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High-Precision Single Station Spin Coater – Customizable Ramp & Speed Profile for R&D Labs
Product Overview
Our single station spin coater is engineered for uniform thin film deposition of photoresist, polyimide, sol-gel, and nanoparticles. It features exceptional speed stability (< ±1% fluctuation), low vibration operation, and a chemical-resistant bowl. The compact design makes it ideal for R&D laboratories, pilot lines, and small-batch production environments.
Customizable options include: chuck size, bowl material (PTFE/PP/stainless steel), motor type (brushless DC/servo), and exhaust port position.
Technical Specifications
Parameter
Standard Range
Customizable Option
Substrate size
10 mm - 150 mm dia.
Up to 200 mm square
Speed range
100 - 12,000 rpm
50 - 15,000 rpm
Acceleration
100 - 10,000 rpm/s
Customizable ramp profiles
Speed stability
±0.5%
±0.1% (servo motor)
Program steps
10 programs, 20 steps each
Unlimited steps customizable
Chuck type
Vacuum chuck (aluminum)
PTFE / ceramic / custom pattern
Bowl material
Polypropylene (PP)
PTFE / stainless steel 316L
Exhaust port
Ø50 mm rear
Left / right / dual ports
Motor type
Brushless DC
Servo motor customizable
Display
4.3" LCD
7" HMI touch screen
Power
220V/50Hz or 110V/60Hz
Available for any voltage
Applications
Semiconductor wafer coating (photoresist, ARC)
OLED and quantum dot thin films
Sol-gel and spin-on glass (SOG)
Biosensor and polymer film deposition
Perovskite solar cell fabrication
Also suitable for customizable high-viscosity or high-temperature processes.
Customization Options
Bowl inner diameter and drain groove design
Vacuum chuck shape for non-standard substrates (e.g., rectangular, broken wafers)
Automatic cover with interlock
Nitrogen blow-dry during spin
Multiple dispense nozzle brackets
Special coating programs (e.g., reverse spin, pulse spin)
Key Features
High acceleration repeatability for uniform edge bead
Real-time speed curve display and data export (CSV)
Easy-swap chuck design without tools
Chemical-resistant and seamless stainless steel or PTFE bowl
Autofill rinse function for cleaning between runs
Customizable recipe library for multiple operators
Support and Services
Installation guide and calibration video included
Remote troubleshooting within 24 hours
18 months warranty on motor and controller
On-site training (available for customizable packages)
Spare parts shipment from local warehouses (US/EU/Asia)
Packing and Shipping
Packing: Foam-lined wooden case with anti-static bag
Dimensions (carton): 55×45×45 cm
Gross weight: approx. 22 kg
Shipping: DHL / FedEx / UPS air freight; Sea freight available for bulk orders
Customizable labeling and export packaging for drop-shipping
Frequently Asked Questions
Q1: Can the speed ramp be customized for multiple steps?
Yes. Up to 20-step profiles are customizable per recipe.
Q2: Does it fit 100 mm round or square substrates?
Yes. We offer customizable chucks for square, rectangular, and irregular substrates.
Q3: What is the lead time for a custom bowl material?
Standard units ship in 7 days. Customizable bowls (e.g., PTFE) require 3-4 weeks.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2007
Total Annual:
2000000-3000000
Employee Number:
150~200
Ecer Certification:
Verified Supplier
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...