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HIGH-PRECISION 12-STATION AUTOMATIC SPIN COATER FOR SEMICONDUCTOR & PEROVSKITE FILM PREPARATION
Product Overview
This 12-station spin coater is designed for high-throughput thin film deposition, supporting wafers, glass, and flexible substrates. Each station offers independent speed, acceleration, and coating time settings with closed-loop control achieving ±1 rpm accuracy. The number of stations, dispensing method, chamber size, and exhaust system are all customizable, making it ideal for both R&D and pilot production.
Technical Specifications
Parameter
Value / Range
Customization Option
Number of stations
12
Customizable: 4 / 8 / 12 / 16 stations
Speed range
100 - 10,000 rpm
Extendable to 12,000 rpm
Acceleration range
50 - 10,000 rpm/s
Customizable
Speed accuracy
±1 rpm
-
Max substrate size
150 mm diameter
Customizable up to 200 mm
Chamber material
PP / PTFE / 316L stainless steel
Customizable contact materials
Environmental control
Exhaust & purge available
Customizable N₂ purge module
Program storage
1000+ recipes
-
Power supply
AC 220V / 50Hz
Customizable to 110V / 60Hz
Applications
Perovskite solar cell films
Photoresist coating (semiconductor lithography)
Sol-gel thin films
OLED & quantum dot emitting layers
Biosensor coatings
Customizable for non-planar or flexible substrates
Customization Options
System-level and process-level customization
Number of stations, layout, dispensing path
Chamber size and material (acid-resistant, solvent-resistant)
Automatic cleaning & waste solvent recovery system
Heating / UV / IR post-coating curing modules
Factory MES/ERP data interface integration
Key Features
12 independently driven stations with separate motors & control
High acceleration response - reaches set speed in <0.5 seconds
Cross-contamination prevention - independent exhaust channels per station
One-click recipe recall with optional barcode scanning startup
Customizable safety interlock & e-stop logic
Support and Services
Global remote support (TeamViewer/VPN)
On-site installation & training (optional)
Process consulting - viscosity/speed/thickness modeling
Local spare parts stock - customizable spare parts kit available
18-month warranty (excluding intentional damage)
Packing and Shipping
Shockproof wooden case (ISTA standard compliant)
Desiccant & humidity indicator included inside
Shipping methods: sea / air / land - customizable export labeling & fumigation certificate available
Lead time: 4 weeks for standard models, 6-8 weeks for customized models
Frequently Asked Questions
Q1: Can it coat 8-inch wafers?
A: Standard max is 150 mm - chamber customizable up to 200 mm.
Q2: Can different stations run different recipes simultaneously?
A: Yes - each station is independently programmable.
Q3: Is N₂ environment coating supported?
A: Full-chamber N₂ purge with oxygen monitoring is customizable.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2007
Total Annual:
2000000-3000000
Employee Number:
150~200
Ecer Certification:
Verified Supplier
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...