Hunan Huitong Advanced Materials Co., Ltd.
| Payment Terms | L/C,T/T |
| Supply Ability | 500kg/month |
| Delivery Time | Depends on quantity |
| Packaging Details | Paper carton |
| Length | 80-100um |
| Packing | flexible |
| Application | Semi-conductor Gas Filter/High Purity Gas Filters Solution |
| Material | Stainless steel 316L/Hastelloy C22/C59/Nickel 200 |
| Diameter | 1um/1.5um/2um |
| Brand Name | Huitong |
| Model Number | Ultrafine Short fiber |
| Certification | SGS |
| Place of Origin | Yiyang,China |
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Product Specification
| Payment Terms | L/C,T/T | Supply Ability | 500kg/month |
| Delivery Time | Depends on quantity | Packaging Details | Paper carton |
| Length | 80-100um | Packing | flexible |
| Application | Semi-conductor Gas Filter/High Purity Gas Filters Solution | Material | Stainless steel 316L/Hastelloy C22/C59/Nickel 200 |
| Diameter | 1um/1.5um/2um | Brand Name | Huitong |
| Model Number | Ultrafine Short fiber | Certification | SGS |
| Place of Origin | Yiyang,China |
1μm Metal Filter Element(Nanoscale)for Semi-conductor Process Gas Purification
Product type: Ultrafine 316L stainless steel short fiber
Fiber Diameter: 1um/1.5um/2um available
Cut Length: 80-100um
Chemical Composition of Raw material( Wt% )
|
Elements |
C |
Si |
Mn
|
Ni
|
Cr
|
Mo
|
S
|
P
|
|
Standard
|
≤0.03
|
≤1.00
|
≤2.00
|
10~14
|
16~18
|
2~3
|
≤0.03
|
≤0.045
|
|
Value
|
0.028
|
0.56
|
0.5
|
10.85
|
16.97
|
2.1
|
0.003
|
0.027
|
In semiconductor manufacturing, maintaining ultra-high purity process gases is critical to prevent defects and ensure high yields. 1μm metal filter media play a vital role in gas purification by removing particulate contaminants while also contributing to Airborne Molecular Contamination (AMC) control, which is essential for advanced wafer fabrication.
High-Efficiency Filtration (1μm Retention)
Captures sub-micron particles that could cause defects in photolithography, etching, and deposition processes.
Reduces risk of wafer surface contamination, improving yield.
Chemically Inert & Corrosion-Resistant
Made from high-purity stainless steel (316L), nickel, or sintered alloys for compatibility with aggressive gases (e.g., HF, HCl, NH₃).
Resists outgassing, preventing additional contamination.
AMC Control Capability
Some advanced metal filters incorporate surface treatments or coatings (e.g., passivation, electropolishing) to minimize adsorption/desorption of volatile organics or acids.
Helps meet SEMI F21 AMC Class 1 requirements for sensitive processes like EUV lithography.
High Temperature & Pressure Resistance
Stable performance in harsh conditions (up to 500°C or higher for some alloys).
Suitable for CVD, diffusion, and ion implantation gas lines.
Long Service Life & Cleanability
Reusable after cleaning (ultrasonic, chemical, or thermal methods), reducing cost of ownership.
Low pressure drop design for energy-efficient gas flow.
Ultra-high purity (UHP) gas delivery (N₂, Ar, H₂, O₂, etc.)
Etch & deposition processes (CVD, PVD, ALD)
Photolithography (AMC-sensitive EUV/DUV environments)
Bulk gas & point-of-use (PoU) filtration
Superior durability vs. polymeric filters (which can degrade and shed particles).
No fiber shedding unlike traditional HEPA/ULPA filters.
Better AMC mitigation compared to standard particulate filters.
SEMI F20 (Particulate Control)
SEMI F21 (AMC Classification)
ISO 14644-1 (Cleanroom Standards)
1μm metal filter media is a robust solution for semiconductor gas purification, combining particulate filtration, AMC control, and chemical resistance to meet the stringent demands of advanced wafer fabrication.
Company Details
Business Type:
Manufacturer
Year Established:
1983
Total Annual:
30000000-50000000
Employee Number:
400~500
Ecer Certification：
Verified Supplier
Who we are Hunan Huitong is a world leading manufacture of metal fiber and related products.We have the largest and the most complete domestic product line. Since its foundation in 2002,We has always devoted ourself to the development of new products and expansion of their use. In 2015,we b... Who we are Hunan Huitong is a world leading manufacture of metal fiber and related products.We have the largest and the most complete domestic product line. Since its foundation in 2002,We has always devoted ourself to the development of new products and expansion of their use. In 2015,we b...
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