Flat / Rotating AlSc Aluminum Scandium Sputtering Target

Product Specification

The aluminum-scandium target is a high-performance sputtering target synthesized from aluminum and scandium metals in specific ratios. It combines the light weight, excellent electrical and thermal conductivity of aluminum with the rare-earth reinforcement, grain refinement, and high-temperature stability of scandium. It is typically produced using processes such as vacuum melting, powder metallurgy, and hot isostatic pressing. The finished product features a dense structure, uniform composition, and low impurity content, making it an ideal choice for high-end thin film deposition, semiconductor, and display panel manufacturing.

Core Advantages of Aluminum-Scandium Target

l High Strength and Light Weight

The addition of scandium in the aluminum-scandium alloy significantly inhibits grain growth, forming fine-grained structures that enhance the strength, toughness, and fatigue resistance of the material. At the same time, the low density of aluminum makes the aluminum-scandium target both strong and lightweight.

l Good Thermal Stability

The high melting point of scandium provides excellent high-temperature stability to the alloy. Aluminum-scandium alloy targets are resistant to chemical reactions or performance degradation in high-temperature environments, maintaining good physical and chemical properties.

l Excellent Conductivity

The aluminum-scandium alloy film has low resistivity, forming efficient current channels in devices. While its conductivity is slightly lower than pure aluminum, it maintains a superior electrical profile, ensuring high-fidelity performance in semiconductor and electronic applications.

l Strong Corrosion Resistance

The corrosion resistance of aluminum-scandium alloys is attributed to the oxide layer formed on the surface of aluminum and the high chemical stability of scandium. This allows the alloy to perform excellently in chemically corrosive environments.

Good Piezoelectric Properties: When aluminum-scandium targets are used to prepare Sc-doped AlN films, their piezoelectric properties are significantly enhanced. For example, doping 35 at% Sc into AlN can increase its piezoelectric performance (Keff²) to 15.5%, which is 2.6 times higher than pure AlN (Keff2 of 6%).

Main Application Areas of Aluminum-Scandium Target

l Aerospace Industry

It can be used to manufacture aircraft wings, fuselages, engine components, and more, significantly reducing the overall weight of the aircraft and improving fuel efficiency and flight performance. In satellite structures, aluminum-scandium alloy films enhance the satellite's radiation and corrosion resistance in the harsh environment of outer space.

l Electronics Industry

In semiconductor manufacturing, aluminum-scandium targets are used with technologies like magnetron sputtering to form uniform and dense thin films on semiconductor substrates. These films can be used in the production of integrated circuits and storage devices. In optical and mobile communication devices, films deposited from aluminum-scandium targets are used in key components like RF filters and optical isolators.

l Optical and Optoelectronic Fields

Aluminum-scandium targets can generate optical films with high reflectivity and corrosion resistance through sputtering; used in high-end mirrors, filters, laser equipment, etc.. In fiber-optic communication, aluminum-scandium films are used as cladding materials, effectively enhancing the durability and damage resistance of optical fibers.

l Energy Industry

In solar cells, aluminum-scandium target films can be used as electrode materials to reduce film resistivity and improve electrode conductivity, thus increasing the energy output of the solar cell. In electrochemical batteries, aluminum-scandium films enhance electrode stability and corrosion resistance, extending the lifespan of the battery.

l Medical Field

Films generated from aluminum-scandium targets have excellent bio-compatibility and corrosion resistance, making them suitable for the surfaces of medical implants, such as orthopedic implants and cardiovascular stents. They effectively enhance the wear resistance of implants, prolong their service life, and reduce the risk of secondary surgeries.