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SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.

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China GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for
China GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for

  1. China GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for
  2. China GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for

GRM41 Dry Vacuum Pump System 600 L/min KF40 PMSM Energy Efficient Drive for

  1. MOQ: 1 Set
  2. Price: Negotiable
  3. Get Latest Price
Ultimate Pressure (Gas Ballast Closed) ≤1 Pa
Motor Type PMSM (Permanent Magnet Synchronous Motor)
Max Water Vapor Capacity 350 g/h
Delivery Time 15-30 working days after order confirmation
Protection Class IP20D
Payment Terms T/T
Ultimate Pressure (Gas Ballast Open) ≤10 Pa
Dimensions 630×347×400 mm
Max Continuous Inlet Pressure 1000 mbar
Outlet Connection KF25
Maximum Pumping Speed 600 L/min (36 m³/h)
Supply Ability 200 Sets per Month
Weight 54 kg
Type Dry Vacuum Pump System
Noise Level ≤65 dB
Motor Power 0.75 kW
Rated Current 2.4 A
Gas Ballast Connection PT1/4
Model GRM41
Oil Volume 0.25 L
Packaging Details Export-grade plywood case with shock-proof foam insert and vacuum-sealed moisture barrier
Exhaust Pressure ≤3000 Pa
Inlet Connection KF40
Gas Ballast Pressure 0.02-0.05 MPa
Power Supply 200-240V, Single Phase, 50/60Hz
Control Interface RS485 Remote Monitoring
Ambient Temperature 5-40 ℃
Model Number GRM41
Place of Origin Zhejiang, China
Brand Name OEM

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Product Specification

Ultimate Pressure (Gas Ballast Closed) ≤1 Pa Motor Type PMSM (Permanent Magnet Synchronous Motor)
Max Water Vapor Capacity 350 g/h Delivery Time 15-30 working days after order confirmation
Protection Class IP20D Payment Terms T/T
Ultimate Pressure (Gas Ballast Open) ≤10 Pa Dimensions 630×347×400 mm
Max Continuous Inlet Pressure 1000 mbar Outlet Connection KF25
Maximum Pumping Speed 600 L/min (36 m³/h) Supply Ability 200 Sets per Month
Weight 54 kg Type Dry Vacuum Pump System
Noise Level ≤65 dB Motor Power 0.75 kW
Rated Current 2.4 A Gas Ballast Connection PT1/4
Model GRM41 Oil Volume 0.25 L
Packaging Details Export-grade plywood case with shock-proof foam insert and vacuum-sealed moisture barrier Exhaust Pressure ≤3000 Pa
Inlet Connection KF40 Gas Ballast Pressure 0.02-0.05 MPa
Power Supply 200-240V, Single Phase, 50/60Hz Control Interface RS485 Remote Monitoring
Ambient Temperature 5-40 ℃ Model Number GRM41
Place of Origin Zhejiang, China Brand Name OEM
High Light Dry Vacuum Pump System GRM41PMSM Energy Efficient Drive PumpSemiconductor Vacuum Coating Solution

GRM41 Dry Vacuum Pump System

The GRM41 is a high-performance oil-free dry vacuum pump system engineered for demanding high-purity vacuum processes in semiconductor manufacturing, photovoltaic cell production, and flat panel display fabrication. Equipped with a PMSM (Permanent Magnet Synchronous Motor) energy-efficient drive delivering 0.75 kW output, this compact system achieves an impressive 600 L/min (36 m³/h) maximum pumping speed with an ultimate pressure of ≤1 Pa. The integrated RS485 remote monitoring interface enables seamless integration into automated production environments.

Key Features

  • PMSM Energy Efficient Drive: Permanent magnet synchronous motor technology delivers superior energy efficiency with 0.75 kW power consumption, reducing operational costs while maintaining high performance.
  • Oil-Free Dry Operation: No oil contamination risk in process chambers, ensuring ultra-clean vacuum conditions essential for semiconductor and photovoltaic manufacturing.
  • High Vacuum Performance: Achieves ultimate pressure of ≤1 Pa (gas ballast closed) and ≤10 Pa (gas ballast open), suitable for demanding high-vacuum applications.
  • Integrated Gas Ballast System: Built-in gas ballast valve with PT1/4 connection handles water vapor up to 350 g/h, preventing condensation and extending pump service life.
  • RS485 Remote Monitoring: Intelligent control interface supports remote operation, parameter monitoring, and diagnostic capabilities for Industry 4.0 integration.
  • Compact Lightweight Design: Dimensions of 630*347*400mm and weight of only 54 kg allow easy installation in space-constrained cleanroom environments.
  • Low Noise Operation: Noise level ≤65 dB with integrated silencer and check valve, ensuring comfortable working environments.
  • Robust Construction: Aluminum alloy and cast iron housing with fluoroelastomer (FKM) seals ensure long-term reliability and chemical compatibility.
  • KF Standard Interfaces: KF40 inlet and KF25 exhaust connections for quick, tool-free assembly with standard vacuum components.

Technical Specifications

ParameterSpecification
ModelGRM41
TypeDry Vacuum Pump System
Maximum Pumping Speed600 L/min (36 m³/h)
Ultimate Pressure (Gas Ballast Open)≤10 Pa
Ultimate Pressure (Gas Ballast Closed)≤1 Pa
Max Continuous Inlet Pressure1000 mbar
Exhaust Pressure≤3000 Pa
Motor Power0.75 kW
Motor TypePMSM (Permanent Magnet Synchronous Motor)
Power Supply200-240V, Single Phase, 50/60Hz
Rated Current2.4 A
Inlet ConnectionKF40
Outlet ConnectionKF25
Gas Ballast ConnectionPT1/4
Gas Ballast Pressure0.02-0.05 MPa
Max Water Vapor Capacity350 g/h
Noise Level≤65 dB
Oil Volume0.25 L
Weight54 kg
Dimensions (L*W*H)630*347*400 mm
Protection ClassIP20D
Control InterfaceRS485 Remote Monitoring
Ambient Temperature5-40 ℃

Typical Applications

  • Semiconductor wafer processing and fabrication
  • Photovoltaic cell manufacturing (PVD, PECVD, etching)
  • Flat panel display and OLED production
  • Vacuum coating and thin film deposition
  • Research and laboratory high-vacuum systems
  • Laser and optics industry
  • Analytical instrumentation backing pump
  • Load lock chamber evacuation

Company Details

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  • Business Type:

    Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller

  • Ecer Certification:

    Verified Supplier

  Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...   Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...

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Get in touch with us

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  • SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
  • #3,No.152 Kangzhuang Rd,Zhoushi Town,Kunshan city,Suzhou,PRC.
  • https://www.industrial-vacuumpump.com/

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