High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection

MOQ： 1PCS
Price： $102-$210
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Payment Terms	T/T
Supply Ability	Negotiable
Delivery Time	1-5pcs ,5 days . >20pcs ,To be negotiated
Packaging Details	Carton packaging etc.
Weight	65g
Length	81mm
Voltage	8.4V
Product Model	VARS0120-020-00A
Peak force	1.2N-m
Total stroke	20°
Type	Micro Motor
Housing Material	Aluminum
Motion Type	Rotary
Brand Name	SUPT MOTION
Model Number	VARS series
Certification	ISO9001-2000
Place of Origin	China,Suzhou

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Product Details
Company Details

Product Specification


Payment Terms	T/T	Supply Ability	Negotiable
Delivery Time	1-5pcs ,5 days . >20pcs ,To be negotiated	Packaging Details	Carton packaging etc.
Weight	65g	Length	81mm
Voltage	8.4V	Product Model	VARS0120-020-00A
Peak force	1.2N-m	Total stroke	20°
Type	Micro Motor	Housing Material	Aluminum
Motion Type	Rotary	Brand Name	SUPT MOTION
Model Number	VARS series	Certification	ISO9001-2000
Place of Origin	China,Suzhou
High Light	High-precision rotary voice coil motor ，Semiconductor wafer inspection motor ，Rotary voice coil motor with warranty

Product Description:

High-precision vacuum radiation-resistant rotary voice coil motor, specifically designed for the harsh environment of semiconductor wafer inspection, can operate stably under a vacuum of 10⁻⁶ Pa and strong radiation. The motor uses special radiation-resistant insulation materials, with windings free of organic volatiles to avoid contaminating the wafer surface. It supports continuous rotation at multiple angles and precise angle positioning, used for driving inspection probes to adjust orientation. The non-contact rotation structure ensures no wear and no particle generation, meeting the cleanroom requirements of the semiconductor industry. Torque output is smooth, positioning accuracy reaches ±0.08°, and response speed is fast, making it suitable for wafer defect inspection, dimensional measurement, and other equipment to improve inspection efficiency and data accuracy, supporting the automation upgrade of semiconductor production lines.

Features:

Product Name: Rotary Voice Coil Motor
Weight: 65g
Size: 81*73.4*32mm
Name: Rotary Voice Coil Motor
Stroke: 20°
Life: 10000h
Vacuum level: 10⁻⁶ Pa
Radiation tolerance: ≥10⁵ Gy
Positioning accuracy: ±0.08°
Torque range: 1.2 N·m
Rotation speed: 100-800 r/min
Protection rating: IP67 (vacuum sealed)
Special Feature: Curved Voice Coil Motor, Rotating VCM, Rotary Voice Coil Motor

Technical Parameters:

Parameters	Details
Type	Rotary Voice Coil Motor (Rotary VCM, Rotary voice coil Actuator)
Warranty	1 Year
Stroke	20°
Peak torque	1.2N-m
Noise	Low
Size	8173.432mm
Length	81mm
Speed	High
Weight	65g
Voltage	8.4V

Product Model	Peak torque (N-m)	Continuos torque at 25℃(N-m)	Total Stroke degrees ( degree)	Max Voltage (V)	Back EMF Constant (V/m/s)	Weight of the coil(g)	Length (mm)	Width (mm)	Height (mm)
VARS0008-026-00A	0.08	0.05	26	6.4	0.05	11.7	35	39.8	36.1
VARS0017-090-00A	0.17	0.1	90	11.1	0.1	17.8	70	41.5	39
VARS0022-032-00A	0.22	0.12	32	15.5	0.16	21.5	60	60	36
VARS0042-040-00A	0.42	0.38	40	3.5	0.12	38	82	53.6	30.3
VARS0077-020-00A	0.77	0.63	20	6.7	0.24	66	75	50	30
VARS0084-030-00A	0.84	0.6	30	6.3	0.2	50.4	75	48.9	30.6
VARS0120-020-00A	1.2	0.5	20	8.4	0.67	65	81	73.4	32
VARS0350-060-00A	3.5	1.6	60	26.3	0.4	350	∮169.6	∮169.6	63
VARS0706-014-00A	7.1	2.1	14	52.4	1.03	225.5	115	65	54.5
VARS4520-030-00A	45.2	19	30	71.5	4.3	1350	∮240		78

Applications:

In wafer defect inspection and chip packaging processes, rotary voice coil motors, with angular positioning accuracy within ±0.1°, drive inspection probes to perform high-frequency, small-amplitude rotational scans across the wafer surface. Its design without mechanical transmission structures eliminates backlash errors, and combined with millisecond-level response speed, it can precisely capture the fine details of chip circuitry, achieving nanometer-level defect detection and providing core support for yield control in semiconductor manufacturing.

Company Details

Bronze Gleitlager

Bronze Sleeve Bushings

and

Graphite Plugged Bushings

from Quality China Factory



Business Type:

Manufacturer,Trading Company 


Year Established:

2005 


Total Annual:

40-80


Employee Number:

30~60 


Ecer Certification：

Verified Supplier 

Suzhou Unite Precision Machinery Technology Co., Ltd.(Supt Motion) is a high-tech enterprise specializing in the design, manufacturing, and sales of voice coil actuator, linear motors, and precision linear motion platforms. The company produces high-quality and high-performance voice coil actuator, ... Suzhou Unite Precision Machinery Technology Co., Ltd.(Supt Motion) is a high-tech enterprise specializing in the design, manufacturing, and sales of voice coil actuator, linear motors, and precision linear motion platforms. The company produces high-quality and high-performance voice coil actuator, ...

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