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Guangdong Zhongda Vacuum Equipment Co., Ltd.

  • China,Zhaoqing ,Guangdong
  • Verified Supplier
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China Compact High-Precision Electron Beam Evaporation Coating Machine for Versatile
China Compact High-Precision Electron Beam Evaporation Coating Machine for Versatile

  1. China Compact High-Precision Electron Beam Evaporation Coating Machine for Versatile

Compact High-Precision Electron Beam Evaporation Coating Machine for Versatile

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Delivery Time 45-60 work days
Control System Full Auto, Semi Auto, Manual
Coating Process Vacuum Evaporation
Rotation Stand 2 Sets
Server openresty
Dimensions Approx. 2000mm x 1500mm x 1800mm
Cooling Method Water Cooling
Coating Transparency High
Coating Thickness Adjustable
Chamber Material Stainless Steel Or Carbon Steel
Pumptype Rotary vane pump + diffusion pump
Voltage 380V, 50Hz or Custom Made
Coating Technology Evaporation
Coating Temperature adjustable
Evaporation Power Supply 1 Set
Rotation System 2 Sets
Brand Name Zhongda
Certification CE
Place of Origin Zhaoqing, Guangdong

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  1. Product Details
  2. Company Details

Product Specification

Delivery Time 45-60 work days Control System Full Auto, Semi Auto, Manual
Coating Process Vacuum Evaporation Rotation Stand 2 Sets
Server openresty Dimensions Approx. 2000mm x 1500mm x 1800mm
Cooling Method Water Cooling Coating Transparency High
Coating Thickness Adjustable Chamber Material Stainless Steel Or Carbon Steel
Pumptype Rotary vane pump + diffusion pump Voltage 380V, 50Hz or Custom Made
Coating Technology Evaporation Coating Temperature adjustable
Evaporation Power Supply 1 Set Rotation System 2 Sets
Brand Name Zhongda Certification CE
Place of Origin Zhaoqing, Guangdong
High Light small electron beam evaporation machineoptical coating PVD equipmentelectron gun coating machine
Small Electron Beam Evaporation Coating Machines
Core Technical Specifications
Parameter Category Details
Substrate Capacity Max size: Up to 6-inch (150mm); Compatible with 2"/4"/6" wafers/optical components; Min size: 10×10mm
Vacuum Performance Ultimate vacuum: ≤ 1×10⁻⁶ Torr (1.3×10⁻⁴ Pa); Pumping time: minutes to 5×10⁻⁶ Torr; Leak rate: 10⁻³ Pa*L/s (He leak test)
Evaporation System Electron beam power: 250W-10kW; Number of crucibles/pockets: 4-8; Supports rod (max φ4mm) & crucible (1-15cc) feedstock
Process Control Substrate temperature: RT-500℃ (±1℃ precision); Rotation speed: 2-20 rpm; Film thickness monitor: QCM (0.01 nm/s resolution)
Film Quality Uniformity: ±1%-±3%; Adhesion: Meets ASTM D3359 4B standard; Deposition rate: 0.1-10 nm/s
Compatibility Materials: Au, Ag, Pt, W, SiO₂, TiO₂, MgF₂, YF₃, ZrO₂ (supports AR/AF/reflective films)
Physical Dimensions Footprint: 1-3.3×3.0m; Height: 2.5-3.5m; Weight: <800kg (desktop/tabletop models)
Power Supply Single/Three-phase: 220V/380V, 50/60Hz; Power consumption: 1.2kW-10kW
Key Advantages
Compact & Space-Saving Design
  • Desktop/modular structure with Korvus HEX-800 standard, ideal for laboratory/research settings
  • Easy integration with glove boxes for inert-atmosphere processes
  • Lightweight construction and tool-free module replacement reduce installation & maintenance costs
High-Precision & Reliable Coating
  • Electron beam focusing technology enables deposition of refractory metals (Pt, W) and dielectric materials
  • 0.01nm/s thickness control with film uniformity ±1% (industry-leading for small-scale equipment)
  • Hall ion source + Ar plasma pre-cleaning enhances film adhesion (4B grade) and density
  • Meets optical component performance requirements (e.g., AR films with >95% transmittance)
Versatile & Flexible Process Adaptation
  • Supports 4-8 crucibles/pockets for multi-material co-evaporation
  • Quick switch between metal, oxide, and organic films (AF/AR/reflective/protective coatings)
  • Compatible with 2"-6" substrates (wafers, lenses, optical fibers)
  • Customizable fixtures (dome/knudzin/plate) for 2D/3D components
Intelligent & User-Friendly Operation
  • PLC + touchscreen control system with real-time process monitoring
  • Pre-programmed process libraries for quick setup
  • Energy-efficient cryopump/magnetic suspension molecular pump design reduces power consumption by 30% vs. traditional systems
Cost-Effective for R&D & Small-Batch Production
  • Low initial investment with high target utilization rate (>70%) and minimal material waste
  • Suitable for prototyping to small-batch manufacturing (up to 10,000 pieces/year)
  • Multi-functional integration (e-beam evaporation + sputtering optional) eliminates need for multiple devices
Core Functions
Precise Heating and Evaporation
  • High-energy electron beams bombard target material surfaces, heating to molten or evaporated state
  • Concentrated energy and high thermal efficiency enable evaporation of refractory materials (tungsten, molybdenum, titanium, SiO₂, TiO₂)
  • Avoids contamination of target material by heating source
  • Supports multi-target material switching (2-6 crucible positions) for continuous deposition of single-layer and multi-layer films
Precise Film Thickness Control
  • Built-in quartz crystal film thickness monitor for real-time deposition rate and thickness monitoring
  • Control accuracy to nanometer level (±0.1nm) for ultra-thin functional films
  • Programmable control system with preset deposition parameters (electron beam power, vacuum degree, deposition rate)
  • Automated coating ensures batch film layer consistency
High Vacuum Environment Guarantee
  • Mechanical pump + molecular pump vacuum unit reduces cavity to 10⁻⁴~10⁻⁶ Pa high vacuum environment
  • Reduces gas molecule scattering and contamination of evaporated particles
  • Ensures film layers have high purity, good density and strong adhesion
Small-Sized Workpiece Adaptation
  • Designed specifically for small workpieces with rotary workpiece table
  • Improves coating layer uniformity across substrates
  • Suitable for substrates ranging from millimeters to tens of millimeters (wafers, optical lenses, chips, sensor components)
  • Supports coating of surface mount, sheet, and small parts

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer

  • Year Established:

    2003

  • Total Annual:

    1 million US dollars-2 million US dollars

  • Employee Number:

    80people~100 people

  • Ecer Certification:

    Verified Supplier

Global Supplier of Next-Generation PVD Vacuum Coating Solutions Founded in 2003, Guangdong  Zhongda Vacuum Equipment Co., Ltd is a leading mechanical engineering and technology provider specializing in various type of vacuum PVD coating systems such as UV metallizer, sputtering coating machine,... Global Supplier of Next-Generation PVD Vacuum Coating Solutions Founded in 2003, Guangdong  Zhongda Vacuum Equipment Co., Ltd is a leading mechanical engineering and technology provider specializing in various type of vacuum PVD coating systems such as UV metallizer, sputtering coating machine,...

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  • Guangdong Zhongda Vacuum Equipment Co., Ltd.
  • Lantang South road, Duanzhou Area, Zhaoqing city, Guangdong 526060 China
  • https://www.vacuum-coatingmachines.com/

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