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Compact Benchtop Spin Coater with Non-Vacuum Chuck – Customizable for Fragile or Thin Substrates (0.2mm thickness)
Product Overview
This customizable single-station spin coater is designed for uniform thin-film deposition of photoresist, polyimide, sol-gel, nanoparticles, and other functional coatings onto substrates. Available in high-precision R&D, compact benchtop, and large-format configurations.
The system is fully customizable in spin speed range, substrate size, chuck type, bowl material, and automation level. Spin coating uses centrifugal force to spread a liquid coating evenly across a substrate, achieving film thicknesses from 1 to 50 microns with uniformity up to ± 1%.
Key advantages include exceptional speed stability (< ±1% fluctuation), low vibration operation, and a chemical-resistant process bowl. The compact design is ideal for research laboratories, pilot lines, and small-batch production environments. The modular architecture supports future upgrades, including multiple dispense nozzles, nitrogen purge, and in-situ heating modules.
Technical Specifications
Parameter
High-Precision R&D Model
Compact Benchtop Model
Large-Format Model
Substrate size (customizable)
Up to 150 mm dia.
5 - 120 mm dia.
Up to 450 mm / 18"
Spin speed range (customizable)
100 - 12,000 rpm
50 - 10,000 rpm
Up to 15,000 rpm
Speed accuracy
±0.5% of set value
±1 rpm
±1 rpm (servo)
Acceleration (customizable)
100 - 10,000 rpm/s
Programmable ramp rates
Up to 30,000 rpm/s
Program steps (customizable)
20+ steps per recipe
10 programs, 20 steps each
200 recipes, 40 steps each
Chuck type (customizable)
Vacuum (aluminum/PTFE)
Non-vacuum / Vacuum
Vacuum / Mechanical clamp
Bowl material (customizable)
PTFE / PP / Stainless steel 316L
PP / PTFE-coated
Stainless steel
Coating viscosity range
Up to 2,000 cP
Up to 1,000 cP
Customizable
Control interface
7" HMI touchscreen
4.3" LCD
Touchscreen + PLC
Data export
USB / Ethernet
USB
USB / Ethernet / Modbus
Power supply
110/220V, 50/60Hz
110/220V, 50/60Hz
220/380V, 50/60Hz
Typical application
Semiconductor, OLED, perovskite
General R&D, teaching
Industrial pilot, large panels
Applications
Semiconductor & MEMS: Photoresist, ARC, polyimide coatings on wafers
Optoelectronics: OLED, quantum dots, perovskite solar cells
Materials science: Sol-gel, spin-on glass (SOG), nanoparticle films
Biotechnology: Biosensors, microfluidics, polymer films
R&D & academia: Process development, formula optimization, teaching labs
High precision spin control: High-torque brushless motor with ±0.5% speed accuracy and programmable acceleration ensures repeatable, uniform coating
R&D-focused design: Multi-step recipe programming and data logging capabilities for systematic process development
Versatile fixturing: Customizable chucks and fixtures securely hold complex 3D shapes or fragile substrates
Minimal material waste: Precise, small-volume dispensing is ideal for expensive or experimental coating materials
User-friendly interface: Intuitive touchscreen HMI with recipe storage for quick recall of optimized parameters
Compact footprint: Benchtop design saves valuable lab or production floor space
Chemical-resistant construction: PTFE, PP, or stainless steel bowls for aggressive solvents
Safety interlocks: Automatic stop when lid is opened during operation
Easy cleaning: Removable fluid path components and smooth chamber surfaces
Data traceability: Recipe storage, real-time monitoring, USB/Ethernet export
Support and Services
Free process consulting and material testing (send us your substrates)
Custom fixture design and engineering services
Installation guide and calibration video included
Remote troubleshooting within 24 hours
18-month warranty on motor and controller, 12-month on accessories
Spare parts availability from regional warehouses (US/EU/Asia)
On-site training (available for customizable support packages)
Lifetime technical support via phone, email, or chat
Packing and Shipping
Packing: Anti-static foam + reinforced plywood/wooden case (with desiccant for moisture-sensitive components)
Standard model lead time: 15-25 days after order confirmation
Custom configuration lead time: 30-45 days (longer for custom chucks or bowls)
Shipping: FOB Shanghai / CIF by sea, air, or rail
Customizable: Export crating, custom labeling, destination port documentation
Frequently Asked Questions
Q1: What is the maximum substrate size this spin coater can handle?
A: Standard R&D models handle up to 150 mm (6") diameter wafers. For large-format applications, we offer customizable chucks up to 450 mm (18") substrates. Square substrates up to 150×150 mm are also supported.
Q2: Can I use this spin coater for non-round substrates (e.g., rectangular or irregular shapes)?
A: Yes. We offer customizable vacuum chucks and mechanical fixtures for square, rectangular, and irregularly shaped substrates. Please provide your substrate dimensions and geometry for custom fixture design.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2007
Total Annual:
2000000-3000000
Employee Number:
150~200
Ecer Certification：
Verified Supplier
Dongguan OSMANUV Machinery Equipment Co., Ltd. was established in 2007 and is headquartered in Dongguan, Guangdong Province, a renowned manufacturing hub within the Guangdong-Hong Kong-Macao Greater Bay Area. We are a high-tech enterprise integrating R&D, production, sales, and af... Dongguan OSMANUV Machinery Equipment Co., Ltd. was established in 2007 and is headquartered in Dongguan, Guangdong Province, a renowned manufacturing hub within the Guangdong-Hong Kong-Macao Greater Bay Area. We are a high-tech enterprise integrating R&D, production, sales, and af...
