INDUSTRIAL SINGLE-STATION SPIN COATER WITH ±1% UNIFORMITY – CUSTOMIZABLE

This single-station spin coater is designed for precise and uniform deposition of photoresist, polymers, sol-gel materials, nanoparticles, and other functional liquids onto substrates ranging from small fragments to 8-inch wafers. The system uses a high-stability brushless DC motor with programmable speed and acceleration profiles, ensuring repeatable thin-film coating results. Ideal for semiconductor R&D, MEMS fabrication, perovskite solar cells, and optical coating applications. The system is fully customizable in chuck size, bowl material, motor specifications, and optional heating or UV curing modules.

• Spin Coating Main Unit (single-bowl design)
• Vacuum Chuck with Substrate Adapter Kit
• Programmable Digital Controller (Touchscreen HMI)
• Oil-Free Vacuum Pump (≥60 L/min)
• Automatic or Manual Dispense System (syringe/nozzle)
• Exhaust & Drain Port Assembly
• Nitrogen Purge Inlet for Motor Seal Protection
• Optional: Integrated Hotplate / UV Curing Module

• Semiconductor & MEMS - Photoresist coating for lithography
• Perovskite & Organic Solar Cells - Thin-film deposition
• Optical Coatings - Anti-reflective and filter layers
• Biomedical Devices - Bio-polymer and -eluting coatings
• Graphene & 2D Materials - Uniform dispersion coating
• OLED & Quantum Dots - Emissive layer deposition
• Glass & Ceramic Coating - Sol-gel and protective layers

We offer full customization including:

• Vacuum chuck size and shape (round / square / fragment, 3mm to 450mm)
• Bowl material: PTFE, Teflon®, stainless steel, or aluminum for chemical resistance
• Motor upgrade: Servo motor with higher precision and extended speed range
• Integrated modules: Hotplate (up to 300°C), UV curing (365nm/395nm LED)
• Automatic dispense system: Programmable syringe pump or spray nozzle
• Exhaust system: Active chemical fume extraction with HEPA filter
• Software: Custom recipe management, data logging, and remote control
• Multiple bowls for quick material changeover without cross-contamination

• ±1% film thickness uniformity across entire substrate
• Instant acceleration up to 30,000 rpm/s for sharp coating profiles
• Touchscreen PLC with real-time speed & time display
• Vacuum interlock - automatically stops if vacuum drops below threshold
• Anti-drip and splash-resistant bowl design
• Nitrogen purge extends motor life and protects sensitive coatings
• Compact benchtop footprint saves laboratory space
• ESD-safe construction for sensitive electronic materials

• Free sample coating test with detailed uniformity report
• On-site installation & operator training (optional)
• 24 months warranty on motor and controller
• Lifetime remote technical support via video call / email
• Spare parts kit included (vacuum seals, O-rings, fuses)
• Custom chuck fabrication for non-standard substrates

• Packing: Anti-static foam + vacuum-sealed bag + reinforced export plywood case
• Shipping: FOB Shanghai / Shenzhen / Guangzhou
• Lead time: 10 - 25 working days (depends on customization level)
• Shipping methods: Air freight (for small units), sea freight (for industrial systems), express courier (DHL/FedEx)

A: Yes. We fully customize any chuck shape and size, including square, rectangular, and irregular fragments up to 450mm.

A: Typically 0.1µm to 200µm depending on material viscosity and spin speed. We can customize spin profiles to optimize thickness for your specific coating material.

A: Yes. The servo motor option provides higher torque for thick materials. We can also customize the dispense nozzle and pre-spin delay.