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24-Position Spin Coating System with Smart Material Recovery | Custom Chuck & Nozzle for Minimal Loss
This material-saving 24-station spin coater is engineered to minimize photoresist, polyimide, or precursor solution waste in high-throughput coating lines. Unlike conventional spin coaters that discard excess liquid, our system integrates customizable edge bead removal (EBR) recycling, low dead-volume dispense lines, and pre-wet optimization logic to reduce material consumption by 25-40%.
Each of the 24 stations operates with independent closed-loop monitoring of solution usage. The machine learns the minimum volume needed for uniform coverage, then automatically adjusts dispense amounts per substrate. Combined with customizable solvent recovery bowls, the system collects over 85% of unspun chemical for refiltration or disposal, significantly lowering cost-of-ownership.
All 24 stations are controlled by a central PLC+HMI, and the unit supports recipe-per-station customization - allowing different materials, spin curves, and saving strategies on adjacent stations simultaneously.
Technical Parameters
Parameter
Standard Value
Customizable Range (Material-Saving Focus)
Number of stations
24
12 / 16 / 24 / 32 (customizable)
Max substrate size
200 mm diameter or 156×156 mm square
50 - 300 mm (customizable chuck for low edge loss)
Spin speed range
0 - 6000 rpm
0 - 8000 rpm (low-waste soft acceleration)
Material saving rate
30% average
10% - 50% (customizable dispense logic)
Minimum dispense volume per substrate
1.5 mL (for 150 mm wafer)
0.5 - 5 mL (customizable nozzle design)
Dead volume in fluid path
< 0.3 mL
< 0.1 mL (custom tubing & valve)
EBR solvent saving mode
Standard edge cut only
User-defined EBR pattern (customizable)
Coating uniformity
< ±3% @3000 rpm
±2% with material-saving low spin speed
Waste chemical collection efficiency
85%
Up to 92% (custom bowl with drain design)
Chemical replenishment alert
Manual
Auto refill with consumption tracking (customizable)
Power supply
400V / 50 Hz / 3P
208V - 480V (customizable)
Machine footprint (W×D×H)
2100 × 1200 × 1900 mm
customizable width/depth for cleanroom fit
Production Line Composition
When integrated into a material-efficient coating line, the 24-station spin coater is combined with:
Low dead-volume chemical dispense system - 1-12 bottles with <0.5 mL residual each
Pre-wet station - uses recycled solvent to pre-wet substrates (saving fresh material)
24-station spin coater - main unit with material-saving bowls
Edge bead remover (EBR) with solvent recovery - customizable cut width and speed
Post-coating bake & cooling - optional
Chemical recycling unit - filtration + re-mixing for non-critical layers
Exhaust with solvent condensation trap - recovers evaporated solvent (>70%)
Applications
Semiconductor photoresist coating - cost-sensitive fabs (memory, logic, power devices)
Perovskite solar cells - expensive precursor solutions (Pb, organic halides)
OLED/QLED hole injection layer - costly PEDOT:PSS or polymer inks
R &D pilot lines - where material quantity is limited
MEMS & microfluidics - SU-8, BCB, and other high-cost polymers
Lithium battery coating - slurry savings on separator or electrode
Any production line where coating chemical cost > $100/L
Customization for Maximum Material Saving
This 24-station spin coater is highly customizable to achieve the best raw material economy:
Dispense nozzle type - needle, slit, or spray - customizable to match solution viscosity
Dispense volume logic - fixed, dynamic, or AI-assisted minimum-volume learning
Purged with N₂ and capped to prevent residue drying
Shipping term
FOB / CIF / EXW (Shanghai / Shenzhen)
Lead time
45 - 55 working days (customized: +15 days)
Transport
40' HC container (1 unit) or air freight for urgent orders
Documents
CE declaration, material saving validation report, maintenance guide
Frequently Asked Questions
Q1: How exactly does the machine save material compared to a standard spin coater?
A: Three ways: ① smallest possible dispense (customizable per material), ② EBR solvent reuse for pre-wet, and ③ low dead-volume plumbing (no chemical left in long tubes). Typical saving is 30-40% by weight.
Q2: Can I use the same customized saving recipe on all 24 stations?
A: Yes - or you can customize per station. Example: station 1-6 use low-cost resist with no saving priority, station 7-24 use expensive resist with aggressive saving.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2007
Total Annual:
2000000-3000000
Employee Number:
150~200
Ecer Certification：
Verified Supplier
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
