Guangdong Zhongda Vacuum Equipment Co., Ltd.
| Delivery Time | 45-60 work days |
| Control System | Full Auto, Semi Auto, Manual |
| Coating Process | Vacuum Evaporation |
| Rotation Stand | 2 Sets |
| Server | openresty |
| Dimensions | Approx. 2000mm x 1500mm x 1800mm |
| Cooling Method | Water Cooling |
| Coating Transparency | High |
| Coating Thickness | Adjustable |
| Chamber Material | Stainless Steel Or Carbon Steel |
| Pumptype | Rotary vane pump + diffusion pump |
| Voltage | 380V, 50Hz or Custom Made |
| Coating Technology | Evaporation |
| Coating Temperature | adjustable |
| Evaporation Power Supply | 1 Set |
| Rotation System | 2 Sets |
| Brand Name | Lion King |
| Certification | CE |
| Place of Origin | Guangdong |
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Product Specification
| Delivery Time | 45-60 work days | Control System | Full Auto, Semi Auto, Manual |
| Coating Process | Vacuum Evaporation | Rotation Stand | 2 Sets |
| Server | openresty | Dimensions | Approx. 2000mm x 1500mm x 1800mm |
| Cooling Method | Water Cooling | Coating Transparency | High |
| Coating Thickness | Adjustable | Chamber Material | Stainless Steel Or Carbon Steel |
| Pumptype | Rotary vane pump + diffusion pump | Voltage | 380V, 50Hz or Custom Made |
| Coating Technology | Evaporation | Coating Temperature | adjustable |
| Evaporation Power Supply | 1 Set | Rotation System | 2 Sets |
| Brand Name | Lion King | Certification | CE |
| Place of Origin | Guangdong | ||
| High Light | small electron beam evaporation machine ，optical coating PVD equipment ，electron gun coating machine | ||
|
Parameter Category |
Details |
|
Substrate Capacity |
Max size: Up to 6-inch (150mm); Compatible with 2"/4"/6" wafers/optical components; Min size: 10×10mm |
|
Vacuum Performance |
Ultimate vacuum: ≤ 1×10⁻⁶ Torr (1.3×10⁻⁴ Pa); Pumping time: mins to 5×10⁻⁶ Torr; Leak rate: ⁻³ Pa·L/s (He leak test) |
|
Evaporation System |
Electron beam power: 250W-10kW; Number of crucibles/pockets: 4-8; Supports rod (max φ4mm) & crucible (1-15cc) feedstock |
|
Process Control |
Substrate temperature: RT-500℃ (±1℃ precision); Rotation speed: 2-20 rpm; Film thickness monitor: QCM (0.01 nm/s resolution) |
|
Film Quality |
Uniformity: ±1%-±3%; Adhesion: Meets ASTM D3359 4B standard; Deposition rate: 0.1-10 nm/s |
|
Compatibility |
Materials: Au, Ag, Pt, W, SiO₂, TiO₂, MgF₂, YF₃, ZrO₂ (supports AR/AF/reflective films) |
|
Physical Dimensions |
Footprint: 1-3.3×3.0m; Height: 2.5-3.5m; Weight: <800kg (desktop/tabletop models) |
|
Power Supply |
Single/Three-phase: 220V/380V, 50/60Hz; Power consumption: 1.2kW-10kW |
1. Compact & Space-Saving Design
◦ Desktop/modular structure with Korvus HEX-800 standard), ideal for laboratory/research settings; easy integration with glove boxes for inert-atmosphere processes.
◦ Lightweight construction () and tool-free module replacement reduce installation & maintenance costs.
1. High-Precision & Reliable Coating
◦ Electron beam focusing technology enables deposition of refractory metals (Pt, W) and dielectric materials with 0.01nm/s thickness control; film uniformity ±1% (industry-leading for small-scale equipment).
◦ Hall ion source + Ar plasma pre-cleaning enhances film adhesion (4B grade) and density, meeting optical component performance requirements (e.g., AR films with >95% transmittance).
1. Versatile & Flexible Process Adaptation
◦ Supports 4-8 crucibles/pockets for multi-material co-evaporation; quick switch between metal, oxide, and organic films (AF/AR/reflective/protective coatings).
◦ Compatible with 2"-6" substrates (wafers, lenses, optical fibers) and customizable fixtures (dome/knudzin/plate) for 2D/3D components.
1. Intelligent & User-Friendly Operation
◦ PLC + touchscreen control system with real-time process monitoring (vacuum level, deposition rate, temperature); pre-programmed process libraries for quick setup.
◦ Energy-efficient cryopump/magnetic suspension molecular pump design reduces power consumption by 30% vs. traditional systems.
1. Cost-Effective for R&D & Small-Batch Production
◦ Low initial investment with high target utilization rate (>70%) and minimal material waste; suitable for prototyping to small-batch manufacturing (up to 10,000 pieces/year).
◦ Multi-functional integration (e-beam evaporation + sputtering optional) eliminates need for multiple devices, lowering total ownership cost.
The core functions of the small electron beam evaporation coating machine revolve around the deposition of high-purity and highly controllable films, which can be specifically classified into the following categories:
Company Details
Business Type:
Manufacturer
Year Established:
2003
Total Annual:
1 million US dollars-2 million US dollars
Employee Number:
80people~100 people
Ecer Certification：
Verified Supplier
Global Supplier of Next-Generation PVD Vacuum Coating Solutions Founded in 2003, Guangdong Zhongda Vacuum Equipment Co., Ltd is a leading mechanical engineering and technology provider specializing in various type of vacuum PVD coating systems such as UV metallizer, sputtering coating machine,... Global Supplier of Next-Generation PVD Vacuum Coating Solutions Founded in 2003, Guangdong Zhongda Vacuum Equipment Co., Ltd is a leading mechanical engineering and technology provider specializing in various type of vacuum PVD coating systems such as UV metallizer, sputtering coating machine,...
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