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Magnetron sputtering is a versatile Physical Vapor Deposition (PVD) technique widely used for depositing high-quality thin films on various substrates. It operates by ionizing a noble gas (e.g., argon) in a high-vacuum chamber (pressure < 10⁻³ Torr), creating plasma. Energetic ions from the plasma bombard a target material, ejecting atoms that then deposit onto the substrate as a uniform, adherent film. This method is particularly suited for metals, alloys, ceramics, and compound materials, offering precise control over film composition and thickness.
Working Principle
Plasma Generation: A high-voltage electric field ionizes argon gas, producing Ar⁺ ions and electrons.
Magnetic Confinement: A magnetic field (orthogonal to the electric field) traps electrons near the target surface, enhancing ionization efficiency and plasma density.
Sputtering Process: Accelerated Ar⁺ ions strike the target, dislodging atoms that travel to the substrate and form a thin film. The magnetic field minimizes electron bombardment of the substrate, reducing heat damage .
Key Advantages
Uniformity & Adhesion: Produces films with exceptional thickness uniformity (±5%) and strong substrate adhesion due to high-energy ion bombardment .
Material Versatility: Compatible with metals (e.g., Ti, Cu), ceramics (e.g., SiO₂, Al₂O₃), and semiconductors.
Low-Temperature Deposition: Suitable for heat-sensitive materials like plastics and polymers.
Process Control: Enables precise tuning of film properties (e.g., conductivity, hardness) via plasma parameters.
Multi-Component Coatings: Supports co-sputtering of multiple targets for alloy or gradient-layer production .
Applied Industries
Electronics: IC packaging, display panels, and photovoltaic cells.
Optics: Anti-reflective coatings, mirrors, and optical filters.
Tooling: Wear-resistant coatings for cutting tools and molds.
Automotive: Decorative and corrosion-resistant finishes on trim and components.
Medical: Biocompatible coatings for implants and instruments .
Coating Effects & Colors
Surface Finishes: Metallic luster, matte textures, or textured patterns.
Color Range: Silver, gold, black, blue, and custom hues via reactive sputtering (e.g., TiN for gold-like finishes).
Structure Types
Planar Magnetron: Ideal for large-area deposition (e.g., glass or panels).
Rotary Magnetron: Enhances target utilization and deposition rate for cylindrical or curved substrates.
Unbalanced Magnetron: Generates plasma with high ion density for dense, adherent films.
Substrate Materials
Plastics (ABS, PET, PC), glass, ceramics, metals, and composites.
Coating Materials
Metals: Ti, Cr, Ag, Al, Cu, Au.
Ceramics: SiO₂, Al₂O₃, TiO₂, Si₃N₄.
Alloys: NiCr, TiAl, and superalloys.
Supporting Production Lines
Integrates with post-coating processes like UV curing or plasma treatment for enhanced functionality.
Consumables
Target materials (metallic/ceramic), argon gas, and sputtering power supplies.
Applications
Optics: High-reflectivity mirrors and anti-glare coatings.
Electronics: Transparent conductive oxides (ITO) for touchscreens.
Aerospace: Thermal barrier coatings on turbine blades.
Architectural Glass: Low-emissivity (low-E) coatings for energy efficiency.
Customization
Our systems offer modular designs with configurable magnetron arrays, vacuum pumping systems, and process control software to meet specific deposition requirements.
Magnetron Coating Equipment Model (Height ≤ 1.3m)
Model
Lion-0710
Lion-1012
Lion-1212
Lion-1412
Lion-1612
Lion-1813
Vacuum chamber
Ф700×H1000mm
Ф1000×H1200mm
Ф1200×H1200mm
Ф1400×H1200mm
Ф1600×H1200mm
Ф1800×H1300mm
Application
watch industry, 3C industry, sanitary appliance industry, jewelry industry
watch accessories, cell phone accessories, glasses frame, clothes, decorative lighting,sanitary ware, hardware suitcase, glass, ceramic and plastic, etc.
Coating Film
Ti-Gold, Rose Gold, Champagne Gold, Japanese Gold, Bright Silver, Rainbow, Jewelry Blue, Rose Red, Black, etc.
Vacuum
Vertical door structure, equip with air pumping system and water cooling system
or Molecule Pump(specific model according to customers' requirements)
Vacuum
1 set pirani, 1 set cold cathode, 1 set diaphragm gauge
Supply Type
DC power, MF power, pulse power(bias power, arc power)
Ultimate
1.0- 6.0×10-4Pa, Non-loading cooling
Bias Power
20KW/1 set
20KW/1 set
20KW/1 set
30KW/1 set
40KW/1 set
60KW/1 set
Magnetron Power Supply
1-2 set
1-2 set
2-3 set
2-3 set
3-4 set
3-4 set
Rotation
Multi-axis planetary with frequency control(can be controlled and adjusted)
Baking
Temperature
Normal temperature～300℃ to 450℃～600℃ can be controlled and adjusted(PID temperature control)
Gas
3 or 4 ways working gas flow control and display system matched with auto gas adding system
Ar, N2, O2, C2H2,etc.
Cooling
Method
Water cooling circulation, equip with industrial cooling tower or industrial water chiller(refrigerating machine) ,or cryogenic system.(customers provide)
Controlling
Manual, half-auto, auto, touch screen operation, PLC or computer controlled
Air Pressure
0.5-0.8MPa
Water
≤25℃ ≥0.2MPa
Warning
Alarming system will work when hydropenia, over-voltage, circuit break such abnormal situation happens and carry out related protect
Total Power
25~65KW
45~85KW
65~105KW
85~115KW
95~125KW
100~130KW
Output
Voltage 380V,Frequency 50Hz(equip as customers' national electricity standard)
Occupation
15~50m²
15~50m²
25~55m²
25~55m²
35~55m²
35~55m²
Remark
Design and produce special machine according to customers' require, can add magnetron sputtering target,MF twins target,etc.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer
Year Established:
2003
Total Annual:
9 million US dollars-15 million US dollars
Employee Number:
200 people~300 peopl
Ecer Certification：
Verified Supplier
Global Supplier of Next-Generation PVD Vacuum Coating Solutions
Founded in 2003, Lion King is a leading mechanical engineering and technology provider specializing in the R&D, manufacturing, and integration of PVD vacuum coating systems and UV coating solutions. As a trusted partner to clients i... Global Supplier of Next-Generation PVD Vacuum Coating Solutions
Founded in 2003, Lion King is a leading mechanical engineering and technology provider specializing in the R&D, manufacturing, and integration of PVD vacuum coating systems and UV coating solutions. As a trusted partner to clients i...
