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High-Throughput 24-Position Automatic Spin Coating System – For Wafer, Glass, OLED Substrates – Customizable Dispensing
Product Overview
The 24-Station Spin Coater is a high-throughput thin-film coating system designed for uniform deposition of photoresist, polymers, sol-gel, and nanoparticles onto wafers, glass substrates, or discs. Each station can be independently programmed or run in batch mode.
The machine is fully customizable - station arrangement, spin speed profiles, dispensing method, bowl material, and exhaust design - to suit R&D, pilot line, or production environments.
Technical Parameters
Parameter
Standard Value
Customizable Range
Number of stations
24
12 / 16 / 24 / customizable
Max substrate diameter
8 inches (200 mm)
Up to 12 inches (300 mm) customizable
Spin speed range
100 - 8000 RPM
1 - 12000 RPM customizable
Speed accuracy
±1 RPM
±0.5 RPM customizable (closed-loop)
Acceleration range
100 - 20000 RPM/s
Customizable via software
Programmable steps
10 steps per recipe
Customizable (unlimited via PC)
Recipe storage
100 recipes (on HMI)
Customizable (network drive / cloud)
Dispense types
Static, dynamic, line, spiral
Customizable nozzle pattern & timing
Bowl material
Polypropylene (PP)
PTFE / stainless steel / glass customizable
Vacuum chuck type
Single center hole
Multi-zone / edge grip customizable
Exhaust flow rate
60 m³/h per station
Customizable to cleanroom requirements
Power supply
220V / 50Hz (single phase)
110V - 240V, 50/60Hz customizable
Applications
Semiconductor / MEMS - photoresist coating for wafers (2″ to 8″)
Environmental control (temperature / humidity / inert gas purging)
Cleanroom compatibility (Class 10 to Class 100,000 - customizable)
SECS/GEM or RS232 data export for manufacturing execution systems
Support and Services
24-month warranty on electronics, 12 months on motors
Lifetime phone / email / WhatsApp technical support
On-site training and installation (for industrial models)
Spare parts shipped globally within 48 hours
Customization engineering support (CAD drawings + PLC code) included
Packing and Shipping
Packing: Anti-static vacuum bag + foam fixture + reinforced export carton (bench models) or plywood crate (floor models)
Shipping methods: DHL/FedEx (small units), sea freight (FOB/CIF), air cargo
Delivery lead time: 20 - 45 days based on customization level
Frequently Asked Questions
Q: Can all 24 stations run simultaneously at different speeds?
A: Yes and no - In independent motor version (higher cost), yes. In shared-drive version, all run same speed but can have different dispense timing - customizable to your need.
Q: What is the minimum substrate size the chuck can hold?
A: Standard chucks hold 2″ to 8″. For smaller pieces (1 cm × 1 cm), we can customize vacuum chucks with reduced vacuum zones.
Q: Can I use this coater for high-viscosity materials (like SU-8 or thick photoresist)?
A: Yes. We can customize the motor torque and dispense nozzle (larger gauge) for high-viscosity applications.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2007
Total Annual:
2000000-3000000
Employee Number:
150~200
Ecer Certification：
Verified Supplier
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
