Shenzhen APG Material Company Limited
| Packaging Details | Vacuum-sealed packaging, case-packed for storage and transport |
| Delivery Time | 4-5 weeks |
| Payment Terms | T/T |
| Supply Ability | Stable supply |
| Name | Zirconium Target (Zr) |
| Purity | 99.9% |
| Density | 6.52 g/cm³ |
| Forming Process | Sintering |
| Product Specifications | Flat target, Rotating target |
| Application Fields | Semiconductor Manufacturing, Optical Device Manufacturing, Hard Coatings, Nuclear Industry |
| Brand Name | APG |
| Place of Origin | china |
| Certification | ISO9001、ISO14001、ISO45001、IAFT16949 |
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Product Specification
| Packaging Details | Vacuum-sealed packaging, case-packed for storage and transport | Delivery Time | 4-5 weeks |
| Payment Terms | T/T | Supply Ability | Stable supply |
| Name | Zirconium Target (Zr) | Purity | 99.9% |
| Density | 6.52 g/cm³ | Forming Process | Sintering |
| Product Specifications | Flat target, Rotating target | Application Fields | Semiconductor Manufacturing, Optical Device Manufacturing, Hard Coatings, Nuclear Industry |
| Brand Name | APG | Place of Origin | china |
| Certification | ISO9001、ISO14001、ISO45001、IAFT16949 | ||
| High Light | Zirconium Sputtering Target Material ，High Purity Sputtering Target Material ，Zr Zirconium Sputtering Target | ||
Zirconium targets are sputtering targets processed from high-purity zirconium (Zr) metal. They feature low hydrogen absorption, a high melting point (1855℃), excellent corrosion resistance, and good thermal conductivity. They are widely used in semiconductors, optical coatings, and functional coatings. Due to zirconium’s excellent physical and chemical properties and strong affinity for oxygen, it can stably form high-quality films in vacuum sputtering environments.
l Typically 99.5% – 99.9% purity, ensuring stable electrical and optical performance of the films.
l Melting point around 1855℃, maintaining stability under high-temperature processing conditions.
l Excellent Corrosion Resistance:Strong resistance to acids, alkalis, salts, and most chemical media, suitable for harsh environments.
l Low Neutron Absorption Cross-section:Important in the nuclear industry, especially for reactor components and their coatings.
l Strong Oxygen Affinity:Easily combines with oxygen during sputtering to produce high-quality zirconium oxide (ZrO₂) films, used in optical coatings, insulating layers, and other applications.
Applications of Zirconium Targets
l Semiconductor Manufacturing
Used to produce barrier layers, dielectric layers, or electrode materials, enhancing device performance and stability.
l Optical Device Manufacturing
Used to produce high-refractive-index films, such as optical filters and anti-reflection coatings.
l Hard Coatings
Often combined with nitrides (ZrN) to produce wear-resistant and corrosion-resistant coatings, used for tool coatings and decorative coatings.
l Nuclear Industry
Due to zirconium’s low neutron absorption, zirconium materials and their films have special applications in nuclear reactor components.
Company Details
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Shenzhen APG Material Company Limited (APG), headquartered in Shenzhen, China, currently operates three factories located in Shenzhen, Changzhou, and Changsha, and employs more than 200 people. APG specializes in the research and development (R&D) and production of PVD materials (sputtering targ... Shenzhen APG Material Company Limited (APG), headquartered in Shenzhen, China, currently operates three factories located in Shenzhen, Changzhou, and Changsha, and employs more than 200 people. APG specializes in the research and development (R&D) and production of PVD materials (sputtering targ...
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