China factories

Chat Now Send Email
China factory - Suzhou Unite Precision Technology Co., Ltd.

Suzhou Unite Precision Technology Co., Ltd.

  • China,Suzhou ,Jiangsu
  • Verified Supplier
  1. Home
  2. Products
  3. About Us
  4. Contact Us

Leave a Message

we will call you back quickly!

Submit Requirement
China High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measuremen
China High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measuremen

  1. China High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measuremen
  2. China High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measuremen
  3. China High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measuremen

High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measuremen

  1. MOQ: 1PCS
  2. Price: $112-$190
  3. Get Latest Price
Payment Terms T/T
Supply Ability To be negotiated
Delivery Time 1-5pcs ,5 days . >20pcs ,To be negotiated
Packaging Details Customized packaging etc.
Protect Feature Totally Enclosed
Application Automatic Product
Voltage 3.5V
Peak Thrust 0.42N-m
Size 82*53.6*30.3mm
Stroke 40°
Material Aluminum Alloy
Actuation Method Voice Coil
Warranty 3months-1year
Rated Speed 100RPM
Back EMF Constant(L-L)(Kb) 0.12
Weight of the coil(g) 38
Brand Name SUPT MOTION
Model Number VARS0042-040-00A
Certification CE, ISO9001
Place of Origin China,Suzhou

View Detail Information

Inquiry by Email Get Latest Price
Chat online Now Ask for best deal
  1. Product Details
  2. Company Details

Product Specification

Payment Terms T/T Supply Ability To be negotiated
Delivery Time 1-5pcs ,5 days . >20pcs ,To be negotiated Packaging Details Customized packaging etc.
Protect Feature Totally Enclosed Application Automatic Product
Voltage 3.5V Peak Thrust 0.42N-m
Size 82*53.6*30.3mm Stroke 40°
Material Aluminum Alloy Actuation Method Voice Coil
Warranty 3months-1year Rated Speed 100RPM
Back EMF Constant(L-L)(Kb) 0.12 Weight of the coil(g) 38
Brand Name SUPT MOTION Model Number VARS0042-040-00A
Certification CE, ISO9001 Place of Origin China,Suzhou
High Light high precision rotary voice coil motormicro voice coil motor for wafer inspectionrotary voice coil motor with warranty

Product Description:

In wafer inspection and metrology equipment, the rotary voice coil motor is the core driving component for achieving precise scanning inspection. Leveraging its high bandwidth and high-precision direct-drive characteristics, it can drive inspection probes or optical lenses to perform high-frequency, small-angle rotational scans around the wafer surface. Coupled with algorithm optimization from specialized motion controllers, this enables nanometer-level defect identification and accurate measurement. The rotary voice coil motor's design without mechanical transmission eliminates backlash errors, effectively suppresses vibration interference, and ensures the precise capture of nanoscale defects during wafer defect inspection and circuit pattern scanning. It also meets the rotational movement requirements of three-degree-of-freedom wafer adjustment platforms, enabling fine angular adjustments along the θx/θy axes, providing reliable support for yield control in semiconductor manufacturing processes.

Features:

Light weight of actuator coil, short response time and high frequency.

Product types: rotary voice coil motors, oscillating voice coil motors, arc-shaped voice coil motors.
Positioning accuracy: ±0.08°
Torque range: 0.42 N·m
Rotational speed: 100-800 r/min
 

Product Parameters:

Product Model
Peak torque
(N-m)
Continuos torque
at 25℃(N-m)

Total Stroke
degrees 

(degree)

Max Voltage
(V)
Back EMF Constant
(V/m/s)
Weight of the coil(g) Length
(mm)
Width
(mm)
Height
(mm)
VARS0008-026-00A 0.08 0.05 26 6.4 0.05 11.7 35 39.8 36.1
VARS0017-090-00A 0.17 0.1 90 11.1 0.1 17.8 70 41.5 39
VARS0022-032-00A 0.22 0.12 32 15.5 0.16 21.5 60 60 36
VARS0042-040-00A 0.42 0.38 40 3.5 0.12 38 82 53.6 30.3
VARS0077-020-00A 0.77 0.63 20 6.7 0.24 66 75 50 30
VARS0084-030-00A 0.84 0.6 30 6.3 0.2 50.4 75 48.9 30.6
VARS0120-020-00A 1.2 0.5 20 8.4 0.67 65 81 73.4 32
VARS0350-060-00A 3.5 1.6 60 26.3 0.4 350 ∮169.6 ∮169.6 63
VARS0706-014-00A 7.1 2.1 14 52.4 1.03 225.5 115 65 54.5
VARS4520-030-00A 45.2 19 30 71.5 4.3 1350 ∮240   78

Application:

The main application of a voice coil motor:
1.Semiconductor industry:Wiring, cutting, drilling, transportation systems, welding,robotics.

2.Valve operation in the field:Type metering valves, pressure test systems, pneumatic valve chemistry injection system.

3.Micro Machine industry:Feed systems, micro drilling, precision stamping.
4.Vibration System:Shaking table, vibration platform.
5.Medical field:Micro-injection system, respiratory equipment, testing equipment.
6.Aviation Technology:Flight control system, pilot feedback system.
7.Commercial use field:Computer cooling pump miniature camera auto focus system.
8.Automation industry:Laser equipment,dispenser, test equipment, textile machinery.

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer,Trading Company

  • Year Established:

    2005

  • Total Annual:

    40-80

  • Employee Number:

    30~60

  • Ecer Certification:

    Verified Supplier

Suzhou Unite Precision Machinery Technology Co., Ltd.(Supt Motion) is a high-tech enterprise specializing in the design, manufacturing, and sales of voice coil actuator, linear motors, and precision linear motion platforms. The company produces high-quality and high-performance voice coil actuator, ... Suzhou Unite Precision Machinery Technology Co., Ltd.(Supt Motion) is a high-tech enterprise specializing in the design, manufacturing, and sales of voice coil actuator, linear motors, and precision linear motion platforms. The company produces high-quality and high-performance voice coil actuator, ...

+ Read More

Get in touch with us

  • Reach Us
  • Suzhou Unite Precision Technology Co., Ltd.
  • No5,Building,No.413,Mudong Road,Mudu Town,Wuzhong District,Suzhou City Jiangsu Province
  • https://www.vcm-motor.com/

Leave a Message, we will call you back quickly!

Email

Check your email

Phone Number

Check your phone number

Requirement Details

Your message must be between 20-3,000 characters!

Submit Requirement