SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Delivery Time | 2-4 Weeks |
| Material | Single Crystal Silicon / Polycrystalline Silicon |
| Purity | ≥ 99.999% (5N) |
| Maximum Diameter | Up to 480 mm |
| Thickness | Custom (5–30 mm typical) |
| Resistivity (Low) | < 0.02 Ω·cm |
| Resistivity Uniformity | < 5% (RRG) |
| Surface Finish | Polished / Lapped / Ground |
| Brand Name | ZMSH |
| Place of Origin | SHANGHAI,CHINA |
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Product Specification
| Payment Terms | T/T | Delivery Time | 2-4 Weeks |
| Material | Single Crystal Silicon / Polycrystalline Silicon | Purity | ≥ 99.999% (5N) |
| Maximum Diameter | Up to 480 mm | Thickness | Custom (5–30 mm typical) |
| Resistivity (Low) | < 0.02 Ω·cm | Resistivity Uniformity | < 5% (RRG) |
| Surface Finish | Polished / Lapped / Ground | Brand Name | ZMSH |
| Place of Origin | SHANGHAI,CHINA | ||
| High Light | Single Crystal Silicon Silicon Ring ，Polycrystalline Silicon Si Ring ，Plasma Etching Semiconductor Silicon Ring | ||
The Precision Silicon Ring (Si Ring) is a semiconductor-grade consumable component used in plasma etching, deposition, and wafer processing equipment. It functions as a focus ring, edge ring, or chamber liner ring, helping to control plasma distribution, improve etching uniformity, and protect chamber hardware from direct ion bombardment.
Manufactured from high-purity single crystal silicon or polycrystalline silicon, the ring offers excellent compatibility with silicon wafer processes. This intrinsic material matching reduces contamination risk and ensures stable process performance in semiconductor fabrication environments.
In semiconductor plasma systems (ICP, RIE, PECVD, CVD), silicon rings are exposed to:
Under these harsh conditions, silicon rings gradually undergo controlled erosion, which is why they are classified as critical consumable components in semiconductor manufacturing.
Their primary roles include:
Silicon rings are naturally compatible with silicon wafer processing environments, minimizing cross-contamination and supporting high-yield production.
Compared with SiC alternatives, silicon rings offer:
High-purity silicon ensures consistent electrical and material behavior during plasma exposure, supporting stable process conditions.
Available in:
Manufactured with strict tolerances to ensure:
| Parameter | Specification |
|---|---|
| Material | Single Crystal Silicon / Polycrystalline Silicon |
| Purity | ≥ 99.999% (5N) |
| Maximum Diameter | Up to 480 mm |
| Thickness | Custom (5–30 mm typical) |
| Resistivity (Low) | < 0.02 Ω·cm |
| Resistivity (Medium) | 1 – 4 Ω·cm |
| Resistivity (High) | 70 – 90 Ω·cm |
| Resistivity Uniformity | < 5% (RRG) |
| Surface Finish | Polished / Lapped / Ground |
| Surface Roughness | Ra ≤ 0.8 μm (polished lower) |
| Machining Precision | < 10 μm |
| Flatness | ≤ 30 μm (size dependent) |
| Edge Design | Chamfer / Radius customizable |
| Quality Standard | No cracks, chips, or contamination |
Silicon rings are widely used in:
They are particularly suitable for mature and mid-level semiconductor nodes where cost efficiency and stable performance are key priorities.
| Feature | Single Crystal Silicon | Polycrystalline Silicon |
|---|---|---|
| Uniformity | Higher | Moderate |
| Electrical Stability | Better | Standard |
| Cost | Higher | Lower |
| Machinability | Good | Very Good |
| Typical Use | High-precision processes | General industrial use |
| Feature | Silicon Ring | SiC Ring |
|---|---|---|
| Cost | Lower | Higher |
| Plasma Resistance | Moderate | Excellent |
| Lifetime | Shorter | Longer |
| Machining Difficulty | Easier | Harder |
| Best Application | Standard processes | Harsh plasma environments |
Silicon rings are preferred when cost efficiency and process compatibility are more important than ultra-long service life.
Silicon rings remain widely used in semiconductor fabs because they provide:
They are a practical and reliable choice for high-volume manufacturing environments.
Available customization includes:
Yes. It is a consumable component that gradually erodes under plasma exposure and must be replaced periodically.
Single crystal silicon provides better uniformity and electrical performance, while polycrystalline silicon offers lower cost and flexible manufacturing.
Yes. Dimensions, resistivity, surface finish, and geometry can all be customized according to equipment requirements or drawings.
Silicon rings typically have a shorter service life due to lower plasma resistance, especially in aggressive etching environments.
Production usually takes 3–5 weeks depending on design complexity and order volume.
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widel... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widel...
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