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Compact 24-Position Rotary Spin Coater | Customizable Substrate Sizes & Spin Programs for R&D and Pilot Production
Product Overview
This 24-station spin coater is designed for high-throughput thin-film deposition of photoresist, polymers, nanoparticles, and sol-gel materials. Each station operates independently or synchronously. The system supports customizable spin profiles (acceleration, duration, speed) for each station, making it ideal for both R&D and production environments.
Technical Specifications
Parameter
Value / Range
Customization Option
Number of stations
24
✔ Customizable (16/24/32 stations)
Substrate size
Up to 12" wafer or 300×300 mm panel
✔ Customizable chuck size
Spin speed range
100 - 12,000 rpm
✔ Programmable per station
Speed accuracy
±1 rpm
-
Acceleration range
100 - 10,000 rpm/s
✔ Adjustable per recipe
Spin time range
1 - 999 sec / step
✔ Customizable steps
Dispense volume
0.1 - 20 mL per nozzle
✔ Customizable nozzle type
Motor type
Brushless DC servo
-
Coating uniformity
±3% (across 24 stations)
✔ Upgradable to ±1%
Exhaust flow
150 - 500 m³/h
✔ Customizable exhaust interface
Power supply
220V / 50-60 Hz / 3.5 kW
✔ Customizable voltage
Dimensions (L×W×H)
1800×1200×900 mm
✔ Customizable footprint
Weight
520 kg
-
Applications
Semiconductor wafer coating (photoresist)
OLED & perovskite solar cell fabrication
Bio-chip & polymer film preparation
Anti-reflective coating for optics
Nanomaterial deposition (graphene, quantum dots)
R&D multi-condition screening (24 different parameters simultaneously)
Automation level: manual load, semi-auto, full inline integration
Software: customized recipe structure, barcode scanning, data export to MES
Key Features
Individual station control with independent spin motors
Touchscreen with recipe library (up to 999 recipes)
Real-time speed & time monitoring per station
Anti-drip vacuum detection for substrate hold
Automatic solvent dispenser sync
Low vibration and acoustic enclosure
Emergency stop and interlock protection
Customizable exhaust and waste collection tank
Support and Services
Installation and on-site training
18-month standard warranty (extendable)
Remote debugging and IoT support option
Annual calibration and preventive maintenance plan
Spare parts supply for ≥10 years
Custom software development support
Packing and Shipping
Packing: Anti-static vacuum-sealed + plywood export case (shock-proof, moisture-proof)
Shipping method: FOB / CIF by sea, air (express optional for benchtop units)
Lead time: 30-45 working days after order confirmation (customization adds 15 days)
Documents included: User manual, calibration certificate, CE declaration
Frequently Asked Questions
Q1: Can the 24 stations run different spin programs simultaneously?
A: Yes. Each station supports a customizable independent recipe (speed, time, acceleration).
Q2: What substrate sizes can I customize?
A: From 5×5 mm chips to 300×300 mm panels or 12" wafers. Please provide your substrate drawing.
Q3: Is this machine cleanroom compatible?
A: Yes. Class 100 (ISO 5) compatible with optional HEPA/ULPA filter module.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2007
Total Annual:
2000000-3000000
Employee Number:
150~200
Ecer Certification:
Verified Supplier
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...
Company Profile
Dongguan Osmanuv Mechanical Equipment Co., Ltd. is a design, research, development, manufacturing as one of the UV equipment, UV equipment and coating, infrared IR equipment, professional production enterprises, automation equipment, environmental equipmen...