Product Specification

ISO Tees for Vacuum System: Versatile Branching for Medium to Large Vacuum Lines

Product Description

ISO tees for vacuum system are three-port precision fittings designed to split, combine, or redirect gas flow while maintaining high-vacuum integrity from atmospheric pressure down to 10⁻⁹ Torr. Also known as ISO vacuum branch tees or equal tees, these components feature a straight-through main line with a perpendicular branch port, smooth internal geometries, and ISO-K or ISO-F flanges on all three ports.

Manufactured from high-quality 304L or 316L stainless steel, ISO tees are essential for vacuum manifolds, instrumentation ports, gas distribution hubs, and pumping networks in medium to large-scale vacuum systems. They conform to internationally recognized ISO 1609, ISO 2861, and Pneurop 6606 standards. Unlike KF fittings which are limited to smaller diameters (up to DN50), ISO tees are available for nominal diameters from DN63 through DN630, making them the standard choice for industrial and research applications. Whether you are adding a pressure gauge, connecting a residual gas analyzer (RGA), constructing a gas mixing manifold, or branching a pumping line, these tees deliver the conductance, flexibility, and reliability that demanding high-vacuum and UHV applications require.

Key Features & Characteristics

• Configuration: True three-port tee (straight-through main line with perpendicular branch)

• Flange Types: ISO-K (clamp with centering ring) or ISO-F (bolted)

• Port Sizes: All three ports same size (equal tee), or reducing tee with mixed diameters

• Vacuum Range: Atmospheric to 1×10⁻⁹ Torr (UHV compatible with metal seals)

• Nominal Diameters (DN): DN63, DN80, DN100, DN160, DN200, DN250, DN320, DN400, DN500, DN630

• Material: 304L or 316L Stainless Steel (low carbon, UHV compatible)

• Internal Surface Finish: Ra ≤ 0.8 µm (electropolished or mechanically polished)

• Outgassing Rate: < 2×10⁻⁸ Torr·L/s·cm² (after vacuum cleaning)

• Leak Integrity: Helium leak tested to < 1×10⁻⁹ mbar·L/s

• Bakeout Capability: Up to 400°C (ISO-F with metal seals)

• Branch Orientation: 90° perpendicular to main axis (standard)

Applications

• Vacuum manifolds: Multi-port distribution networks for pumping and venting

• Instrumentation ports: Connecting pressure gauges, RGAs, ion gauges, and quadrupoles

• Gas introduction lines: Admitting process gases into deposition chambers

• Large-scale coating systems: Semiconductor, optical, and decorative PVD

• Thin-film deposition: Sputtering, evaporation, and ALD system plumbing

• Helium leak detection: Creating T-branches for test port connections

• Analytical instruments: Mass spectrometers, surface analysis tools

• Semiconductor equipment: Load locks, transfer chambers, and process modules

• R&D vacuum systems: Flexible experimental setups requiring multiple access points

• Space simulation chambers: Thermal vacuum system instrumentation branches

• Research beamlines: Synchrotron and particle accelerator vacuum systems

• Foreline systems: Branching between backing pumps and high-vacuum pumps

Why Choose Our ISO Tees for Vacuum Systems?

We combine precision forging, CNC machining, and orbital welding to deliver ISO tees that meet or exceed international vacuum standards. Every tee is helium leak tested, ultrasonically cleaned with semiconductor-grade detergents, and double-bagged in a cleanroom environment. Reducing tees (different branch diameters), mixed flange types (ISO-K and ISO-F on the same tee), custom branch orientations, and UHV-grade finishes (metal seal ready, Ra ≤ 0.4 µm) are available with engineering support.