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{"title":"High-precision electron beam evaporation coating machine pvd coating equipment","imgUrl":"https:\/\/img.chinax.com\/nimg\/04\/a4\/cfd613073a5990a17cfa12d7eea2-200x200-1\/high_precision_electron_beam_evaporation_coating_machine_pvd_coating_equipment.jpg","attrs":{"Brand Name":"Lion King","Certification":"CE","Place of Origin":"Guangdong","Minimum Order Quantity":"1"}}
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{"title":"Optical Lenses Coating Machinery Electron Beam Vacuum Coaters for Metal Lens","imgUrl":"https:\/\/img.chinax.com\/nimg\/c1\/a1\/2c03abb90c23bc95615ee0e990fb-200x200-1\/optical_lenses_coating_machinery_electron_beam_vacuum_coaters_for_metal_lens_coating.jpg","attrs":{"Brand Name":"Lion King","Certification":"CE","Place of Origin":"Guangdong","Minimum Order Quantity":"1"}}
{"title":"Small electron beam evaporation coating machines for Optical coating pvd coating","imgUrl":"https:\/\/img.chinax.com\/nimg\/55\/48\/04febb8d1213bace72054e026c91-200x200-1\/small_electron_beam_evaporation_coating_machines_for_optical_coating_pvd_coating_equipment.jpg","attrs":{"Brand Name":"Lion King","Certification":"CE","Place of Origin":"Guangdong","Minimum Order Quantity":"1"}}
Annular electron gun system: annular filament (cathode), anode, focusing coil, deflection coil; The annular cathode emits hot electrons, which are accelerated by the electric field and focused and deflector by the magnetic field, precisely bombarding the material inside the crucible.
Vacuum system: vacuum chamber, mechanical pump, molecular pump/cryogenic pump. The ultimate vacuum usually reaches 10⁻⁴ to 10⁻⁶ Pa, reducing gas-phase collision and contamination.
Evaporation source and crucible: Water-cooled copper crucible to prevent evaporation and reaction of crucible materials and enhance the purity of the film layer; It supports multi-station switching and multi-layer film deposition.
Substrate stage: It can be heated/cooled by water, and can rotate around the sun/on its own axis to ensure uniform film thickness.
Control system: High-voltage power supply, beam control, film thickness monitoring (crystal oscillator), vacuum gauge and automation program, achieving closed-loop control of parameters.
Ii. Working Principle
Electron beam generation and acceleration: When a toroidal filament is electrified, it emits hot electrons, which are accelerated by a 5-10 kV high-voltage electric field to achieve high energy.
Focusing and deflection: The electromagnetic coil focuses and deflates the electron beam onto the surface of the target material inside the crucible, with an energy density that can reach 10⁶ to 10⁷ W/cm².
Evaporation and deposition: The kinetic energy of the electron beam is converted into thermal energy, and the target material rapidly heats up to the evaporation point and vaporizes. Gas-phase atoms/molecules are transported in a straight line to the substrate under high vacuum and condense to form a uniform film.
Process control: Real-time monitoring of deposition rate and film thickness, dynamic adjustment of beam current and power to ensure process stability.
Iii. Core Features
High energy density: The local temperature can reach 3000-6000℃, and it can evaporate high-melting-point materials such as tungsten, molybdenum and SiO₂.
Extremely low pollution: Water-cooled crucibles reduce crucible pollution, and the purity of the film layer can reach over 99.99%.
Efficiency and rate: High thermal efficiency, deposition rate 0.1-100 nm/s, balancing efficiency and film quality.
Flexible process: Multi-crucible switching supports multi-layer films. Substrate heating/rotation enhances the compactness and adhesion of the film layer.
Iv. Advantages
Wide material adaptability: Compatible with metals, alloys, oxides, semiconductors, etc., especially suitable for refractory materials.
The film layer quality is excellent: high purity, good density and strong adhesion, meeting the requirements of high-precision optical and electronic devices.
Cost-effectiveness: High material utilization rate, energy consumption concentrated on target materials, and lower long-term operating costs.
High degree of automation: Parameters are precisely controllable with good repeatability, making it suitable for both scientific research and mass production.
V. Typical Applications
Optical films: anti-reflection films (AR), high-reflection films, filters, beam splitters, used in glasses, cameras, laser devices, photovoltaic cells.
Semiconductors and Microelectronics: Metal electrodes (Al, Cu), dielectric layers (SiO₂, Si₃N₄), sensor films.
Functional coatings: decorative films, conductive films (ITO), corrosion-resistant/wear-resistant coatings, applied in aerospace, tools and consumer electronics.
Scientific research and small-scale production: Material preparation for universities and research institutes, as well as customized films for MEMS, biomedical devices, etc.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2003
Total Annual:
1 million US dollars-2 million US dollars
Employee Number:
80people~100 people
Ecer Certification：
Verified Supplier
Global Supplier of Next-Generation PVD Vacuum Coating Solutions
Founded in 2003, Guangdong Zhongda Vacuum Equipment Co., Ltd is a leading mechanical engineering and technology provider specializing in various type of vacuum PVD coating systems such as UV metallizer, sputtering coating machine,... Global Supplier of Next-Generation PVD Vacuum Coating Solutions
Founded in 2003, Guangdong Zhongda Vacuum Equipment Co., Ltd is a leading mechanical engineering and technology provider specializing in various type of vacuum PVD coating systems such as UV metallizer, sputtering coating machine,...
