Pinhole Free Glassivation SLC Capacitor Wafer Level S Parameter Consistency MOS

Product Specification

Custom MOS Capacitor Pinhole Free Glassivation Passivation Wafer Level S Parameter Consistency Fine Capacitance Step

HACC-CUSTOM-GS: Pinhole-Free Glassivation MOS Capacitor with Wafer-Level S-Parameter Consistency & Fine Capacitance Step

Advanced Pinhole-Free Glassivation & Passivation

MOS capacitor reliability in harsh environments — particularly high-humidity, high-temperature operating conditions — is dominated by the quality of the passivation and glassivation layers. A single pinhole defect can create a moisture ingress path, degrading dielectric integrity over time. The HACC-CUSTOM-GS eliminates this failure mode through a dual-layer PECVD passivation stack:

• Base layer: 2000Å PECVD SiO₂ — excellent step coverage, low stress, hydrogen passivation of silicon surface states
• Top layer: 3000–8000Å PECVD Si₃N₄ — superior moisture barrier (WVTR <0.01 g/m²/day), scratch protection, sodium ion barrier

Pinhole density is verified below 0.01/cm² through 100% wafer-level liquid crystal hot spot detection, providing visual confirmation of defect-free passivation coverage before die singulation. The SiN moisture barrier is validated through >1000 hours HAST (Highly Accelerated Stress Test) at 130°C / 85% RH with leakage current shift maintained below 10%, ensuring field reliability in tropical, marine, and unsealed operating environments.

Wafer-Level In-Situ S-Parameter Consistency Control

Production consistency is the gap between a successful prototype and a manufacturable product. The HACC-CUSTOM-GS bridges this gap with 100% die-level wafer probing that directly measures S-parameters from 100 MHz to 20 GHz — capturing the actual RF behavior of every die, not just DC capacitance. Wafer-level uniformity is validated: S11 magnitude <±0.1 dB die-to-die and S21 phase <±2 degrees at 10 GHz. Process capability is quantified through CpK exceeding 1.67 for capacitance, ESR, and self-resonant frequency (SRF), with SPC control charts maintained per lot and a wafer map documenting the parametric distribution. Every shipped lot includes this wafer map — transforming the capacitor from a commodity component to a characterized, traceable RF building block.

Fine Capacitance Step & Precision Tuning

Complementing the passivation and consistency advantages, the HACC-CUSTOM-GS maintains the same precision value platform: 1 pF minimum capacitance step, 0.1 pF laser trim resolution, closed-loop in-situ C measurement feedback during trim, and S-parameter verification post-trim — ensuring the delivered capacitance value is verified in its actual RF operating environment.

Key Specifications

Applications

• Harsh Environment RF Front-Ends — Dual-layer glassivation, >1000h HAST, pinhole-free for tropical/marine unsealed operation
• Phased Array T/R Module Bias Networks — Die-to-die S21 phase <±2°, 100% S-parameter tested per die for beamforming phase accuracy
• Precision Instrumentation Front-Ends — <1 nA leakage at 25°C, CpK >1.67 for C/ESR/SRF, wafer map traceability per shipped lot
• High-Volume Wireless Infrastructure — 0.1 pF laser-trim resolution, in-situ S-parameter verification, SPC-controlled per lot for consistent production builds

Contact us with your passivation, capacitance, and consistency requirements. Pinhole-free glassivation MOS capacitors with wafer-level S-parameter data ship in 5–7 business days.