + VFD | Solids Discharge | Continuous |
| MOC | SS316L / Customized | Low-Contamination Design | Optional |
| Payment Terms | TT,.LC,Western Union | Supply Ability | 60 sets per month |
| Delivery Time | 75-90 days after down payment | Packaging Details | Standard export package, polywood, fumigated wood, filmed |
| Capacity | Depends on Slurry Condition | Separation | Solid-Liquid Separation |
| Application | CMP Slurry Recovery | Cleaning System | Automatic Flushing |
| Brand Name | Peony | Model Number | PDC |
| Certification | ISO | Place of Origin | China |
| High Light | Calcium Hypochlorite Decanter separator ，420mm Decanter separator ，3300RPM screw decanter centrifuge | ||
The Decanter Centrifuge for CMP Slurry Recovery is designed for continuous abrasive-solids recovery, conditioned slurry thickening, filter-feed preparation, and primary liquid clarification.
It is suitable for Chemical Mechanical Planarization processes involving silica, alumina, or ceria abrasives, as well as copper and tungsten CMP wastewater streams. CMP wastewater may contain nanoscale abrasive particles, dissolved metals, oxidizers, complexing agents, surfactants, and other process chemicals.
Nanoscale CMP abrasives may remain suspended. pH adjustment, coagulation, or flocculation may be needed before centrifugation.
Oxide, copper, tungsten, and ceria CMP streams contain different abrasives and chemicals. Separate collection helps reduce cross-contamination.
The decanter removes suspended solids but not dissolved metals. Additional precipitation, ion exchange, or membrane treatment may be required.
Recovered solids may contain metals, pad debris, and mixed abrasives. Low-contamination materials can be selected for valuable material recovery.
Recovered slurry cannot normally be reused directly. Particle size, chemistry, contamination, and polishing performance must first be verified.
Peony provides continuous solutions for conditioned CMP slurry thickening, abrasive recovery, sludge reduction, and downstream treatment preparation.
CMP Tool Drain / Spent Slurry
→ Separate Collection
→ Equalization Tank
→ pH Adjustment
→ Optional Coagulation / Flocculation
→ Decanter Centrifuge
→ Thickened CMP Solids
→ Filter Press / Dryer / Metal Recovery / Disposal
Clarified Liquid
→ Intermediate Tank
→ Microfiltration / Ultrafiltration / Ion Exchange / RO
→ Process-Water Reuse or Discharge
Further membrane or polishing treatment may be required when higher water-reuse quality is needed.
Conditioned CMP slurry enters the rotating bowl through a controlled feed pipe.
An agitated equalization tank maintains a stable feed concentration and prevents settled solids from accumulating in the tank.
High-speed bowl rotation separates aggregated abrasive particles, precipitated metals, and suspended solids from the liquid phase.
The denser solids move outward and form a layer against the bowl wall, while the liquid remains closer to the bowl center.
The internal screw conveyor rotates at a controlled differential speed.
It continuously transports the settled CMP solids toward the conical end for further thickening and discharge.
The separated liquid leaves through the liquid outlet.
It can be transferred to membrane filtration, ion exchange, metal-removal treatment, water reclamation, or further wastewater treatment.
Concentrated CMP solids are discharged continuously.
The solids can be sent to a filter press, dryer, metal-recovery process, abrasive-recovery process, sludge container, or controlled disposal.
| Model | Diameter (mm) | Length (mm) | Length-to-diameter rate | G force | Max solid discharge (m³/h) | Weight (kg) | Dimension (L*W*H) (mm) |
|---|---|---|---|---|---|---|---|
| PDC-10 | 250 | 1000 | 4 | 4080 | 0.4 | 1000 | 2410*800*1080 |
| PDC-12 | 4200 | 1350 | 4 | 3500 | 0.6 | 1200 | 2610*800*1080 |
| PDC-12 | 4200 | 1350 | 4.5 | 3180 | 1.2 | 1800 | 3495*840*1180 |
| PDC-18 | 4000 | 1600 | 4.5 | 3180 | 1.2 | 3200 | 3497*1020*1385 |
| PDC-18 | 450 | 2150 | 4 | 2500 | 2 | 3800 | 4447*1080*1385 |
| PDC-20 | 400 | 2250 | 4.5 | 2500 | 3.5 | 4000 | 4580*1140*1470 |
| PDC-21 | 530 | 2280 | 4.3 | 2500 | 5 | 5000 | 4924*1170*1540 |
| PDC-26 | 655 | 2800 | 4.3 | 2270 | 8 | 7000 | 4300*1900*1350 |
The decanter continuously concentrates conditioned CMP solids and reduces the volume sent to filter presses or sludge-handling systems.
Primary separation removes aggregated abrasive particles and precipitated solids before membrane filtration or polishing treatment.
Oxide, copper, tungsten, and ceria CMP streams can be collected separately to support metal or abrasive recovery.
Bowl speed, differential speed, pond depth, feed rate, and conveyor torque can be adjusted according to changing slurry conditions.
Internal materials and protection components can be selected according to abrasive type, metal contamination limits, and downstream recovery requirements.
Please provide:
Not always. Nanoscale silica, ceria, and alumina particles may remain colloidally stable. Coagulation or flocculation is commonly evaluated before centrifugal separation.
Normally not without further purification and testing. Particle size, agglomeration, chemical composition, metal contamination, polishing performance, and wafer-defect risk must first be confirmed.
Technically possible, but separate collection is recommended when cross-contamination, metal recovery, or abrasive reuse is important.
It may be reused after further treatment. Membrane filtration, ion exchange, RO, or polishing treatment may be required to meet the specified water-quality standard.
No. The decanter mainly provides continuous primary separation and slurry thickening. A filter press may still be required for lower cake moisture, while membranes may be required for higher liquid clarity.
Peony welcomes distributor and agent cooperation with semiconductor manufacturers, wafer fabrication plants, CMP slurry suppliers, electronics wastewater contractors, metal-recovery companies, water-reclamation integrators, and industrial separation partners.
We support partners with CMP slurry testing, centrifuge selection, chemical-conditioning design, low-contamination configuration, metal and abrasive recovery integration, water-reclamation connection, installation guidance, commissioning, spare parts, and after-sales service.
Send us your CMP slurry information, including the polishing process, abrasive type, particle size, solids concentration, dissolved-metal content, required capacity, recovery target, clarified-liquid standard, and downstream treatment arrangement. Our engineering team will recommend a suitable decanter centrifuge solution for your CMP slurry recovery process.
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Exporter,Trading Company,Seller,Other
Year Established:
1990
Total Annual:
35Million -40Million
Employee Number:
50~100
Ecer Certification：
Verified Supplier
Basic Information Zhangjiagang City Peony Machinery Co., Ltd., founded as a special producing enterprise of separating equipment in 2008, is the well-known manufacturer and service provider of separation and filtration in China. Peony dedicated to solving the solid-liquid, liquid-liquid separation p... Basic Information Zhangjiagang City Peony Machinery Co., Ltd., founded as a special producing enterprise of separating equipment in 2008, is the well-known manufacturer and service provider of separation and filtration in China. Peony dedicated to solving the solid-liquid, liquid-liquid separation p...
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